JPH08507179A - 薄膜電子装置の修理線構造 - Google Patents
薄膜電子装置の修理線構造Info
- Publication number
- JPH08507179A JPH08507179A JP7517520A JP51752095A JPH08507179A JP H08507179 A JPH08507179 A JP H08507179A JP 7517520 A JP7517520 A JP 7517520A JP 51752095 A JP51752095 A JP 51752095A JP H08507179 A JPH08507179 A JP H08507179A
- Authority
- JP
- Japan
- Prior art keywords
- conductive line
- line
- conductive
- protective layer
- repair
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000008439 repair process Effects 0.000 title claims abstract description 70
- 239000010409 thin film Substances 0.000 title claims description 14
- 239000011241 protective layer Substances 0.000 claims abstract description 51
- 239000010410 layer Substances 0.000 claims abstract description 29
- 239000000463 material Substances 0.000 claims abstract description 27
- 239000004642 Polyimide Substances 0.000 claims abstract description 4
- 229920001721 polyimide Polymers 0.000 claims abstract description 4
- 239000004065 semiconductor Substances 0.000 claims description 27
- 239000003989 dielectric material Substances 0.000 claims description 11
- 238000003384 imaging method Methods 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 9
- 239000000758 substrate Substances 0.000 claims description 8
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 7
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 7
- 230000005669 field effect Effects 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 abstract description 16
- 230000001681 protective effect Effects 0.000 abstract 1
- 230000002950 deficient Effects 0.000 description 7
- 238000003466 welding Methods 0.000 description 6
- 230000007547 defect Effects 0.000 description 5
- 239000011159 matrix material Substances 0.000 description 5
- 239000004020 conductor Substances 0.000 description 4
- 230000006866 deterioration Effects 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 230000003628 erosive effect Effects 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 2
- 230000004075 alteration Effects 0.000 description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- 238000003491 array Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 239000011733 molybdenum Substances 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 241000132007 Bahia Species 0.000 description 1
- 229930194845 Bahia Natural products 0.000 description 1
- 235000017858 Laurus nobilis Nutrition 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/14—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation
- H01L27/144—Devices controlled by radiation
- H01L27/146—Imager structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76886—Modifying permanently or temporarily the pattern or the conductivity of conductive members, e.g. formation of alloys, reduction of contact resistances
- H01L21/76892—Modifying permanently or temporarily the pattern or the conductivity of conductive members, e.g. formation of alloys, reduction of contact resistances modifying the pattern
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/525—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body with adaptable interconnections
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/136259—Repairing; Defects
- G02F1/136263—Line defects
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Electromagnetism (AREA)
- Manufacturing & Machinery (AREA)
- Solid State Image Pick-Up Elements (AREA)
- Devices For Indicating Variable Information By Combining Individual Elements (AREA)
Abstract
Description
Claims (1)
- 【特許請求の範囲】 1. 基板の上に製造された画素配列構造を有している薄膜電子式作像装置で あって、前記画素配列構造は、 前記作像装置の第1の軸線に沿って設けられている第1の導電線と、 前記基板の上及び前記第1の導電線の上方に設けられている誘電体層と、 前記作像装置の第2の軸線に沿って設けられている第2の導電線であって、前 記第2の軸線は、前記第1の軸線に対して実質的に垂直に向いており、前記第2 の導電線は、それぞれの交差領域の所で前記第1の導電線と垂直方向に整合する ように前記作像装置内に設けられており、前記誘電体層は、前記第1の導電線と 前記第2の導電線との間に設けられており、前記第2の導電線は、前記基板の上 に設けられたその下方にある部品の形状と実質的に同形になっており、前記第2 の導電線は、該第2の導電線が前記形状の面の特徴の上方を伸びている所の位置 と対応して設けられている複数の段を含んでいる、第2の導電線と、 該第2の導電線の選択された段の上方にそれぞれ設けられている第1及び第2 の保護層であって、該第1及び第2の保護層は、前記第1の導電線と垂直方向に 整合して設けられている前記第2の導電線の一部の所で該第1の保護層と該第2 の保護層との間に設けられている修理区域により隔てられている、第1及び第2 の保護層とを備えた薄膜電子式作像装置。 2. 前記第1及び第2の保護層はいずれも、有機誘電体材料で構成されてい る請求項1に記載の装置。 3. 前記第2の導電線は、前記誘電体層が前記第1の導電線の上方を伸びて いる所で、前記誘電体層の向かい合った側壁に対応して設けられている第1及び 第2の段を含んでいる請求項2に記載の装置。 4. 前記第1及び第2の保護層は、前記第1及び第2の段の外側の縁を覆う ようにそれぞれ設けられている請求項3に記載の装置。 5. 前記誘電体層と前記第2の導電線との間で前記交差領域に設けられてい る半導体アイランドを更に含んでおり、該半導体アイランドの横方向の限界は、 前記交差領域の境界を越えて伸びており、前記第2の導電線は更に、該第2の導 電線が前記半導体アイランドの側壁の上方を伸びている所で、前記半導体アイラ ンドの両側に対応して設けられている第3及び第4の段を含んでいる請求項2に 記載の装置。 6. 前記第1の保護層は、前記第2の導電線の前記第1及び第3の段の上方 に設けられており、前記第2の保護層は、前記第2の導電線の前記第2及び第4 の段の上方に設けられている請求項5に記載の装置。 7. 前記第1の保護層は、前記第2の導電線の前記第1の段を覆わずに前記 第2の導電線の前記第3の段を覆うように設けられており、前記第2の保護層は 、前記第2の導電線の前記第2の段を覆わずに前記第2の導電線の前記 第4の段を覆うように設けられている請求項5に記載の装置。 8. 前記有機誘電体材料は、ポリイミドを含んでいる請求項2に記載の装置 。 9. 前記第1及び第2の保護層の各々に設けられているポリイミドの厚さは 、約0.5μmと2.5μmとの間の範囲内である請求項8に記載の装置。 10. 前記第1及び第2の保護層は、前記修理区域が約100μm2と10 00μm2との間の範囲内の面積を有するように設けられている請求項2に記載 の装置。 11. 前記半導体アイランドは、シリコンを含んでいる請求項14に記載の 装置。 12. 前記半導体アイランドは、前記作像装置に設けられている電界効果ト ランジスタを構成している半導体材料に対応した材料を含んでいる請求項11に 記載の装置。 13. 前記交差領域の面積は、約100μm2と1600μm2との間である 請求項1に記載の装置。 14. 前記第1及び第2の保護層、並びに前記修理区域の上方に設けられて いる第3の保護層を更に含んでおり、該第3の保護層は、無機誘電体材料を含ん でいる請求項1に記載の装置。 15. 前記第3の保護層は、窒化シリコンを含んでいる請求項14に記載の 装置。 16. 前記窒化シリコンの第3の保護層は、約0.1μmと1.5μmとの 間の範囲内の厚さを有している請求 項15に記載の装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/169,290 | 1993-12-20 | ||
US08/169,290 US5475246A (en) | 1993-12-20 | 1993-12-20 | Repair line structure for thin film electronic devices |
PCT/US1994/014530 WO1995017767A1 (en) | 1993-12-20 | 1994-12-15 | Repair line structure for thin film electronic devices |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH08507179A true JPH08507179A (ja) | 1996-07-30 |
JP3954645B2 JP3954645B2 (ja) | 2007-08-08 |
Family
ID=22615043
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP51752095A Expired - Fee Related JP3954645B2 (ja) | 1993-12-20 | 1994-12-15 | 薄膜電子装置の修理線構造 |
Country Status (5)
Country | Link |
---|---|
US (1) | US5475246A (ja) |
EP (1) | EP0685112B1 (ja) |
JP (1) | JP3954645B2 (ja) |
DE (1) | DE69428195T2 (ja) |
WO (1) | WO1995017767A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009021359A (ja) * | 2007-07-11 | 2009-01-29 | Rohm Co Ltd | 半導体装置 |
JP2017503373A (ja) * | 2013-11-15 | 2017-01-26 | トリクセル | 画像検出器の2列のピクセルのプール |
Families Citing this family (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5532853A (en) * | 1993-03-04 | 1996-07-02 | Samsung Electronics Co., Ltd. | Reparable display device matrix for repairing the electrical connection of a bonding pad to its associated signal line |
US5648296A (en) * | 1994-07-27 | 1997-07-15 | General Electric Company | Post-fabrication repair method for thin film imager devices |
US5648674A (en) * | 1995-06-07 | 1997-07-15 | Xerox Corporation | Array circuitry with conductive lines, contact leads, and storage capacitor electrode all formed in layer that includes highly conductive metal |
JP3418653B2 (ja) * | 1995-09-28 | 2003-06-23 | シャープ株式会社 | アクティブマトリクス型液晶表示装置 |
US5834321A (en) * | 1995-12-18 | 1998-11-10 | General Electric Company | Low noise address line repair method for thin film imager devices |
US5731803A (en) * | 1995-12-21 | 1998-03-24 | Xerox Corporation | Array with light active units sized to eliminate artifact from size difference |
US5608245A (en) * | 1995-12-21 | 1997-03-04 | Xerox Corporation | Array on substrate with repair line crossing lines in the array |
US5616524A (en) * | 1995-12-22 | 1997-04-01 | General Electric Company | Repair method for low noise metal lines in thin film imager devices |
US5663577A (en) * | 1996-03-01 | 1997-09-02 | General Electric Company | Solid state imager array with address line spacer structure |
KR100192347B1 (ko) * | 1996-03-26 | 1999-06-15 | 구자홍 | 액정표시장치의 구조 및 제조방법 |
US6697037B1 (en) * | 1996-04-29 | 2004-02-24 | International Business Machines Corporation | TFT LCD active data line repair |
US6284576B1 (en) * | 1996-07-04 | 2001-09-04 | Sharp Kabushiki Kaisha | Manufacturing method of a thin-film transistor of a reverse staggered type |
KR100244181B1 (ko) * | 1996-07-11 | 2000-02-01 | 구본준 | 액정표시장치의리페어구조및그를이용한리페어방법 |
US6014191A (en) * | 1996-07-16 | 2000-01-11 | Samsung Electronics Co., Ltd. | Liquid crystal display having repair lines that cross data lines twice and cross gate lines in the active area and related repairing methods |
KR100271039B1 (ko) * | 1997-10-24 | 2000-11-01 | 구본준, 론 위라하디락사 | 액정표시장치의 기판의 제조방법(method of manufacturing liquid crystal display) |
JPH11261212A (ja) * | 1997-12-19 | 1999-09-24 | General Electric Co <Ge> | 部品同士の接続方法 |
US5976978A (en) * | 1997-12-22 | 1999-11-02 | General Electric Company | Process for repairing data transmission lines of imagers |
US6310315B1 (en) * | 1998-11-09 | 2001-10-30 | Coreteck, Inc. | Reworkable laser welding process |
JP2000269504A (ja) * | 1999-03-16 | 2000-09-29 | Hitachi Ltd | 半導体装置、その製造方法及び液晶表示装置 |
KR100372300B1 (ko) * | 1999-08-12 | 2003-02-17 | 삼성전자주식회사 | 수리선을 가지는 액정 표시 장치용 박막 트랜지스터 기판 |
TWI282625B (en) * | 2002-08-01 | 2007-06-11 | Au Optronics Corp | Method of forming a thin film transistor liquid crystal display |
KR100499376B1 (ko) * | 2003-10-10 | 2005-07-04 | 엘지.필립스 엘시디 주식회사 | 박막 트랜지스터 어레이 기판 및 그 제조 방법 |
TWI236838B (en) * | 2004-04-22 | 2005-07-21 | Avision Inc | Image acquisition device and method capable of rotating document images |
KR101046927B1 (ko) * | 2004-09-03 | 2011-07-06 | 삼성전자주식회사 | 박막 트랜지스터 표시판 |
TWI308316B (en) * | 2005-09-09 | 2009-04-01 | Au Optronics Corp | Circuit line and manufacturing method thereof |
KR101402294B1 (ko) * | 2009-10-21 | 2014-06-02 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 반도체 장치 제작방법 |
TWI400521B (zh) * | 2009-11-20 | 2013-07-01 | Chunghwa Picture Tubes Ltd | 修補結構以及主動元件陣列基板 |
TWI418883B (zh) * | 2010-03-17 | 2013-12-11 | Au Optronics Corp | 修補方法以及主動元件陣列基板 |
KR102005483B1 (ko) * | 2012-10-19 | 2019-07-31 | 삼성디스플레이 주식회사 | 박막 트랜지스터 기판 및 그의 수리 방법 |
JP6645160B2 (ja) * | 2015-12-11 | 2020-02-12 | 三菱電機株式会社 | 表示装置用基板およびその製造方法ならびに表示装置およびその製造方法 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4723197A (en) * | 1985-12-16 | 1988-02-02 | National Semiconductor Corporation | Bonding pad interconnection structure |
FR2601500B1 (fr) * | 1986-07-11 | 1988-10-21 | Bull Sa | Procede de liaison programmable par laser de deux conducteurs superposes du reseau d'interconnexion d'un circuit integre, et circuit integre en resultant |
KR930009099B1 (ko) * | 1989-06-20 | 1993-09-22 | 샤프 가부시끼가이샤 | 매트릭스형 표시장치 |
-
1993
- 1993-12-20 US US08/169,290 patent/US5475246A/en not_active Expired - Lifetime
-
1994
- 1994-12-15 JP JP51752095A patent/JP3954645B2/ja not_active Expired - Fee Related
- 1994-12-15 WO PCT/US1994/014530 patent/WO1995017767A1/en active IP Right Grant
- 1994-12-15 DE DE69428195T patent/DE69428195T2/de not_active Expired - Fee Related
- 1994-12-15 EP EP95905975A patent/EP0685112B1/en not_active Expired - Lifetime
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009021359A (ja) * | 2007-07-11 | 2009-01-29 | Rohm Co Ltd | 半導体装置 |
JP2017503373A (ja) * | 2013-11-15 | 2017-01-26 | トリクセル | 画像検出器の2列のピクセルのプール |
Also Published As
Publication number | Publication date |
---|---|
DE69428195T2 (de) | 2002-07-04 |
EP0685112A1 (en) | 1995-12-06 |
DE69428195D1 (de) | 2001-10-11 |
EP0685112B1 (en) | 2001-09-05 |
JP3954645B2 (ja) | 2007-08-08 |
WO1995017767A1 (en) | 1995-06-29 |
US5475246A (en) | 1995-12-12 |
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