JPS6279870U - - Google Patents

Info

Publication number
JPS6279870U
JPS6279870U JP17011985U JP17011985U JPS6279870U JP S6279870 U JPS6279870 U JP S6279870U JP 17011985 U JP17011985 U JP 17011985U JP 17011985 U JP17011985 U JP 17011985U JP S6279870 U JPS6279870 U JP S6279870U
Authority
JP
Japan
Prior art keywords
electrode plate
heat medium
medium fluid
passage
ribs
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17011985U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17011985U priority Critical patent/JPS6279870U/ja
Publication of JPS6279870U publication Critical patent/JPS6279870U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • ing And Chemical Polishing (AREA)
JP17011985U 1985-11-05 1985-11-05 Pending JPS6279870U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17011985U JPS6279870U (enrdf_load_stackoverflow) 1985-11-05 1985-11-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17011985U JPS6279870U (enrdf_load_stackoverflow) 1985-11-05 1985-11-05

Publications (1)

Publication Number Publication Date
JPS6279870U true JPS6279870U (enrdf_load_stackoverflow) 1987-05-21

Family

ID=31104556

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17011985U Pending JPS6279870U (enrdf_load_stackoverflow) 1985-11-05 1985-11-05

Country Status (1)

Country Link
JP (1) JPS6279870U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60110873A (ja) * 1983-11-17 1985-06-17 Fujitsu Ltd タ−ゲットの冷却方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60110873A (ja) * 1983-11-17 1985-06-17 Fujitsu Ltd タ−ゲットの冷却方法

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