FI973084A0 - Laitteisto poistokaasujen puhdistamiseksi - Google Patents

Laitteisto poistokaasujen puhdistamiseksi

Info

Publication number
FI973084A0
FI973084A0 FI973084A FI973084A FI973084A0 FI 973084 A0 FI973084 A0 FI 973084A0 FI 973084 A FI973084 A FI 973084A FI 973084 A FI973084 A FI 973084A FI 973084 A0 FI973084 A0 FI 973084A0
Authority
FI
Finland
Prior art keywords
combustion
pct
burner
space
waste gases
Prior art date
Application number
FI973084A
Other languages
English (en)
Swedish (sv)
Other versions
FI973084A (fi
Inventor
Rolf Hartung
Hans Autenrieth
Gunter Kroedel
Lutz Fabian
Dietmar Resch
Original Assignee
Centrotherm Elektrische Anlage
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centrotherm Elektrische Anlage filed Critical Centrotherm Elektrische Anlage
Publication of FI973084A0 publication Critical patent/FI973084A0/fi
Publication of FI973084A publication Critical patent/FI973084A/fi

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J15/00—Arrangements of devices for treating smoke or fumes
    • F23J15/02—Arrangements of devices for treating smoke or fumes of purifiers, e.g. for removing noxious material
    • F23J15/04—Arrangements of devices for treating smoke or fumes of purifiers, e.g. for removing noxious material using washing fluids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/77—Liquid phase processes
    • B01D53/78—Liquid phase processes with gas-liquid contact
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G2209/00—Specific waste
    • F23G2209/14—Gaseous waste or fumes
    • F23G2209/142—Halogen gases, e.g. silane
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J2219/00—Treatment devices
    • F23J2219/40—Sorption with wet devices, e.g. scrubbers

Landscapes

  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Biomedical Technology (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Incineration Of Waste (AREA)
  • Treating Waste Gases (AREA)
  • Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
  • Gas Separation By Absorption (AREA)
  • Processes For Solid Components From Exhaust (AREA)
FI973084A 1995-01-23 1997-07-22 Laitteisto poistokaasujen puhdistamiseksi FI973084A (fi)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19501914A DE19501914C1 (de) 1995-01-23 1995-01-23 Vorrichtung zur Reinigung von Abgasen
PCT/DE1996/000076 WO1996023173A1 (de) 1995-01-23 1996-01-19 Vorrichtung zur reinigung von abgasen

Publications (2)

Publication Number Publication Date
FI973084A0 true FI973084A0 (fi) 1997-07-22
FI973084A FI973084A (fi) 1997-09-23

Family

ID=7752085

Family Applications (1)

Application Number Title Priority Date Filing Date
FI973084A FI973084A (fi) 1995-01-23 1997-07-22 Laitteisto poistokaasujen puhdistamiseksi

Country Status (10)

Country Link
US (1) US5900217A (fi)
EP (1) EP0803042B1 (fi)
JP (1) JP3111080B2 (fi)
KR (1) KR100421814B1 (fi)
AT (1) ATE169994T1 (fi)
AU (1) AU4480896A (fi)
DE (2) DE19501914C1 (fi)
FI (1) FI973084A (fi)
RU (1) RU2158391C2 (fi)
WO (1) WO1996023173A1 (fi)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5955037A (en) * 1996-12-31 1999-09-21 Atmi Ecosys Corporation Effluent gas stream treatment system having utility for oxidation treatment of semiconductor manufacturing effluent gases
DE29712026U1 (de) 1997-07-09 1998-11-12 Ebara Germany Gmbh Brenner für die Verbrennung von Abgasen mit mindestens einer kondensationsfähigen Komponente
US6153150A (en) 1998-01-12 2000-11-28 Advanced Technology Materials, Inc. Apparatus and method for controlled decomposition oxidation of gaseous pollutants
US6261524B1 (en) 1999-01-12 2001-07-17 Advanced Technology Materials, Inc. Advanced apparatus for abatement of gaseous pollutants
JP4776073B2 (ja) * 1998-05-29 2011-09-21 セントローテルム・エレクトリツシエ・アンラーゲン・ゲゼルシヤフト・ミト・ベシユレンクテル・ハフツング・ウント・コンパニー プロセス廃ガスを精製する方法
DE19927540A1 (de) 1999-06-16 2000-12-21 Ct Therm Elek Sche Anlagen Gmb Abgasreinigungssystem
US6423284B1 (en) 1999-10-18 2002-07-23 Advanced Technology Materials, Inc. Fluorine abatement using steam injection in oxidation treatment of semiconductor manufacturing effluent gases
US6736635B1 (en) 1999-11-02 2004-05-18 Ebara Corporation Combustor for exhaust gas treatment
US20040028590A1 (en) * 2000-08-22 2004-02-12 Takeshi Tsuji Method and device for combustion type exhaust gas treatment
DE10342692B4 (de) * 2003-09-09 2006-01-12 DAS-Dünnschicht Anlagen Systeme GmbH Dresden Vorrichtung zur thermischen Behandlung von Schadstoffe enthaltenden Prozessabgasen
DE10355970A1 (de) * 2003-11-24 2005-06-23 DAS-Dünnschicht Anlagen Systeme GmbH Dresden Vorrichtung und Verfahren für die Separation von Partikeln aus thermisch nachbehandelten Prozessabgasen
US7569193B2 (en) * 2003-12-19 2009-08-04 Applied Materials, Inc. Apparatus and method for controlled combustion of gaseous pollutants
DE102004047440B4 (de) * 2004-09-28 2007-11-08 Centrotherm Clean Solutions Gmbh & Co.Kg Anordnung zur Reinigung von toxischen Gasen aus Produktionsprozessen
US7736599B2 (en) * 2004-11-12 2010-06-15 Applied Materials, Inc. Reactor design to reduce particle deposition during process abatement
SE0501840L (sv) * 2005-08-19 2007-02-20 Aga Ab Förfarande jämte för övervakning av en brännare
JP5102217B2 (ja) * 2005-10-31 2012-12-19 アプライド マテリアルズ インコーポレイテッド プロセス削減反応器
KR100650937B1 (ko) * 2005-11-09 2006-11-29 주식회사 글로벌스탠다드테크놀로지 폐가스 정화처리장치의 버너조립체
KR100634173B1 (ko) * 2006-06-23 2006-10-16 주식회사 이즈컨텍 폐가스 처리장치
JP2009174740A (ja) * 2008-01-22 2009-08-06 Fine Energy Kk 廃棄物処理方法及び装置
US9089811B2 (en) * 2012-04-30 2015-07-28 Highvac Corp. Coaxial / coaxial treatment module
GB2516267B (en) * 2013-07-17 2016-08-17 Edwards Ltd Head assembly
CN103830994B (zh) * 2013-12-05 2016-03-02 山东派力迪环保工程有限公司 一种排级式等离子体裂解氧化反应器
CN107246616B (zh) * 2017-06-09 2018-12-18 加拿大艾浦莱斯有限公司 一种等离子体催化合成气燃烧室
CN108437294A (zh) * 2018-04-24 2018-08-24 德昌金锋橡胶有限公司 一种充分分解废旧轮胎的工艺
NL2032864B1 (en) * 2022-08-26 2024-03-05 Levitech B V An exhaust abatement apparatus and a method for abating reactive gasses

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4555389A (en) * 1984-04-27 1985-11-26 Toyo Sanso Co., Ltd. Method of and apparatus for burning exhaust gases containing gaseous silane
DE3731205A1 (de) * 1987-09-17 1989-03-30 Erdoelchemie Gmbh Vorrichtung zum eintrag von gasen in brennraeume sowie verfahren zur minderung von schadstoffen bei verbrennungsvorgaengen
DD273008A1 (de) * 1988-06-15 1989-11-01 Elektromat Veb Vorrichtung zum reinigen von abgasen aus niederdruckprozessen
US5123836A (en) * 1988-07-29 1992-06-23 Chiyoda Corporation Method for the combustion treatment of toxic gas-containing waste gas

Also Published As

Publication number Publication date
KR19980701575A (ko) 1998-05-15
EP0803042B1 (de) 1998-08-19
ATE169994T1 (de) 1998-09-15
DE59600454D1 (de) 1998-09-24
RU2158391C2 (ru) 2000-10-27
JPH10510914A (ja) 1998-10-20
US5900217A (en) 1999-05-04
DE19501914C1 (de) 1996-04-04
AU4480896A (en) 1996-08-14
FI973084A (fi) 1997-09-23
JP3111080B2 (ja) 2000-11-20
KR100421814B1 (ko) 2004-04-21
WO1996023173A1 (de) 1996-08-01
EP0803042A1 (de) 1997-10-29

Similar Documents

Publication Publication Date Title
FI973084A0 (fi) Laitteisto poistokaasujen puhdistamiseksi
JP3486022B2 (ja) 排ガス処理装置
JP3467275B2 (ja) 排ガス浄化装置
JP5347183B2 (ja) ガス流からフッ素を除去するための方法及び装置
US20040191146A1 (en) Method and apparatus for treating exhaust gas
KR970063445A (ko) 전용 세척 기체 주입장치를 포함하는 화학 증착 시스템
DE602005001614D1 (de) Vorrichtung und verfahren zum zerstören von flüssigem, pulverförmigem oder gasförmigem abfall unter verwendung von induktiv gekoppeltem plasma
KR20150145717A (ko) 배출 가스 처리 장치
KR101097240B1 (ko) 배기 가스 처리 방법 및 장치
CA2117326A1 (en) A Method for Decomposition of Hydrocarbons
DE58905880D1 (de) Vorrichtung zur Reinigung von Abgasen aus CVD-Prozessen.
WO2009010792A2 (en) Plasma reactor
JP2001082723A (ja) 燃焼式除害装置及び燃焼式除害装置用バーナー
GB2308991A (en) Purification of waste gas
US7455819B2 (en) Apparatus for simultaneous dry desulfurization/denitrification
TW201900264A (zh) 排氣之減壓除害方法及其裝置
JP2001179051A (ja) 水素含有排ガスの除害方法及び除害装置
JP3971843B2 (ja) 半導体製造排ガスの除害装置及び除害方法
JP2002061821A (ja) 燃焼式排ガス処理方法及び装置
JP2963792B2 (ja) 有毒性排ガスの処理方法及び装置
JP2013044479A (ja) 塩化珪素化合物を含む排ガスの浄化方法
KR100879800B1 (ko) 폐가스 처리용 스크러버
KR100341955B1 (ko) 가스 스크러버 시스템
KR20090105194A (ko) 폐가스 처리장치
GB2353034A (en) Reduction of noxious substances