JPH08511615A - 排ガス浄化方法及び装置 - Google Patents
排ガス浄化方法及び装置Info
- Publication number
- JPH08511615A JPH08511615A JP7502426A JP50242695A JPH08511615A JP H08511615 A JPH08511615 A JP H08511615A JP 7502426 A JP7502426 A JP 7502426A JP 50242695 A JP50242695 A JP 50242695A JP H08511615 A JPH08511615 A JP H08511615A
- Authority
- JP
- Japan
- Prior art keywords
- combustion chamber
- fluid
- exhaust gas
- burner
- combustion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
- F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/14—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by absorption
- B01D53/18—Absorbing units; Liquid distributors therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/46—Removing components of defined structure
- B01D53/64—Heavy metals or compounds thereof, e.g. mercury
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
- F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
- F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
- F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
- F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES
- F23J15/00—Arrangements of devices for treating smoke or fumes
- F23J15/02—Arrangements of devices for treating smoke or fumes of purifiers, e.g. for removing noxious material
- F23J15/04—Arrangements of devices for treating smoke or fumes of purifiers, e.g. for removing noxious material using washing fluids
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
- F23L—SUPPLYING AIR OR NON-COMBUSTIBLE LIQUIDS OR GASES TO COMBUSTION APPARATUS IN GENERAL ; VALVES OR DAMPERS SPECIALLY ADAPTED FOR CONTROLLING AIR SUPPLY OR DRAUGHT IN COMBUSTION APPARATUS; INDUCING DRAUGHT IN COMBUSTION APPARATUS; TOPS FOR CHIMNEYS OR VENTILATING SHAFTS; TERMINALS FOR FLUES
- F23L7/00—Supplying non-combustible liquids or gases, other than air, to the fire, e.g. oxygen, steam
- F23L7/002—Supplying water
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Environmental & Geological Engineering (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Biomedical Technology (AREA)
- Health & Medical Sciences (AREA)
- Combustion & Propulsion (AREA)
- Treating Waste Gases (AREA)
- Incineration Of Waste (AREA)
Abstract
Description
Claims (1)
- 【特許請求の範囲】 1.特にCVD処理及びプラズマ処理から出る排ガスを燃焼室と燃焼ガス炎を発 生させるバーナーとを用いて熱的に分解及び(または)酸化させて浄化する方法 において、流体を燃焼室に直接供給し、バーナー及び燃焼ガス炎の上方の空間を 緻密に満たすように噴霧すること、燃焼した排ガス流を、緻密に分布した流体で 充填されている前記燃焼室空間を通過させ、その後燃焼室から排出させること、 前記流体が燃焼室の壁面において流体フィルムを形成し、壁面から落下する流体 を燃焼室の底部の領域において排出することを特徴とする方法。 2.流体として水を使用することを特徴とする、請求項1に記載の方法。 3.流体として、反応成分を含んだ水、例えば苛性ソーダ溶液を使用することを 特徴とする、請求項1に記載の方法。 4.燃焼室に吸い出し管を介して付加的な吸着装置または付加的なフィルタを接 続することを特徴とする、請求項1から3までのいずれか1つに記載の方法。 5.燃焼室に排出管を介して吸着剤回収装置を接続し、吸着剤を循環作動させる ことを特徴とする、請求項 1から4までのいずれか1つに記載の方法。 6.燃焼ガスと排ガスの供給部を備えたバーナーと燃焼室を有する、請求項1に 記載の方法を実施するための装置において、燃焼室(1)の上部領域に、流体の 噴霧装置がバーナー(3)の軸線上に配置されていること、噴霧装置が、中空円 錐ノズル(11)と中実円錐ノズル(12)とを有していること、中空ノズル( 11)が、バーナー(3)を配置した角度範囲(2α)、有利には50°以上の 角度範囲(2α)で流体から自由である中空円錐部に流体を噴霧すること、中実 円錐ノズル(12)が、有利には90°以上の角度で流体を中実円錐部に噴霧す ること、中空円錐ノズル(11)の背面で、排ガスの流動方向において凸の面が 作用し、この面の径がバーナー(3)の径よりも大きいか等しいことを特徴とす る装置。 7.両ノズルの間の空間(17)の一部において充填体の層が担持体格子上に送 入されていることを特徴とする、請求項6に記載の装置。 8.燃焼室(1)に排出管(19)を介して吸着剤回収装置が接続されているこ とを特徴とする、請求項6または7に記載の装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE4320044.3 | 1993-06-17 | ||
DE4320044A DE4320044A1 (de) | 1993-06-17 | 1993-06-17 | Verfahren und Einrichtung zur Reinigung von Abgasen |
PCT/EP1994/001985 WO1995000805A1 (de) | 1993-06-17 | 1994-06-17 | Verfahren und einrichtung zum reinigen von abgasen |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH08511615A true JPH08511615A (ja) | 1996-12-03 |
JP3467275B2 JP3467275B2 (ja) | 2003-11-17 |
Family
ID=6490527
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP50242695A Expired - Lifetime JP3467275B2 (ja) | 1993-06-17 | 1994-06-17 | 排ガス浄化装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US5693293A (ja) |
EP (1) | EP0702771B1 (ja) |
JP (1) | JP3467275B2 (ja) |
KR (1) | KR100312009B1 (ja) |
DE (2) | DE4320044A1 (ja) |
WO (1) | WO1995000805A1 (ja) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007116714A1 (ja) * | 2006-04-04 | 2007-10-18 | Babcock-Hitachi Kabushiki Kaisha | 湿式排煙脱硫装置 |
TWI406700B (zh) * | 2006-12-05 | 2013-09-01 | Ebara Corp | 燃燒式排氣處理裝置 |
US8591819B2 (en) | 2006-12-05 | 2013-11-26 | Ebara Corporation | Combustion-type exhaust gas treatment apparatus |
CN103501890A (zh) * | 2011-03-18 | 2014-01-08 | 加拿大派罗杰尼斯有限公司 | 消耗臭氧层物质的蒸汽等离子体弧水解 |
US9711824B2 (en) | 2012-11-09 | 2017-07-18 | Murata Manufacturing Co., Ltd. | Secondary battery and method for charging and discharging secondary battery |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19600873A1 (de) * | 1996-01-12 | 1997-10-02 | Das Duennschicht Anlagen Sys | Verfahren und Einrichtung zur Reinigung von schadstoffhaltigen Abgasen durch Verbrennen und chemische Umsetzung mit Hilfe einer Flamme in einer Brennkammer |
DE19631873C1 (de) * | 1996-08-07 | 1997-10-16 | Das Duennschicht Anlagen Sys | Einrichtung zur Reinigung von schadstoffhaltigen Abgasen in einer Brennkammer mit anschließender Wascheinrichtung |
TW342436B (en) * | 1996-08-14 | 1998-10-11 | Nippon Oxygen Co Ltd | Combustion type harm removal apparatus (1) |
US5955037A (en) * | 1996-12-31 | 1999-09-21 | Atmi Ecosys Corporation | Effluent gas stream treatment system having utility for oxidation treatment of semiconductor manufacturing effluent gases |
US6423284B1 (en) * | 1999-10-18 | 2002-07-23 | Advanced Technology Materials, Inc. | Fluorine abatement using steam injection in oxidation treatment of semiconductor manufacturing effluent gases |
US6349658B1 (en) * | 1999-10-28 | 2002-02-26 | Environmental Improvement Systems, Inc. | Auger combustor with fluidized bed |
GB0005231D0 (en) * | 2000-03-03 | 2000-04-26 | Boc Group Plc | Abatement of semiconductor processing gases |
JP2002166126A (ja) * | 2000-12-04 | 2002-06-11 | Sumitomo Seika Chem Co Ltd | 燃焼排ガスの処理装置 |
KR100443647B1 (ko) * | 2001-12-28 | 2004-08-09 | 두산중공업 주식회사 | 배기가스의 비저항을 조절할 수 있는 전기집진기 |
DE10304489B4 (de) * | 2002-04-11 | 2014-07-31 | Das Environmental Expert Gmbh | Einrichtung zur Reinigung von Abgasen mit fluorhaltigen Verbindungen in einem Verbrennungsreaktor mit niedriger Stickoxidemission |
DE10342692B4 (de) * | 2003-09-09 | 2006-01-12 | DAS-Dünnschicht Anlagen Systeme GmbH Dresden | Vorrichtung zur thermischen Behandlung von Schadstoffe enthaltenden Prozessabgasen |
US7270539B1 (en) * | 2003-10-28 | 2007-09-18 | Soil-Therm Equipment, Inc. | Method and apparatus for destruction of vapors and waste streams using flash oxidation |
DE102004047440B4 (de) | 2004-09-28 | 2007-11-08 | Centrotherm Clean Solutions Gmbh & Co.Kg | Anordnung zur Reinigung von toxischen Gasen aus Produktionsprozessen |
US7736599B2 (en) | 2004-11-12 | 2010-06-15 | Applied Materials, Inc. | Reactor design to reduce particle deposition during process abatement |
EP1954926A2 (en) | 2005-10-31 | 2008-08-13 | Applied Materials, Inc. | Process abatement reactor |
ES2355394T3 (es) * | 2006-07-05 | 2011-03-25 | Patco Engineering Gmbh | Método para enfriar y convertir gases de escape calientes, así como dispositivo para realizar dicho método. |
JP2009018290A (ja) * | 2007-07-13 | 2009-01-29 | Ebara Corp | 排ガス洗浄装置 |
US8136798B2 (en) | 2008-01-10 | 2012-03-20 | Peter Robert Stewart | Fluid conditioning apparatus |
CN102252330B (zh) * | 2010-05-21 | 2013-05-29 | 中芯国际集成电路制造(上海)有限公司 | 高温炉尾气处理装置 |
CN104511181B (zh) * | 2013-09-27 | 2016-08-31 | 天津市天大津康化工设备有限公司 | 一种能够调节分布槽水平度的气液分布槽装置 |
CN104511180B (zh) * | 2013-09-27 | 2016-08-17 | 天津市天大津康化工设备有限公司 | 一种入液保持液面平稳度的气液分布槽装置 |
CN107051079A (zh) * | 2017-03-22 | 2017-08-18 | 王琳荣 | 一种工厂一氧化碳废气无烟处理装置 |
KR20190061556A (ko) | 2017-11-28 | 2019-06-05 | 회명마루지오(주) | 유독성기체 정화장치 및 유독성 기체 정화방법 |
KR102049811B1 (ko) | 2019-09-03 | 2019-11-28 | 회명워터젠(주) | 유독성기체 정화장치 및 유독성 기체 정화방법 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6038968B2 (ja) * | 1979-12-12 | 1985-09-04 | 製鉄化学工業株式会社 | 半導体用ガスの除害法 |
JPS5768122A (en) * | 1980-10-14 | 1982-04-26 | Babcock Hitachi Kk | Wet type desulfurizer for waste gas of coal combustion |
JPS60118216A (ja) * | 1983-11-30 | 1985-06-25 | Sanei Seisakusho:Kk | 排ガス処理装置 |
US4555389A (en) * | 1984-04-27 | 1985-11-26 | Toyo Sanso Co., Ltd. | Method of and apparatus for burning exhaust gases containing gaseous silane |
JPS6193310A (ja) * | 1984-10-15 | 1986-05-12 | Mitsui Toatsu Chem Inc | 廃ガスの処理方法 |
JPS6362528A (ja) * | 1986-09-03 | 1988-03-18 | Shindengen Electric Mfg Co Ltd | 排気ガス処理装置 |
FR2612606B1 (fr) * | 1987-03-18 | 1990-09-14 | Air Liquide | Procede et dispositif de destruction d'effluents gazeux toxiques |
DD272416A1 (de) * | 1988-06-10 | 1989-10-11 | Inst Forsch Ration Zuckerind | Verfahren zur rueckgewinnung der waerme von rauchgasen |
DD273009A1 (de) * | 1988-06-15 | 1989-11-01 | Elektromat Veb | Verfahren zur reinigung von abgasen aus cvd-prozessen |
DD273008A1 (de) * | 1988-06-15 | 1989-11-01 | Elektromat Veb | Vorrichtung zum reinigen von abgasen aus niederdruckprozessen |
US5123836A (en) * | 1988-07-29 | 1992-06-23 | Chiyoda Corporation | Method for the combustion treatment of toxic gas-containing waste gas |
JPH0710334B2 (ja) * | 1991-03-19 | 1995-02-08 | 荏原インフィルコ株式会社 | Nf3 排ガス処理方法および装置 |
-
1993
- 1993-06-17 DE DE4320044A patent/DE4320044A1/de not_active Withdrawn
-
1994
- 1994-06-17 US US08/564,208 patent/US5693293A/en not_active Expired - Fee Related
- 1994-06-17 DE DE59404966T patent/DE59404966D1/de not_active Expired - Fee Related
- 1994-06-17 EP EP94921613A patent/EP0702771B1/de not_active Expired - Lifetime
- 1994-06-17 WO PCT/EP1994/001985 patent/WO1995000805A1/de active IP Right Grant
- 1994-06-17 KR KR1019950705711A patent/KR100312009B1/ko not_active IP Right Cessation
- 1994-06-17 JP JP50242695A patent/JP3467275B2/ja not_active Expired - Lifetime
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007116714A1 (ja) * | 2006-04-04 | 2007-10-18 | Babcock-Hitachi Kabushiki Kaisha | 湿式排煙脱硫装置 |
US8092582B2 (en) | 2006-04-04 | 2012-01-10 | Babcock-Hitachi Kabushiki Kaisha | Wet-type exhaust gas desulfurizer |
TWI406700B (zh) * | 2006-12-05 | 2013-09-01 | Ebara Corp | 燃燒式排氣處理裝置 |
US8591819B2 (en) | 2006-12-05 | 2013-11-26 | Ebara Corporation | Combustion-type exhaust gas treatment apparatus |
CN103501890A (zh) * | 2011-03-18 | 2014-01-08 | 加拿大派罗杰尼斯有限公司 | 消耗臭氧层物质的蒸汽等离子体弧水解 |
US9711824B2 (en) | 2012-11-09 | 2017-07-18 | Murata Manufacturing Co., Ltd. | Secondary battery and method for charging and discharging secondary battery |
Also Published As
Publication number | Publication date |
---|---|
KR100312009B1 (ko) | 2002-06-20 |
US5693293A (en) | 1997-12-02 |
EP0702771A1 (de) | 1996-03-27 |
DE59404966D1 (de) | 1998-02-12 |
KR960703222A (ko) | 1996-06-19 |
JP3467275B2 (ja) | 2003-11-17 |
WO1995000805A1 (de) | 1995-01-05 |
DE4320044A1 (de) | 1994-12-22 |
EP0702771B1 (de) | 1998-01-07 |
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