JPH08257896A - Manufacture of polishing article and vibration magnetic polishing work device - Google Patents

Manufacture of polishing article and vibration magnetic polishing work device

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Publication number
JPH08257896A
JPH08257896A JP7017095A JP7017095A JPH08257896A JP H08257896 A JPH08257896 A JP H08257896A JP 7017095 A JP7017095 A JP 7017095A JP 7017095 A JP7017095 A JP 7017095A JP H08257896 A JPH08257896 A JP H08257896A
Authority
JP
Japan
Prior art keywords
magnetic
polishing
magnetic circuit
workpiece
current
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7017095A
Other languages
Japanese (ja)
Inventor
Masaru Hachisuga
勝 蜂須賀
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP7017095A priority Critical patent/JPH08257896A/en
Publication of JPH08257896A publication Critical patent/JPH08257896A/en
Pending legal-status Critical Current

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  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)

Abstract

PURPOSE: To high efficiently polish a polishing article by polishing a workpiece while applying an alternating magnetic field to a magnetic abrasive material. CONSTITUTION: A coil 2 is wound to a magnetic circuit 1, and a current superimposed with a bias current and an alternating current together, flows in this coil 2. A gap is provided partially in this magnetic circuit 1, here to insert a workpiece (for instance, cylindrical member) 3 rotated with its axis serving as the center. A magnetic abrasive material 4 is held between this workpiece 3 and a magnetic pole in an end face of the magnetic circuit 1. Crushing ferrite into powder is used in this magnetic abrasive material 4, and a ferrite-made transformer core is used in the magnetic circuit 1. A DC current, in a condition superimposed with an AC current of about 10Hz, is applied to this magnetic circuit 1, and by performing polishing work of the workpiece 3, a machining surface of about 0.2μm (Rmax) degree surface roughness is obtained in a short time.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、硬脆材料、金属材料等
からなる研磨物品の製造方法及び振動磁気研磨装置に関
する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing an abrasive article made of a hard and brittle material, a metal material and the like and a vibration magnetic polishing apparatus.

【0002】[0002]

【従来技術】金属材料の加工においては、切削加工によ
って形状を創成し、さらに高い形状精度が要求される場
合には研削加工や研磨加工が行なわれる。特に滑らかな
面や鏡面が必要とされる場合には研磨加工が行なわれ
る。また、硬脆材料の加工においても、焼結後に表面あ
らさや寸法精度を向上させるために研削加工が行なわ
れ、その後、さらに研磨加工を施して表面のあらさを向
上させる方法が一般的に行なわれている。また、硬脆材
料の一種であるガラスの加工においては、形状を創成す
るために研削加工が行なわれており、特に光学部品であ
るレンズの加工では、形状創成に研削加工(CG)が行
なわれた後に、研磨加工を施して、所要の形状精度と光
沢面を得るのが普通である。
2. Description of the Related Art In the processing of metallic materials, a shape is created by cutting, and when higher shape accuracy is required, grinding or polishing is performed. When a particularly smooth surface or mirror surface is required, polishing is performed. Further, also in the processing of hard and brittle materials, a grinding process is performed after sintering to improve the surface roughness and dimensional accuracy, and then a method of further polishing to improve the surface roughness is generally performed. ing. Further, in the processing of glass, which is a kind of hard and brittle material, grinding is performed to create a shape, and particularly in processing of a lens that is an optical component, grinding (CG) is performed to create a shape. After that, polishing is usually performed to obtain a required shape accuracy and a glossy surface.

【0003】この様に金属材料や硬脆材料の除去加工に
おいて、高い加工精度や表面あらさを要求される部品に
ついては、研削加工で形状創成を行なった後、研磨加工
で仕上げ加工を行なうのが一般的である。研磨加工に
は、固定砥粒を用いる超仕上げ加工やホーニング加工の
他に、遊離砥粒を用いるラッピング加工などがある。こ
れらの加工方法は、従来から一般的に用いられている加
工方法である。
As described above, in the removal processing of metal materials and hard and brittle materials, for parts requiring high processing accuracy and surface roughness, it is preferable to perform shape processing by grinding and then finish processing by polishing. It is common. The polishing process includes a lapping process using free abrasive grains as well as a superfinishing process using fixed abrasive grains and a honing process. These processing methods are conventionally used generally.

【0004】また、近年の加工技術の進歩にともない、
いくつかの新しい研磨方法の試みが提案され、実用化さ
れている。その中の一つに磁気を用いた研磨方法があ
る。この研磨方法は、磁石に引きつけられる磁性材を含
む研磨剤(磁気研磨剤)を、外部から与えた磁気の力で
被加工物表面に接するように保持し、被加工物と磁気研
磨剤との間に相対運動を与えることにより加工を行なう
方法である。磁力で砥粒を保持することができるため、
従来の研磨加工では難しかったパイプの内周加工や、複
雑な形状を有する被加工物の研磨加工に対して、特にそ
の効果を発揮することが知られている。
Further, with the recent progress in processing technology,
Several attempts at new polishing methods have been proposed and put to practical use. One of them is a polishing method using magnetism. In this polishing method, a polishing agent (magnetic polishing agent) containing a magnetic material attracted to a magnet is held in contact with the surface of a workpiece by a magnetic force applied from the outside, so that the workpiece and the magnetic polishing agent are This is a method in which machining is performed by giving relative motion between them. Since the abrasive grains can be held by magnetic force,
It is known that the effect is particularly exerted on the inner peripheral processing of a pipe and the polishing processing of a workpiece having a complicated shape, which are difficult to perform by the conventional polishing processing.

【0005】[0005]

【発明が解決しようとする課題】通常の研磨加工におい
て、被加工物と砥粒との間の圧力と被加工物と砥粒の相
対速度が加工量を決める大きな要因である。その関係は
(1)式のように表わすことができる。従って相対的な
移動速度が同じであれば、被加工物と砥粒との間の圧力
を高くすることにより加工量は増大し加工能率は向上
し、被加工物と砥粒との間の圧力が低くなれば加工量は
減少し加工能率は低下する。(プレストンの法則)
In the ordinary polishing process, the pressure between the work piece and the abrasive grains and the relative speed of the work piece and the abrasive grains are major factors that determine the processing amount. The relationship can be expressed as in equation (1). Therefore, if the relative moving speed is the same, the amount of processing is increased and the processing efficiency is improved by increasing the pressure between the work piece and the abrasive grains, and the pressure between the work piece and the abrasive grains is increased. If the value becomes lower, the processing amount decreases and the processing efficiency decreases. (Preston's law)

【0006】[0006]

【数1】 [Equation 1]

【0007】前項に示した磁気研磨方法においては、磁
界内に被加工物をおくことにより、被加工物に対して研
磨剤の粒子を比較的自由に接触させることができる反
面、通常の固定砥粒や遊離砥粒を用いる研磨のように、
砥粒を固定し、強制的に被加工物に押しつける物理的な
手段を持たないため、加工能率が低いという問題点があ
った。
In the magnetic polishing method described in the preceding paragraph, particles of the abrasive can be brought into relatively free contact with the work by placing the work in a magnetic field. Like polishing with grains or loose abrasive grains,
Since there is no physical means for fixing the abrasive grains and forcing them to the work piece, there is a problem that the working efficiency is low.

【0008】本発明の目的はこの問題点の解決にある。An object of the present invention is to solve this problem.

【0009】[0009]

【問題を解決するための手段】上記問題点を解決するた
め、鋭意研究した結果、「磁気研磨剤に交番磁界を印加
しながら被加工物を研磨することを特徴とする研磨物品
の製造方法」、あるいは「磁気研磨剤、該磁気研磨剤を
被加工物の被加工面上に保持するための磁気回路形成手
段、及び該磁気研磨剤に交番磁界を印加する磁界印加手
段からなることを特徴とする振動磁気研磨装置」、ある
いは「前記磁気回路形成手段が、直流駆動の電磁石であ
り、かつ前記磁界印加手段が交流を重畳して駆動する前
記電磁石であることを特徴とする請求項2記載の振動磁
気研磨装置」、あるいは「前記磁界印加手段が前記磁気
回路に対して直角方向に交番磁界を印加する電磁石から
なることを特徴とする請求項2記載の振動磁気研磨装
置」により上記問題点を解決できることを見い出し、本
発明を成すに至った。
[Means for Solving the Problems] In order to solve the above problems, as a result of earnest research, "a method for producing an abrasive article characterized by polishing an object to be processed while applying an alternating magnetic field to a magnetic abrasive" Or "a magnetic abrasive, a magnetic circuit forming means for holding the magnetic abrasive on the surface of the workpiece to be processed, and a magnetic field applying means for applying an alternating magnetic field to the magnetic abrasive. 3. An oscillating magnetic polishing apparatus according to claim 2, or "the magnetic circuit forming means is a direct current driven electromagnet, and the magnetic field applying means is the electromagnet driven by superimposing alternating current. 3. The vibration magnetic polishing apparatus "or" the vibration magnetic polishing apparatus according to claim 2, wherein the magnetic field applying means comprises an electromagnet for applying an alternating magnetic field in a direction perpendicular to the magnetic circuit. It found that can solve and accomplished the present invention.

【0010】[0010]

【作用】磁気研磨材と被加工物との間の圧力は、研磨粒
子が被加工物を押しつける力であるから、磁気回路を通
る磁力に比例する。従ってこの磁力を変化させることに
より研磨粒子の被加工物を押しつける力は変化する。そ
こで、前項に示した方法により、磁気回路を構成する部
材に電線を巻き付けコイルとし、そこに図5に示したよ
うな、バイアス電流に交流電流が重畳した状態の電流を
供給する。これにより、図6に示すように磁気研磨材1
4は、規則的に被加工物表面をたたく方向に力を発生す
るようになる。これは、遊離砥粒を用いた超音波加工法
において示されるように、砥粒を介して被加工物表面を
たたく方向に力を加えることにより、被加工物の除去速
度が高くなり、加工能率は飛躍的に向上する。
The pressure between the magnetic abrasive and the work piece is proportional to the magnetic force passing through the magnetic circuit because the abrasive particles press the work piece. Therefore, by changing this magnetic force, the force of the abrasive particles pressing the work piece changes. Therefore, according to the method described in the preceding paragraph, an electric wire is wound around a member forming a magnetic circuit to form a coil, and a current in which an alternating current is superimposed on a bias current as shown in FIG. 5 is supplied thereto. As a result, as shown in FIG.
4 regularly generates a force in the direction of striking the surface of the workpiece. This is because, as shown in the ultrasonic machining method using loose abrasive grains, by applying a force in the direction of striking the surface of the workpiece through the abrasive grains, the removal rate of the workpiece becomes high and the machining efficiency increases. Is dramatically improved.

【0011】被加工物の除去速度に影響を与える磁気研
磨材と被加工物との間の相対速度は研磨粒子と加工物と
の相対運動により決まる。そこで、磁気研磨剤を保持す
る磁界を発生する磁気回路と、さらにその磁界とほぼ直
行する別の磁気回路を設け、交番磁界を印加し、磁極を
変化させることにより、永久磁石からなる研磨粒子に回
転方向の運動をさせることができる(図8)。このこと
により、磁気研磨材と被加工物間の相対速度は向上しプ
レストンの法則により被加工物の除去速度は高くなり加
工能率は飛躍的に向上する。
The relative velocity between the magnetic abrasive and the work piece that affects the removal rate of the work piece is determined by the relative motion of the abrasive particles and the work piece. Therefore, a magnetic circuit that generates a magnetic field that holds the magnetic abrasive and another magnetic circuit that is substantially orthogonal to the magnetic field are provided, and an alternating magnetic field is applied to change the magnetic poles to form abrasive particles made of permanent magnets. Movement in the direction of rotation can be achieved (Fig. 8). As a result, the relative speed between the magnetic abrasive and the work piece is improved, the removal rate of the work piece is increased according to Preston's law, and the processing efficiency is dramatically improved.

【0012】電磁石に印加する交流電流は、磁気研磨剤
の粒径により変化させる必要があるが、駆動周波数は数
Hzから100kHz程度が望ましい。以下、図面を引
用して、実施例により本発明を、より具体的に説明する
が、本発明は、これに限られるものではない。
The alternating current applied to the electromagnet needs to be changed according to the particle size of the magnetic polishing agent, but the driving frequency is preferably several Hz to 100 kHz. Hereinafter, the present invention will be described more specifically by way of examples with reference to the drawings, but the present invention is not limited thereto.

【0013】[0013]

【実施例】図1は、本発明による振動磁気研磨装置を円
筒部材の円周加工の加工に適用した第1の実施例の概要
図である。磁気回路1にコイル2が巻かれ、該コイル2
にバイアス電流と、交流電流が重畳された電流が流れ
る。前記磁気回路1の一部にギャップが設けられ、そこ
に被加工物3を挿入し、円筒の軸を中心にして回転させ
る。被加工物3と前記磁気回路1の端面の磁極との間に
は磁気研磨材4が保持されている。本実施例では磁気研
磨材4はフェライトを砕いて、粉にしたものを用いた。
また、磁気回路1はフェライト製のトランスのコアを用
いた。さらにバイアス電流と重畳させる交流電流の周波
数は10から数十kHzで、外部に設けた発振器5より
前記コイル2に供給される。本実施例において,前記磁
気回路1に直流電流に10Hzの交流電流を重畳させた
状態で印可し,ステンレス材を研磨することにより表面
あらさ0.2μm(Rmax)程度の加工面が短時間に
得ることができた。
FIG. 1 is a schematic diagram of a first embodiment in which the vibration magnetic polishing apparatus according to the present invention is applied to the circumferential machining of a cylindrical member. The coil 2 is wound around the magnetic circuit 1, and the coil 2
A bias current and a current in which an alternating current is superimposed flow on the. A gap is provided in a part of the magnetic circuit 1, and the workpiece 3 is inserted therein and rotated about the axis of the cylinder. A magnetic polishing material 4 is held between the work piece 3 and the magnetic pole on the end surface of the magnetic circuit 1. In this embodiment, the magnetic abrasive material 4 is made by crushing ferrite into powder.
The magnetic circuit 1 uses a ferrite transformer core. Further, the frequency of the alternating current to be superimposed on the bias current is 10 to several tens of kHz, and is supplied to the coil 2 from the oscillator 5 provided outside. In this embodiment, the magnetic circuit 1 is applied with a direct current superimposed with an alternating current of 10 Hz, and a stainless steel material is polished to obtain a machined surface having a surface roughness of about 0.2 μm (Rmax) in a short time. I was able to.

【0014】図2は、本発明による振動磁気研磨装置を
ガラスレンズ6の加工に適用した第2の実施例の概要図
である。磁気回路1にコイル2が巻かれ、ここにバイア
ス電流と交流電流が重畳された電流が流れる。磁気回路
の一部にギャップを設け、そこに雇い7に保持された被
加工物であるガラスレンズ6が挿入されている。前記雇
い7は外部に設けた回転手段により回転駆動される。前
記ガラスレンズ6の加工部に対する磁気回路1の端面に
は磁気研磨材4が挿入されている。磁気回路端面の形状
は、加工するガラスレンズ6の形状により変化させる必
要がある。
FIG. 2 is a schematic diagram of a second embodiment in which the vibration magnetic polishing apparatus according to the present invention is applied to the processing of the glass lens 6. A coil 2 is wound around the magnetic circuit 1, and a current in which a bias current and an alternating current are superimposed flows through the coil 2. A gap is provided in a part of the magnetic circuit, and the glass lens 6 which is the work held by the employee 7 is inserted therein. The employee 7 is rotationally driven by a rotating means provided outside. A magnetic polishing material 4 is inserted into the end surface of the magnetic circuit 1 with respect to the processed portion of the glass lens 6. The shape of the end surface of the magnetic circuit needs to be changed according to the shape of the glass lens 6 to be processed.

【0015】図3は、円形状を持つガラスの板材に本発
明を適用した第3の実施例の概要図である。被加工物で
ある板ガラス9は、その円周を3個のローラ8により保
持され、さらに回転駆動される。図4は、本実施例の側
面図である。板ガラス9の一部分は、図4に示すような
状態で磁気回路1のギャップに磁気研磨材4を介して挿
入される。磁気回路1に巻かれたコイル2には、前記実
施例と同様なバイアス電流と交流電流が重畳された電流
が流され、加工が行なわれる。さらに、磁気回路1を図
3に示したような移動方向10に周期的に移動させて、
加工を行なっても良い。
FIG. 3 is a schematic view of a third embodiment in which the present invention is applied to a circular glass plate material. The plate glass 9, which is a workpiece, has its circumference held by three rollers 8 and is further driven to rotate. FIG. 4 is a side view of this embodiment. A part of the plate glass 9 is inserted into the gap of the magnetic circuit 1 via the magnetic polishing material 4 in the state shown in FIG. In the coil 2 wound around the magnetic circuit 1, a current in which a bias current and an alternating current similar to those in the above-described embodiment are superposed is flowed to perform processing. Further, the magnetic circuit 1 is periodically moved in the moving direction 10 as shown in FIG.
It may be processed.

【0016】図5は、コイル駆動電流波形を示したグラ
フである。ここに示されるコイル駆動電流波形18は、
バイアス電流13に、サイン波形状の交流電流が重畳し
たものに限らず、矩形波状の波形が重畳したものでもよ
い。図7は、本発明による振動磁気研磨装置を円筒部材
の端面の加工に適用した第4の実施例である。また、図
8は、その加工原理を示した概略図である。永久磁石よ
りなる磁気研磨剤4を保持するための磁気回路1にコイ
ル2が巻かれ、ここに直流電流が流され前記磁気研磨剤
4が保持される。前記磁気回路1の一部にギャップが設
けられ、そこに被加工物3を挿入し、円筒の軸を中心に
して回転させる。被加工物3と磁気回路1の端面の磁極
との間には前記磁気研磨材4が保持されている。本実施
例では、磁気研磨材はフェライト製の永久磁石を砕い
て、粉にしたものをもちいた。さらに前記磁気回路1に
て発生した磁界とほぼ直行する方向に磁界を発生させる
別の磁気回路21を設け設置する。この磁気回路21に
交流電流を印加することにより、交番磁界が発生する。
交流電流の周波数は10から数十kHzで、外部に設け
た発振器5より前記磁気回路21に巻かれたコイル12
に供給される。この交番磁界により、加工物表面に保持
されている永久磁石製の磁気研磨剤4は、図8に示すよ
うな偶力10を受け、回転方向の運動を始める。これに
より、被加工物端面は効率良く研磨される。
FIG. 5 is a graph showing a coil drive current waveform. The coil drive current waveform 18 shown here is
The bias current 13 is not limited to the superimposed sine wave-shaped alternating current, and may be the superimposed rectangular wave. FIG. 7 is a fourth embodiment in which the vibrating magnetic polishing apparatus according to the present invention is applied to the processing of the end surface of a cylindrical member. Further, FIG. 8 is a schematic view showing the processing principle. A coil 2 is wound around a magnetic circuit 1 for holding a magnetic abrasive 4 made of a permanent magnet, and a direct current is passed through the coil 2 to hold the magnetic abrasive 4. A gap is provided in a part of the magnetic circuit 1, and the workpiece 3 is inserted therein and rotated about the axis of the cylinder. The magnetic polishing material 4 is held between the workpiece 3 and the magnetic pole on the end surface of the magnetic circuit 1. In this example, the magnetic abrasive used was a powder of a permanent magnet made of ferrite crushed and crushed. Further, another magnetic circuit 21 for generating a magnetic field in a direction substantially perpendicular to the magnetic field generated in the magnetic circuit 1 is provided and installed. By applying an alternating current to the magnetic circuit 21, an alternating magnetic field is generated.
The frequency of the alternating current is 10 to several tens of kHz, and the coil 12 wound around the magnetic circuit 21 from the oscillator 5 provided outside.
Is supplied to. Due to this alternating magnetic field, the magnetic abrasive 4 made of a permanent magnet held on the surface of the workpiece receives a couple 10 as shown in FIG. 8 and starts to move in the rotational direction. As a result, the end surface of the workpiece is efficiently polished.

【0017】図9は、本発明による振動磁気研磨装置を
ガラス材の加工に適用した第5の実施例である。磁気研
磨材4を保持するために、磁気回路1にコイル2が巻か
れ、ここに直流電流が流れる。前記磁気回路1の一部に
ギャップを設け発生した磁力線に被さるように、被加工
物であるガラス材9が挿入されている。該ガラス材9は
外部に設けた回転手段により回転駆動される。ガラス材
9の加工部に当たる磁気回路1の端面には磁気研磨材4
が挿入されている。さらに前記磁気回路1にて発生した
磁界とほぼ直行する方向に磁界を発生させる別の磁気回
路21を設け設置する。この磁気回路に巻かれたコイル
に交流電流を印加することにより、交番磁界が発生す
る。交流電流の周波数は10から数十kHzで、外部に
設けた発振器5より前記磁気回路21に巻かれたコイル
12に供給される。本実施例において,前記コイル12
に10Hzの交流電流を印可し,磁気研磨剤4としてフ
ェライトを砕いたものを用いてガラス材を研磨すること
により表面あらさ0.1μm(Ra)程度の加工面が短
時間に得ることができた。
FIG. 9 is a fifth embodiment in which the vibration magnetic polishing apparatus according to the present invention is applied to the processing of glass material. A coil 2 is wound around the magnetic circuit 1 to hold the magnetic polishing material 4, and a direct current flows there. A glass material 9 as a workpiece is inserted so as to cover a magnetic field line generated by providing a gap in a part of the magnetic circuit 1. The glass material 9 is rotationally driven by a rotating means provided outside. The magnetic polishing material 4 is provided on the end surface of the magnetic circuit 1 which corresponds to the processed portion of the glass material 9.
Has been inserted. Further, another magnetic circuit 21 for generating a magnetic field in a direction substantially perpendicular to the magnetic field generated in the magnetic circuit 1 is provided and installed. An alternating magnetic field is generated by applying an alternating current to the coil wound around this magnetic circuit. The frequency of the alternating current is 10 to several tens of kHz, and is supplied to the coil 12 wound around the magnetic circuit 21 from the oscillator 5 provided outside. In this embodiment, the coil 12
By applying an alternating current of 10 Hz and polishing the glass material using a magnetic abrasive 4 obtained by crushing ferrite, a machined surface having a surface roughness of about 0.1 μm (Ra) could be obtained in a short time. .

【0018】コイルの駆動電流波形は、サイン波形状の
交流電流なく、矩形波状のものでもよい。
The coil drive current waveform may be a rectangular wave instead of a sine wave AC current.

【0019】[0019]

【発明の効果】以上に述べたように、本発明の実施例に
示した方法で振動磁気研磨加工を行なうことにより、極
めて高能率な加工を実現することができるようになる。
特に硬脆材料に対して大きな効果が得られた。
As described above, by performing the vibration magnetic polishing process by the method shown in the embodiment of the present invention, extremely high efficiency process can be realized.
In particular, a great effect was obtained for hard and brittle materials.

【図面の簡単な説明】[Brief description of drawings]

【図1】は、本発明を円筒部材の加工に適用した実施例
の概要図である。
FIG. 1 is a schematic view of an embodiment in which the present invention is applied to machining a cylindrical member.

【図2】は、本発明をガラスレンズに適用した実施例の
概要図である。
FIG. 2 is a schematic view of an example in which the present invention is applied to a glass lens.

【図3】は、本発明を板ガラスの加工に適用した実施例
の概要図である。
FIG. 3 is a schematic view of an example in which the present invention is applied to the processing of sheet glass.

【図4】は、図3に示す実施例の側面図である。FIG. 4 is a side view of the embodiment shown in FIG.

【図5】は、本発明の駆動電流を示す概要図である。FIG. 5 is a schematic diagram showing a drive current of the present invention.

【図6】は、本発明の砥粒の挙動を示す原理図である。FIG. 6 is a principle diagram showing the behavior of the abrasive grains of the present invention.

【図7】は、本発明を円筒部材の端面加工に適用した概
要図である。
FIG. 7 is a schematic diagram in which the present invention is applied to end face processing of a cylindrical member.

【図8】は、本発明の加工原理を示した概要図であ
る。。
FIG. 8 is a schematic diagram showing the processing principle of the present invention. .

【図9】は、本発明をガラスの加工に適用した実施例の
概要図である。
FIG. 9 is a schematic view of an example in which the present invention is applied to glass processing.

【符号の説明】[Explanation of symbols]

1 ・・・磁気回路 2 ・・・コイル 3 ・・・被加工物 4 ・・・磁気研磨材 5 ・・・発振器 6 ・・・ガラスレンズ(被加工物) 9 ・・・板ガラス(被加工物) 12 ・・・交番磁界発生用コイル 13 ・・・バイアス電流 14 ・・・磁気研磨材(砥粒) 18 ・・・コイル駆動電流波形 19 ・・・軸受 21 ・・・直行する磁気回路 以上 1 ... Magnetic circuit 2 ... Coil 3 ... Workpiece 4 ... Magnetic polishing material 5 ... Oscillator 6 ... Glass lens (workpiece) 9 ... Flat glass (workpiece) ) 12 ... alternating magnetic field generating coil 13 ... bias current 14 ... magnetic abrasive (abrasive grain) 18 ... coil drive current waveform 19 ... bearing 21 ... orthogonal magnetic circuit

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 磁気研磨剤に交番磁界を印加しながら被
加工物を研磨することを特徴とする研磨物品の製造方
法。
1. A method of manufacturing an abrasive article, which comprises polishing an object to be processed while applying an alternating magnetic field to a magnetic abrasive.
【請求項2】 磁気研磨剤、該磁気研磨剤を被加工物の
被加工面上に保持するための磁気回路形成手段、及び該
磁気研磨剤に交番磁界を印加する磁界印加手段からなる
ことを特徴とする振動磁気研磨装置。
2. A magnetic abrasive, a magnetic circuit forming means for holding the magnetic abrasive on a surface of a workpiece to be processed, and a magnetic field applying means for applying an alternating magnetic field to the magnetic abrasive. Characteristic vibration magnetic polishing device.
【請求項3】 前記磁気回路形成手段が、直流駆動の電
磁石であり、かつ前記磁界印加手段が交流を重畳して駆
動する前記電磁石であることを特徴とする請求項2記載
の振動磁気研磨装置。
3. The vibrating magnetic polishing apparatus according to claim 2, wherein the magnetic circuit forming means is an electromagnet driven by direct current, and the magnetic field applying means is the electromagnet driven by superposing alternating current. .
【請求項4】 前記磁界印加手段が、前記磁気回路に対
して直角方向に交番磁界を印加する電磁石からなること
を特徴とする、請求項2記載の振動磁気研磨装置。
4. The oscillating magnetic polishing apparatus according to claim 2, wherein the magnetic field applying means comprises an electromagnet that applies an alternating magnetic field in a direction perpendicular to the magnetic circuit.
JP7017095A 1995-03-28 1995-03-28 Manufacture of polishing article and vibration magnetic polishing work device Pending JPH08257896A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7017095A JPH08257896A (en) 1995-03-28 1995-03-28 Manufacture of polishing article and vibration magnetic polishing work device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7017095A JPH08257896A (en) 1995-03-28 1995-03-28 Manufacture of polishing article and vibration magnetic polishing work device

Publications (1)

Publication Number Publication Date
JPH08257896A true JPH08257896A (en) 1996-10-08

Family

ID=13423802

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7017095A Pending JPH08257896A (en) 1995-03-28 1995-03-28 Manufacture of polishing article and vibration magnetic polishing work device

Country Status (1)

Country Link
JP (1) JPH08257896A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108436746A (en) * 2018-05-21 2018-08-24 浙江工业大学 A kind of device that blade is polished using rotating electric field control liquid metal polishing fluid

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108436746A (en) * 2018-05-21 2018-08-24 浙江工业大学 A kind of device that blade is polished using rotating electric field control liquid metal polishing fluid
CN108436746B (en) * 2018-05-21 2024-05-14 浙江工业大学 Device for controlling polishing of liquid metal polishing solution on blade by using rotating electric field

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