JPH089162Y2 - 基板保持装置 - Google Patents

基板保持装置

Info

Publication number
JPH089162Y2
JPH089162Y2 JP40126190U JP40126190U JPH089162Y2 JP H089162 Y2 JPH089162 Y2 JP H089162Y2 JP 40126190 U JP40126190 U JP 40126190U JP 40126190 U JP40126190 U JP 40126190U JP H089162 Y2 JPH089162 Y2 JP H089162Y2
Authority
JP
Japan
Prior art keywords
base
substrate
rubber
elastic body
holding device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP40126190U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0489547U (enrdf_load_stackoverflow
Inventor
司 野上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP40126190U priority Critical patent/JPH089162Y2/ja
Publication of JPH0489547U publication Critical patent/JPH0489547U/ja
Application granted granted Critical
Publication of JPH089162Y2 publication Critical patent/JPH089162Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Drying Of Semiconductors (AREA)
JP40126190U 1990-12-04 1990-12-04 基板保持装置 Expired - Lifetime JPH089162Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP40126190U JPH089162Y2 (ja) 1990-12-04 1990-12-04 基板保持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP40126190U JPH089162Y2 (ja) 1990-12-04 1990-12-04 基板保持装置

Publications (2)

Publication Number Publication Date
JPH0489547U JPH0489547U (enrdf_load_stackoverflow) 1992-08-05
JPH089162Y2 true JPH089162Y2 (ja) 1996-03-13

Family

ID=31879384

Family Applications (1)

Application Number Title Priority Date Filing Date
JP40126190U Expired - Lifetime JPH089162Y2 (ja) 1990-12-04 1990-12-04 基板保持装置

Country Status (1)

Country Link
JP (1) JPH089162Y2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR960006958B1 (ko) * 1993-02-06 1996-05-25 현대전자산업주식회사 이시알 장비
KR101517020B1 (ko) 2008-05-15 2015-05-04 삼성디스플레이 주식회사 유기전계발광표시장치의 제조장치 및 제조방법

Also Published As

Publication number Publication date
JPH0489547U (enrdf_load_stackoverflow) 1992-08-05

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