JPH07136925A - Grinding method and grinding device - Google Patents

Abstract

PURPOSE:To facilitate grinding of the inside face of a capillary by carrying out grinding in such ways as pressing abrasives onto the surface to be ground by means of magnetic force from the opposite face of the surface to be ground in a material to be ground and vibrating the abrasives in the plane parallel to the surface to be ground. CONSTITUTION:A proper amount of abrasives 37 containing magnetic materials are inserted into a capillary 1, and rotary connectors 3A, 3B rotating and supporting the capillary 1 by means of a rotary roller 27 are connected to both end parts of the capillary 1. Under this condition, the upper end face of a permanent magnet 11 is brought into contact with the lower outside face of the capillary 1, and by means of its magnetic force, the abrasives 37 are gathered to be pressed onto the inside face of the capillary 1. Then, alcohol is supplied from one end part, of the capillary 1 to the other end part. At the same time, an ultrasonic vibration generating device 13 is driven so that the permanent magnet 11 is vibrated in the direction parallel to the axial line of the capillary 1. In this way, the abrasives 37 are vibrated along the inside face of the capillary 1 while brought into pressure contact with the inside face of the capillary 1, and as a result, the inside face of the capillary 1 can be easily ground.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for polishing a portion which is difficult to polish by a normal polishing method such as an inner surface of a high purity gas supply pipe in a semiconductor manufacturing apparatus.

[0002]

2. Description of the Related Art As is well known, in semiconductor manufacturing equipment, various high-purity gases are used as a reaction gas, an atmosphere gas, a carrier gas, etc. for various processes, and the high-purity gas is introduced. Need a lot of plumbing for.

On the other hand, in semiconductor devices such as integrated circuits,
Since the purity and the impurity concentration of each component have a great influence on the characteristics, external contamination is considered a major enemy in the semiconductor device manufacturing process. Therefore, as a gas supply pipe used for semiconductor manufacturing, conventionally, an electrolytically polished stainless steel pipe is widely used in which the inner surface of a stainless steel pipe is processed into a mirror surface by electrolytic polishing to reduce the generation of fine particles and moisture adsorption / desorption. Has been.

By the way, since stainless steel contains iron, chromium, and nickel as heavy metals as main components, if stainless steel is used in a semiconductor manufacturing apparatus, the stainless steel becomes a source of heavy metal pollution which is the most problematic in semiconductor manufacturing. There is a risk. Therefore, in recent semiconductor manufacturing equipment,
There is a growing tendency to use aluminum materials instead of stainless steel, which are free of heavy metal contamination problems. In fact, as a material for the inner surface of the processing chamber of the plasma device or the vacuum device, an aluminum material has been mainly used instead of the conventional stainless steel, and thereby, heavy metal contamination can be reduced.

The aluminum material on the surface of the processing chamber as described above is generally cut at the same time as a smooth surface by cutting with a diamond bite while spraying dry oxygen or alcohol on the cutting surface at the time of final finish cutting. Finishing is performed so as to oxidize the newly-formed surface due to the formation of a dense Al ₂ O ₃ film.
Of these finishing processes, the process of cutting with a diamond bite while blowing oxygen is generally called EX process, and the process of cutting with a diamond bite while blowing alcohol is generally called EL process.

The surface of the aluminum material obtained by the above-mentioned EX processing or EL processing is dense Al ₂
Since it is covered with an O ₃ film, the amount of adsorbed and desorbed gas such as water is small, the generation of fine particles is small, and it is clean and has excellent vacuum characteristics. Further, as mentioned above, aluminum materials are generally a source of heavy metal contamination. Therefore, the characteristics required for piping for high-purity gas in semiconductor manufacturing equipment are satisfied.

[0007]

The aluminum material finished by EX processing or EL processing as described above can satisfy the characteristics required for the gas pipe of the semiconductor manufacturing apparatus, but the conventional diamond tool is used. It has been practically difficult to apply EX processing or EL processing for cutting by means of cutting to a gas pipe of a semiconductor manufacturing apparatus. That is, regarding the aluminum gas pipe of the semiconductor manufacturing equipment,
It is necessary to perform EX processing or EL processing on the inner surface, but this type of piping has a thin inner diameter of about 4 mm or less and a length of 2 m or more, so a diamond bite can be piped. It is difficult to insert into the inside of the machine and cut the inner surface, and therefore, conventionally, as a gas pipe of a semiconductor manufacturing apparatus, EX processing or E
It has been difficult to realize an L-processed aluminum tube.

The present invention has been made in view of the above circumstances, and it is possible to sufficiently grind members and places which are difficult to cut with a conventional diamond cutting tool such as the inner surface of a thin and long pipe. As a result, it is possible to obtain a finished surface covered with a dense Al ₂ O ₃ film even in the case of thin and long aluminum pipes as in the conventional EX processing or EL processing. The purpose is to actually enable the application of.

[0009]

In order to solve the above-mentioned problems, the polishing method of the present invention is basically a polishing method for polishing a material to be polished made of a non-magnetic material as described in claim 1. An abrasive containing at least a part of a magnetic material is disposed on the surface to be polished, and magnetism is applied to the abrasive from the surface opposite to the surface to be polished of the material to be polished,
While pressing the abrasive against the surface to be polished by magnetic force,
It is characterized in that the abrasive is vibrated and polished in a plane substantially parallel to the surface to be polished.

A polishing method according to a second aspect of the present invention is the polishing method according to the first aspect, in which a magnetism applying means for applying magnetism to the abrasive is vibrated, thereby vibrating the abrasive. .

Further, the polishing method of the invention of claim 3 is the polishing method of claim 1, wherein the distribution state of the magnetism applied to the abrasive is periodically changed, thereby vibrating the abrasive. is there.

And, the polishing method of the invention of claim 4 is
The polishing method according to claim 1, wherein as the polishing material, polishing particles formed by fixing a hard material for polishing to the surface of particles made of a magnetic material are used.

A polishing method according to a fifth aspect of the present invention is the polishing method according to the fourth aspect, wherein steel is used as the magnetic material of the polishing material and diamond is used as the hard polishing material.

A polishing method according to a sixth aspect of the present invention is the polishing method according to the first aspect, wherein the material to be polished is an aluminum tube, and the inner surface of the aluminum tube is the surface to be polished. The inner surface of the tube is polished while injecting alcohol or dry oxygen.

On the other hand, according to the polishing apparatus of the invention of claim 7, the polishing material containing at least a part of the magnetic material, the polishing material arranged on the surface of the material to be polished, and the surface of the material to be polished to be polished. A magnetic applying means for applying a magnetism from the opposite surface to press the abrasive with a magnetic force to the surface to be polished,
And a vibrating means for vibrating the abrasive in a plane substantially parallel to the surface to be polished.

Further, in the polishing apparatus of the invention of claim 8, in the polishing apparatus of claim 7, the vibrating means is for vibrating the magnetism applying means.

According to a ninth aspect of the polishing apparatus of the present invention, in the polishing apparatus according to the seventh aspect, the vibrating means is means for periodically changing the distribution state of the magnetism generated by the magnetism applying means. There is.

[0018]

The object to be polished in the polishing method of the present invention is a non-magnetic material such as aluminum or aluminum alloy. If a polishing material containing a magnetic material is arranged on the surface to be polished of the material to be polished made of such a non-magnetic material and magnetism is applied from the surface opposite to the surface to be polished of the material to be polished. The magnetic material-containing abrasive material is pressed against the surface of the material to be polished by the magnetic force. Therefore, if the abrasive is vibrated in a plane substantially parallel to the surface to be polished, the polishing of the surface to be polished will proceed.

Here, as a specific method for vibrating the abrasive while pressing the abrasive against the surface of the object to be polished by magnetic force, a magnetic applying means for applying magnetism to the abrasive, for example, There is a method of physically vibrating a permanent magnet or an electromagnet. Further, by periodically changing the distribution state of the magnetism applied to the abrasive, the abrasive can be vibrated while being pressed against the surface to be polished. In any case, the abrasive can be vibrated by the action from the side of the magnetic applying means without directly applying a mechanical force to the abrasive.

As described above, the force for bringing the abrasive material into pressure contact with the surface to be polished of the material to be polished is given as a magnetic force from the surface opposite to the surface to be polished of the material to be polished. The vibrating force can also be applied by the action from the side of the magnetic applying means on the surface opposite to the surface to be polished. This means that it is not necessary to directly apply a mechanical force to the abrasive on the surface of the abrasive to be polished, and therefore the material to be polished is a thin tube and the inner surface of the thin tube is polished. Even if it should, it is sufficient to place an abrasive in the narrow tube. Therefore, the inner surface of the aluminum thin tube for supplying high-purity gas in the semiconductor manufacturing apparatus can be easily polished. Further, in this case, a finished surface similar to that of the conventional EL processing and EX processing can be obtained by flowing alcohol or dry oxygen in the aluminum thin tube.

[0021]

1 and 2 show an example of an apparatus for carrying out the polishing method of the present invention.

In the embodiment shown in FIG. 1, a thin tube 1 made of aluminum (including aluminum alloy) is used as the material to be polished, and the inner surface 1A of the thin tube 1 to be polished is It is the surface to be polished. Both ends of the thin pipe 1 to be polished are horizontally supported by rotary connectors 3A and 3B so as to be rotatable about a horizontal axis. These rotary connectors 3A and 3B not only rotatably support the thin tube 1 to be polished, but also serve to supply alcohol 32 into the thin tube 1 and discharge it from the thin tube 1 as described later. The alcohol supply pipe 5 is connected to one of the rotary connectors 3A,
An alcohol discharge pipe 7 is connected to the other rotary connector 3B. An O-ring 9 is provided between the inner peripheral surface of each of the rotary connectors 3A and 3B and the outer peripheral surface of both ends of the work material thin tube 1.
It is sealed by A and 9B.

Further, on the lower surface side of the material thin tube 1 to be polished,
A permanent magnet 11 is arranged so that the upper surface is in contact with the thin tube 1. This permanent magnet 11 has an ultrasonic vibration generator 13
It is attached to the movable base 15 via. A screw shaft 17 parallel to the thin tube to be polished penetrates and is screwed into the movable base 15, and a guide rod 19 parallel to the screw shaft 17 penetrates therethrough. Both ends of 19 are bearing stands 21
The screw shaft 17 is supported by A and 21B, and the screw shaft 17 is connected to a rotary drive device 23 including a motor and a gear mechanism. Further, nozzles 25A and 25B for ejecting cooling water are arranged on both sides of the upper end of the permanent magnet 11, and these nozzles 25A and 25B are connected to the movable base via support arms 26A and 26B. It is attached to 15.

On the other hand, on the upper surface side of the thin tube 1 to be polished, a rotating roller 27 which is in contact with the upper surface of the thin tube 1 to be polished is provided so as to rotate about an axis parallel to the thin tube 1 to be polished. A rotation drive device 29 including a motor and a gear mechanism is connected to the rotation roller 27. Although not particularly shown in the drawing, the rotary drive device 29 is supported by the movable base 15 or moves in parallel with the moving direction of the movable base 15 in synchronization with the movable base 15. Is configured.

Further, the alcohol discharge pipe 7 connected to the rotary connector 3B is led to the alcohol return port 31A of the alcohol tank 31. The alcohol tank 31 is made to contain the alcohol 32, the alcohol return port 31A is formed on one end side, and the alcohol outlet 31B is formed on the other end side, and the alcohol return port 31A and the alcohol outlet 31 are formed.
Vertical partition walls 31C and 31D are provided at a distance from B. The lower end side of the first partition wall 31C is open and the upper end side of the second partition wall 31D is open. . Then, the alcohol outlet 31B is guided to the rotary connector 3A via the alcohol delivery pump 33, the alcohol filter 35, and the alcohol supply pipe 5.

In FIGS. 1 and 2, reference numeral 37 is a granular abrasive (which may be in the shape of a small sphere, a small lump, or a small piece) which is placed in the thin tube 1 to be polished during polishing.
The abrasive 37 is configured to have a magnetic material in at least a part of each grain. Specifically, for example, diamond powder or cubic boron nitride (C-BN), other hard polishing materials such as TiC, TiN, etc. on the surface of small spheres or grains made of a magnetic material such as steel balls by a method such as electroless plating. It is possible to use a product obtained by fixing or coating.

To polish the inner surface of the thin tube 1 to be polished, such as an aluminum thin tube, by using the above-described apparatus, an appropriate amount of the above-mentioned abrasive 37 is inserted into the thin tube 1 and the thin tube 1 is polished. Both ends are connected to the rotary connectors 3A and 3B. In this state, the upper surface of the permanent magnet 11 is in contact with the lower outer surface of the thin tube 1 to be polished, and the outer surface of the rotary roller 27 is in contact with the upper outer surface of the thin tube 1. Since the abrasive 37 in the thin tube 1 contains a magnetic material,
Due to the magnetic force of the permanent magnet 11, the permanent magnets 11 gather at a position close to the tip end surface of the permanent magnet 11 and are pressed against the inner surface of the capillary 1. Then, while supplying alcohol 32 from the alcohol tank 31 into the thin tube 1 from one end of the thin tube 1 through the alcohol supply pipe 5 and the rotary connector 3A,
While discharging alcohol from the other end of the thin tube 1 to the alcohol discharge tube 7 side through the rotary connector 3B, the ultrasonic vibration generator 13 is driven to drive the permanent magnet 1
1 is vibrated in a direction parallel to the axis of the thin tube 1. As a result, the abrasive 37 containing the magnetic material vibrates along the inner surface of the thin tube 1 while being pressed against the inner surface of the thin tube 1, and the inner surface of the thin tube 1 is polished. The active new surface generated by polishing is immediately oxidized by the alcohol 32 flowing in the thin tube 1 to form a dense and uniform oxide film (Al ₂ O).
₃ film) is generated. That is, a finished surface similar to that obtained when performing so-called EL processing in which a diamond cutting tool is used for cutting in a conventional alcohol atmosphere is obtained.
Note that the chips and polishing powder generated by polishing are alcohol 3
It is washed away by 2 and returned to the alcohol tank 32 from the rotary connector 3B side through the discharge pipe 7.

Here, by vibrating the permanent magnet 11 while ejecting the cooling water from the nozzles 25A and 25B toward the tip of the permanent magnet 11, frictional heat generation between the permanent magnet 11 and the material thin tube 1 is generated. It is possible to prevent the temperature rise due to the temperature rise, and to prevent the material deterioration due to the temperature rise of the thin tube 1.

When the rotary roller 27 is rotated by driving the rotary drive device 29, the thin tube 1 to be polished, which is in contact with the rotary roller 27, is rotated about its axis, and therefore the polishing position is set in the circumferential direction of the thin tube 1. If the rotary drive device 23 is driven to rotate the screw shaft 17, the movable base 1 screwed onto the screw shaft 17 can be changed.
5 moves in the horizontal direction while being guided by the guide rod 19, and accordingly, the ultrasonic vibration generator 13 and the permanent magnet 11 move in the horizontal direction in parallel with the central axis of the material thin tube 1 to be polished. The position can be changed in the length direction of the thin tube 1. Eventually, by continuously or intermittently driving the rotary drive device 29 and the rotary drive device 23, it is possible to perform polishing over the entire circumference of the inner surface of the thin tube 1 to be polished, and over almost the entire length of the thin tube.

The alcohol that has flown into the thin tube 1 to be polished via one rotary connector 3A is returned to the return port 31A of the alcohol tank 31 from the other rotary connector 3B via the discharge pipe 7. In this return alcohol,
As described above, foreign substances such as chips and abrasive powder produced by polishing are mixed, but the alcohol tank 31 has a partition wall 31C whose lower end is opened in that order from the return port 31A side toward the outlet port 31B. Since the partition wall 31D having an open upper end is provided, foreign substances such as chips and polishing powder settle at the bottom of the alcohol tank 31 by the action of these partition walls 31C and 31D, and flow out together with alcohol from the outlet 31B. Is prevented. Also such a partition wall 3
The fine powder not completely removed by the action of 1C and 31D is filtered and removed by the filter 35. Therefore, as the alcohol flowing into the thin pipe 1 to be polished via the supply pipe 5 and the rotary connector 3A, clean alcohol containing no contaminants is always supplied.

Although the permanent magnet 11 is used as the magnetism applying means for applying magnetism to the abrasive material 37 containing a magnetic material in the embodiments shown in FIGS. 1 and 2, an electromagnet is used instead of the permanent magnet. It can also be used. The main part of the embodiment in that case is shown in FIG.

In FIG. 3, an electromagnet 39 as a magnetism applying means has a structure in which a coil 39B is wound around an iron core 39A, and the tip surface of the iron core 39A is the thin tube 1 to be polished.
It is arranged so as to contact the lower surface of the. Note that reference numeral 39C is a terminal for supplying an exciting current to the coil 39B. The configuration of the other parts may be the same as that of the embodiment shown in FIGS.

When the electromagnet 39 is used in this way,
By controlling the value of the exciting current flowing through the coil 39B, it is possible to adjust the magnetic attraction force that presses the abrasive material 37 containing the magnetic material against the surface to be polished (the inner surface 1A of the thin tube 1 to be polished). That is, when the permanent magnet is used as in the embodiment of FIGS. 1 and 2, the magnetic attraction force for pressing the abrasive containing the magnetic material against the polishing surface is fixed by the magnetic characteristics of the magnet, Therefore, in some cases, it may be difficult to obtain the optimum polished surface, but when using an electromagnet, the magnetic attraction force may be changed depending on the material and thickness of the material to be polished, or the size and material of the polishing material. Adjust appropriately,
It is possible to obtain an optimum finished surface.

In FIG. 4, an electromagnet is used as a magnetism applying means and a means for vibrating an abrasive containing a magnetic material is used.
A main part of an embodiment when a method of changing a distribution state of magnetism applied to an abrasive is applied will be shown.

In FIG. 4, a pair of iron cores 41A and 43A, each having a U-shape, have coils 41B and 43, respectively.
B is wound around to form a pair of electromagnets 41 and 43. And both magnetic pole ends 41C and 41D of one electromagnet 41
And both magnetic pole ends 43C and 43D of the other electromagnet 43 are 41C, 43C and 41 along the length direction of the material thin tube 1 to be polished.
D and 43D are arranged alternately. In addition, the coil 41B of one electromagnet 41 and the other electromagnet 43
A current is alternately applied to the coil 43B from the exciting current input terminal 47 via the switching means 45. Unlike the embodiment shown in FIG. 3, which has already been described, the electromagnet 4
1, 43 are directly fixed to the movable base 15. That is, ultrasonic vibration is not applied to the electromagnets 41 and 43. The configuration of the other parts may be the same as that of the embodiment of FIGS. 1 and 2 and the embodiment of FIG.

In the embodiment of FIG. 4 as described above, the electromagnets 41, 43 are alternately excited by the switching means 45 periodically and alternately switching the currents to the electromagnets 41, 43, and one of them is accordingly excited. The magnetic distribution in the vicinity of the magnetic pole ends 41C, 41D of the electromagnet 41 of No. 3 and the magnetic distribution in the vicinity of the magnetic pole ends 43C, 43D of the other electromagnet 43 alternately change. That is, the thin tube 1 to be polished
Since the magnetic distribution on the surface to be polished changes periodically, the polishing material 37 containing the magnetic material vibrates accordingly,
The polishing of the inner surface of the thin tube 1 to be polished progresses. According to such an embodiment, it is not necessary to give mechanical vibration to the magnetism applying means such as the electromagnet and the permanent magnet, and therefore the durability is improved.

FIG. 5 shows another embodiment of the present invention. In this embodiment, the butt-welded aluminum thin tube 1 is used as a material to be polished, and the convex portion 1B protruding in a burr shape on the inner peripheral surface side is polished and removed along with the butt welding to smooth the inner peripheral surface. Here is an example of how to do this.

In FIG. 5, the permanent magnet 51 serving as the magnetism applying means has its tip surface 51A (width in the longitudinal direction of the thin tube 1) substantially equal to the width of the convex portion 1B formed by butt welding. The tip side is made thin, and this permanent magnet 51 is attached to the tip of a male screw rod 53 via an ultrasonic vibration generator 55. The male screw rod 53 is screwed through a female screw hole 57B formed at one end 57A of the support frame 57, and a knob portion 53A is formed on the proximal end side of the male screw rod 53. ing. Two supporting rollers 59A and 59B are attached to the other end 57C of the support frame 57 so as to be rotatable about an axis parallel to the central axis of the thin tube 1 to be polished. These supporting rollers 59A and 59B are located on the opposite side of the permanent magnet 51 across the thin tube 1 to be polished.

In the embodiment shown in FIG. 5, if the knob portion 53A of the male screw rod 53 is rotated in a predetermined direction by a finger or the like, the permanent magnet 51 is rotated along with the rotation of the male screw rod 53.
51A is pressed against the outer peripheral surface of the polishing target thin tube 1. At this time, the position adjustment is performed so that the tip end surface 51A of the permanent magnet 51 is located at a position corresponding to the convex portion 1B of the material thin tube 1 to be polished and removed. In this way, the abrasive material 37 containing the magnetic material is concentrated near the convex portion 1B,
When the ultrasonic vibration generator 55 is driven to vibrate the permanent magnet 51, the abrasive material 37 containing the magnetic material vibrates while being pressed against the convex portion 1B, and the convex portion 1B is polished and removed. Then, while vibrating the permanent magnet 51 as described above, if the entire supporting frame 57 is rotated in the circumferential direction of the thin tube 1 to be polished, the convex portion 1B is polished and removed over the entire inner surface of the thin tube 1. be able to. At this time, in the same manner as in the above-described respective embodiments, by flowing alcohol into the thin tube 1, the conventional EL
A finished surface similar to that obtained by processing can be obtained, and the nozzle can be prevented from rising in temperature by spraying cooling water onto the contact portion between the tip surface 51A of the permanent magnet 51 and the thin tube 1.

In each of the above-mentioned embodiments, polishing is performed while flowing alcohol inside the aluminum thin tube 1 as the material to be polished to obtain a finished surface similar to the conventional EL processing. Alternatively, dry oxygen may be flown into the thin tube 1 to obtain a finished surface similar to that of the conventional EX processing. In addition, by flowing an arbitrary fluid having a weak oxidizing property into the thin tube 1, EL
It is also possible to obtain the same effect as processing or EX processing. Further, depending on the use of the thin tube 1, alcohol, dry oxygen, or other weakly oxidizing fluid may not be flown into the thin tube, but by flowing the fluid, chips at the polishing portion,
Since it becomes possible to quickly remove the polishing powder, it is generally desirable to flow some fluid into the thin tube 1 without being limited to the weak oxidizing fluid such as alcohol and dry oxygen.

In each of the above embodiments, the material to be polished is a thin tube made of aluminum, but if it is a non-magnetic material, a tube other than aluminum, for example, a non-magnetic stainless steel tube or a synthetic resin is used. Pipe (PVC pipe, PV
Of course, it can also be applied to DF pipes, PEEK pipes, etc.). Further, not only the tube having a circular cross section but also the inner surface of a tube having a polygonal cross section or a deformed tube, or a spherical surface such as a vacuum bell jar, a curved surface, or an inner surface of a member having a convex surface can be applied. Can also be applied to flat plates.

Further, as means for vibrating the abrasive containing a magnetic material, in the embodiment of FIGS. 1 and 2, the embodiment of FIG. 3 and the embodiment of FIG. 5, a permanent magnet or an electromagnet as a magnetism applying means is an ultrasonic wave. Although a configuration in which ultrasonic vibration is generated by a vibration generator is applied, it is not limited to the ultrasonic vibration generator, and for example, a mechanism that uses a cam or the like to generate a vibration by converting rotary motion into linear reciprocating motion, and electromagnetic Needless to say, a device that generates vibration may be used. Further, even when the electromagnet is used as the magnetism applying means and the abrasive containing the magnetic material is vibrated by periodically changing the magnetic distribution, the arrangement for switching the electromagnets and the exciting current is the same as described above. The embodiment is not limited to the embodiment shown in FIG. 4 and various modifications can be made.

[0043]

According to the polishing method of the present invention, it is possible to polish a tool such as a diamond bite without mechanically supporting it on the side to be polished. Even if the pipe is thin and long and its inner peripheral surface needs to be polished, that is, even if it is difficult to mechanically support the tool on the side of the surface to be polished, It can be easily polished. Therefore, for example, the conventional EL
By applying processing equivalent to processing or EX processing, it can be used as a high-purity gas pipe in a semiconductor device, and it is possible to polish a surface having a shape that has been difficult to polish in the past. The field of application can be expanded.

[Brief description of drawings]

FIG. 1 is a partial vertical sectional front view of a polishing apparatus showing a state in which a first example of a polishing method of the present invention is being carried out.

FIG. 2 is a vertical sectional side view taken along the line II-II in FIG.

FIG. 3 is a partial vertical cross-sectional front view of the essential parts of the polishing apparatus showing a state in which the second example of the polishing method of the present invention is being carried out.

FIG. 4 is a partial vertical cross-sectional front view of the essential parts of the polishing apparatus showing a state in which the third example of the polishing method of the present invention is being carried out.

FIG. 5 is a side view of the polishing apparatus showing a state in which the fourth example of the polishing method of the present invention is being carried out.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Aluminum thin tube as a material to be polished 1A Surface to be polished (inner surface) 11 Permanent magnet 13 Ultrasonic vibration generator 37 Abrasive material 39 Electromagnets 41, 43 Electromagnet 45 Switching means 51 Permanent magnet 55 Ultrasonic vibration generator

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Kazu Mikasa 1086-166 Ohba, Mishima City, Shizuoka Prefecture (72) Inventor Kiyoshi Mukai 2-3-5 Nakane, Meguro-ku, Tokyo Tokyo Diamond Tool Manufacturing Co., Ltd. (72 ) Inventor Tomoyuki Takahashi Tokyo Diamond Tool Manufacturing Co., Ltd. 2-3-5 Nakane, Meguro-ku, Tokyo

Claims (9)

[Claims] 1. An abrasive containing at least a part of a magnetic material is arranged on a surface to be polished of a material to be polished made of a non-magnetic material, and a surface of the material to be polished opposite to a surface to be polished is provided. Magnetism is applied to the abrasive from the side, and the abrasive is vibrated in a plane substantially parallel to the surface to be polished while pressing the abrasive against the surface to be polished by magnetic force. Characteristic polishing method. 2. The polishing method according to claim 1, wherein a magnetism applying means for applying magnetism to the abrasive is vibrated.
This is a polishing method in which the polishing material is vibrated. 3. The polishing method according to claim 1, wherein the distribution state of magnetism applied to the abrasive is periodically changed, and the abrasive is vibrated. 4. The polishing method according to claim 1, wherein, as the abrasive, abrasive grains formed by fixing a hard material for polishing to the surface of grains made of a magnetic material are used. 5. The polishing method according to claim 4, wherein steel is used as a magnetic material in the abrasive and diamond is used as the hard abrasive. 6. The polishing method according to claim 1, wherein the material to be polished is an aluminum tube, an inner surface of the aluminum tube is a surface to be polished, and alcohol or dry oxygen is introduced into the aluminum tube, A polishing method for polishing the inner surface of a pipe. 7. An abrasive containing at least a part of a magnetic material, and an abrasive arranged on the surface of the material to be polished to be magnetized from the surface opposite to the surface of the material to be polished. A magnetic force applying means for applying pressure to bring the abrasive material into pressure contact with the surface to be polished, and a vibrating means for vibrating the abrasive material in a plane substantially parallel to the surface to be polished. A polishing device characterized by the following. 8. The polishing apparatus according to claim 7, wherein the vibrating means is for vibrating the magnetism applying means. 9. The polishing apparatus according to claim 7, wherein the vibrating means is means for periodically changing a distribution state of magnetism generated by the magnetism applying means.