JPH0418197Y2 - - Google Patents
Info
- Publication number
- JPH0418197Y2 JPH0418197Y2 JP7926185U JP7926185U JPH0418197Y2 JP H0418197 Y2 JPH0418197 Y2 JP H0418197Y2 JP 7926185 U JP7926185 U JP 7926185U JP 7926185 U JP7926185 U JP 7926185U JP H0418197 Y2 JPH0418197 Y2 JP H0418197Y2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- pad
- cooling
- cooling plate
- vacuum chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 34
- 238000001816 cooling Methods 0.000 claims description 25
- 239000002184 metal Substances 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 239000010409 thin film Substances 0.000 claims description 6
- 238000005468 ion implantation Methods 0.000 claims description 5
- 239000000498 cooling water Substances 0.000 claims description 4
- 229920001971 elastomer Polymers 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- 238000011109 contamination Methods 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229920002379 silicone rubber Polymers 0.000 description 2
- 239000004945 silicone rubber Substances 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7926185U JPH0418197Y2 (enrdf_load_stackoverflow) | 1985-05-29 | 1985-05-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7926185U JPH0418197Y2 (enrdf_load_stackoverflow) | 1985-05-29 | 1985-05-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61196526U JPS61196526U (enrdf_load_stackoverflow) | 1986-12-08 |
| JPH0418197Y2 true JPH0418197Y2 (enrdf_load_stackoverflow) | 1992-04-23 |
Family
ID=30624009
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7926185U Expired JPH0418197Y2 (enrdf_load_stackoverflow) | 1985-05-29 | 1985-05-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0418197Y2 (enrdf_load_stackoverflow) |
-
1985
- 1985-05-29 JP JP7926185U patent/JPH0418197Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61196526U (enrdf_load_stackoverflow) | 1986-12-08 |
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