JPH09275055A5 - - Google Patents

Info

Publication number
JPH09275055A5
JPH09275055A5 JP1996081300A JP8130096A JPH09275055A5 JP H09275055 A5 JPH09275055 A5 JP H09275055A5 JP 1996081300 A JP1996081300 A JP 1996081300A JP 8130096 A JP8130096 A JP 8130096A JP H09275055 A5 JPH09275055 A5 JP H09275055A5
Authority
JP
Japan
Prior art keywords
chamber
outside air
measuring means
exposure apparatus
concentration measuring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1996081300A
Other languages
English (en)
Japanese (ja)
Other versions
JP3658852B2 (ja
JPH09275055A (ja
Filing date
Publication date
Priority claimed from JP08130096A external-priority patent/JP3658852B2/ja
Priority to JP08130096A priority Critical patent/JP3658852B2/ja
Application filed filed Critical
Priority to KR1019970012127A priority patent/KR100542414B1/ko
Publication of JPH09275055A publication Critical patent/JPH09275055A/ja
Priority to US09/266,873 priority patent/US6535270B1/en
Priority to US10/237,133 priority patent/US20030035087A1/en
Publication of JPH09275055A5 publication Critical patent/JPH09275055A5/ja
Priority to US11/071,106 priority patent/US20050185156A1/en
Publication of JP3658852B2 publication Critical patent/JP3658852B2/ja
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP08130096A 1996-03-27 1996-04-03 露光装置 Expired - Fee Related JP3658852B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP08130096A JP3658852B2 (ja) 1996-04-03 1996-04-03 露光装置
KR1019970012127A KR100542414B1 (ko) 1996-03-27 1997-03-27 노광장치및공조장치
US09/266,873 US6535270B1 (en) 1996-03-27 1999-03-12 Exposure apparatus and air-conditioning apparatus for use with exposure apparatus
US10/237,133 US20030035087A1 (en) 1996-03-27 2002-09-09 Exposure apparatus and air-conditioning apparatus for use with exposure apparatus
US11/071,106 US20050185156A1 (en) 1996-03-27 2005-03-04 Exposure apparatus and air-conditioning apparatus for use with exposure apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP08130096A JP3658852B2 (ja) 1996-04-03 1996-04-03 露光装置

Publications (3)

Publication Number Publication Date
JPH09275055A JPH09275055A (ja) 1997-10-21
JPH09275055A5 true JPH09275055A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 2004-07-29
JP3658852B2 JP3658852B2 (ja) 2005-06-08

Family

ID=13742551

Family Applications (1)

Application Number Title Priority Date Filing Date
JP08130096A Expired - Fee Related JP3658852B2 (ja) 1996-03-27 1996-04-03 露光装置

Country Status (1)

Country Link
JP (1) JP3658852B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6313953B1 (en) * 1999-01-15 2001-11-06 Donaldson Company, Inc. Gas chemical filtering for optimal light transmittance; and methods
AU6471900A (en) * 1999-08-05 2001-03-05 Nikon Corporation Optical device for illumination, exposure device, container of optical part, method of assembling exposure device, method of evaluating material, and method anddevice for evaluating filter
DE10061248B4 (de) * 2000-12-09 2004-02-26 Carl Zeiss Verfahren und Vorrichtung zur In-situ-Dekontamination eines EUV-Lithographiegerätes
JP2008224485A (ja) * 2007-03-14 2008-09-25 Espec Corp シロキサン耐久試験機
JP5219878B2 (ja) * 2009-02-20 2013-06-26 キヤノン株式会社 露光装置及び外気導入ユニット、それを用いたデバイスの製造方法
WO2012131944A1 (ja) 2011-03-30 2012-10-04 富士通株式会社 大気環境測定装置、大気環境測定方法及び大気環境測定システム
JP6356059B2 (ja) * 2014-12-26 2018-07-11 東京エレクトロン株式会社 基板処理装置、基板処理方法及び記憶媒体
JP7599775B2 (ja) * 2020-09-08 2024-12-16 株式会社ディスコ 高圧エアーを利用する装置

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