JPH087625Y2 - 減圧ｃｖｄ装置 - Google Patents

減圧ｃｖｄ装置

Info

Publication number
JPH087625Y2
JPH087625Y2 JP1986032083U JP3208386U JPH087625Y2 JP H087625 Y2 JPH087625 Y2 JP H087625Y2 JP 1986032083 U JP1986032083 U JP 1986032083U JP 3208386 U JP3208386 U JP 3208386U JP H087625 Y2 JPH087625 Y2 JP H087625Y2
Authority
JP
Japan
Prior art keywords
reaction
reaction chamber
exhaust
inner tube
connection flange
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986032083U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62145325U (enExample
Inventor
利一 狩野
茂 武田
竜彦 古門
Original Assignee
国際電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 国際電気株式会社 filed Critical 国際電気株式会社
Priority to JP1986032083U priority Critical patent/JPH087625Y2/ja
Publication of JPS62145325U publication Critical patent/JPS62145325U/ja
Application granted granted Critical
Publication of JPH087625Y2 publication Critical patent/JPH087625Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP1986032083U 1986-03-05 1986-03-05 減圧ｃｖｄ装置 Expired - Lifetime JPH087625Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986032083U JPH087625Y2 (ja) 1986-03-05 1986-03-05 減圧ｃｖｄ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986032083U JPH087625Y2 (ja) 1986-03-05 1986-03-05 減圧ｃｖｄ装置

Publications (2)

Publication Number Publication Date
JPS62145325U JPS62145325U (enExample) 1987-09-12
JPH087625Y2 true JPH087625Y2 (ja) 1996-03-04

Family

ID=30838413

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986032083U Expired - Lifetime JPH087625Y2 (ja) 1986-03-05 1986-03-05 減圧ｃｖｄ装置

Country Status (1)

Country Link
JP (1) JPH087625Y2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20240106229A (ko) * 2022-12-29 2024-07-08 고려대학교 산학협력단 모듈 교체형 챔버

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20240106229A (ko) * 2022-12-29 2024-07-08 고려대학교 산학협력단 모듈 교체형 챔버

Also Published As

Publication number Publication date
JPS62145325U (enExample) 1987-09-12

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