JPS61196526U - - Google Patents

Info

Publication number
JPS61196526U
JPS61196526U JP7926185U JP7926185U JPS61196526U JP S61196526 U JPS61196526 U JP S61196526U JP 7926185 U JP7926185 U JP 7926185U JP 7926185 U JP7926185 U JP 7926185U JP S61196526 U JPS61196526 U JP S61196526U
Authority
JP
Japan
Prior art keywords
substrate
processing
pad
cooling
vacuum chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7926185U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0418197Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7926185U priority Critical patent/JPH0418197Y2/ja
Publication of JPS61196526U publication Critical patent/JPS61196526U/ja
Application granted granted Critical
Publication of JPH0418197Y2 publication Critical patent/JPH0418197Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP7926185U 1985-05-29 1985-05-29 Expired JPH0418197Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7926185U JPH0418197Y2 (enrdf_load_stackoverflow) 1985-05-29 1985-05-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7926185U JPH0418197Y2 (enrdf_load_stackoverflow) 1985-05-29 1985-05-29

Publications (2)

Publication Number Publication Date
JPS61196526U true JPS61196526U (enrdf_load_stackoverflow) 1986-12-08
JPH0418197Y2 JPH0418197Y2 (enrdf_load_stackoverflow) 1992-04-23

Family

ID=30624009

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7926185U Expired JPH0418197Y2 (enrdf_load_stackoverflow) 1985-05-29 1985-05-29

Country Status (1)

Country Link
JP (1) JPH0418197Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0418197Y2 (enrdf_load_stackoverflow) 1992-04-23

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