JPH08169711A - Production of high purity silica - Google Patents

Production of high purity silica

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Publication number
JPH08169711A
JPH08169711A JP33288294A JP33288294A JPH08169711A JP H08169711 A JPH08169711 A JP H08169711A JP 33288294 A JP33288294 A JP 33288294A JP 33288294 A JP33288294 A JP 33288294A JP H08169711 A JPH08169711 A JP H08169711A
Authority
JP
Japan
Prior art keywords
acid
silica
water
washing
impurities
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP33288294A
Other languages
Japanese (ja)
Other versions
JP3722860B2 (en
Inventor
Koichi Orii
晃一 折居
Masashi Nishida
正史 西田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nitto Chemical Industry Co Ltd
Original Assignee
Nitto Chemical Industry Co Ltd
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Publication date
Application filed by Nitto Chemical Industry Co Ltd filed Critical Nitto Chemical Industry Co Ltd
Priority to JP33288294A priority Critical patent/JP3722860B2/en
Publication of JPH08169711A publication Critical patent/JPH08169711A/en
Application granted granted Critical
Publication of JP3722860B2 publication Critical patent/JP3722860B2/en
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Expired - Lifetime legal-status Critical Current

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Abstract

PURPOSE: To improve quality stability by preventing the contamination of silica due to alkali metals and to efficiently produce a high purity silica extremely small in impurities. CONSTITUTION: In this method for producing the high purity silica by which a solidified matter formed by bringing aq. alkali metal silicate soln. into contact with a water-miscible org. medium or an acid soln. is treated with an acid- containing liq. to extract impurities, and the obtained amorphous silica is separated from the acid-containing liq., then washed with a pure water in which impurities do not substantially include, the amorphous silica is washed while keeping the system constituted by mixing the amorphous silica and the washing water within the pH of 4.2-2.2 at least at the final washing stage, then the silica is separated from the washing water and heated at 800-1400 deg.C.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、高純度シリカの製造方
法に関する。
FIELD OF THE INVENTION The present invention relates to a method for producing high-purity silica.

【0002】[0002]

【従来の技術】高純度シリカの製造方法として、従来よ
り種々の方法が提案されているが、原料としてアルカリ
金属珪酸塩水溶液を用いる場合には、水混和性有機媒体
または酸溶液と接触させて凝固物を生成させ、ついで凝
固物を酸含有液で処理して非晶質シリカとし、含有され
ている不純物を抽出除去する方法が知られている。(た
とえば、本発明者等が先に提案した特開昭62- 3011号、
特開昭62- 283809号各公報記載の方法など。) ところで、酸含有液で処理されて処理液と分離されたシ
リカ粒子の表面には、抽出された不純物を含む酸含有液
(酸処理液) が付着している。高純度シリカを得ようと
するとき、従来の方法においては、分離されたシリカ粒
子を洗滌用水として不純物を実質的に含まない純水を用
いた洗滌を繰り返し、これらの付着物 (不純物) を置換
除去して、高純度シリカを得ている。
2. Description of the Related Art Conventionally, various methods have been proposed as a method for producing high-purity silica. When an aqueous solution of an alkali metal silicate is used as a raw material, it is contacted with a water-miscible organic medium or an acid solution. A method is known in which a coagulated product is generated, and then the coagulated product is treated with an acid-containing liquid to obtain amorphous silica, and impurities contained therein are extracted and removed. (For example, JP-A-62-3011 previously proposed by the present inventors,
Methods described in JP-A-62-283809, etc. ) By the way, the surface of the silica particles treated with the acid-containing liquid and separated from the treatment liquid has an acid-containing liquid containing the extracted impurities.
(Acid treatment liquid) is attached. In order to obtain high-purity silica, in the conventional method, the separated silica particles are repeatedly washed with pure water containing substantially no impurities as washing water to replace these deposits (impurities). After removal, high-purity silica is obtained.

【0003】[0003]

【発明が解決しようとする課題】前記の、不純物を実質
的に含まない純水を用いた洗滌を繰り返して行う従来の
方法においては、ときに不純物濃度の高い汚染されたシ
リカが発生するという問題点がある。本発明者らによる
解析の結果によると、その汚染物質は、アルカリ金属-
特に、Naであることが多い。そして、その汚染の主な原
因は、製造設備の装置材料から溶出した不純物がシリカ
に吸着されるためと考えられる。不純物による製品中間
体シリカの汚染は、高純度シリカ製品の歩留りを低下さ
せ、生産設備の安定操業に対する大きな阻害要因とな
る。本発明が解決しようとする課題は、アルカリ金属珪
酸塩水溶液を原料として高純度シリカを得る際に、不純
物による製品シリカの汚染を防ぐことができる改良され
た方法を開発することである。
In the above-described conventional method in which pure water containing substantially no impurities is repeatedly used, contaminated silica having a high impurity concentration is sometimes generated. There is a point. According to the result of the analysis by the present inventors, the pollutant is an alkali metal-
In particular, it is often Na. It is considered that the main cause of the contamination is that the impurities eluted from the equipment material of the manufacturing facility are adsorbed by silica. Contamination of the product intermediate silica with impurities reduces the yield of high-purity silica products and becomes a major impediment to stable operation of production equipment. The problem to be solved by the present invention is to develop an improved method capable of preventing contamination of product silica by impurities when obtaining high-purity silica from an aqueous alkali metal silicate solution.

【0004】本発明の目的は、アルカリ金属珪酸塩水溶
液を水混和性有機媒体または酸溶液と接触させて生成し
た凝固物を酸含有液で処理して、非晶質シリカとし不純
物を抽出した後、水で洗滌して高純度シリカを得る方法
において、アルカリ金属不純物による製品中間体の汚染
による製品歩留りの低下を防ぎ、生産設備の安定操業に
寄与する、高純度シリカの改良された製造方法を提供す
ることにある。
The object of the present invention is to treat an aqueous solution of an alkali metal silicate with a water-miscible organic medium or an acid solution to treat a coagulated product, which is treated with an acid-containing solution to obtain amorphous silica and extract impurities. In the method of washing with water to obtain high-purity silica, an improved method for producing high-purity silica that contributes to stable operation of production equipment by preventing a decrease in product yield due to contamination of product intermediates with alkali metal impurities is provided. To provide.

【0005】[0005]

【課題を解決するための手段】本発明者らは、アルカリ
金属珪酸塩水溶液から高純度シリカを得る際に、不純物
による製品シリカの汚染防止方法について鋭意研究し、
製品シリカの汚染の主な原因は、装置材料から洗滌用水
中へ溶出したアルカリ金属不純物が製品中間体シリカに
吸着されるためであることを究明した。すなわち、洗滌
用水中のアルカリ金属不純物の製品中間体シリカへの吸
着は、洗滌用水のpHに支配され、洗滌用水のpHが酸性領
域から中性領域に近づくと急激に増大すること、そし
て、純水を用いた繰り返し洗滌を行った際に、その少な
くとも最終段階における被洗滌シリカと洗滌用水とを混
合してなる系(以下、単に洗滌系という)のpHを 4.2以
下に保持すれば、アルカリ金属不純物の製品中間体シリ
カへの吸着を防ぐことができることを見出し、本発明を
完成した。
[Means for Solving the Problems] The present inventors diligently studied a method for preventing contamination of product silica by impurities when obtaining high-purity silica from an alkali metal silicate aqueous solution,
It was clarified that the main cause of contamination of the product silica is that the alkali metal impurities eluted from the equipment material into the washing water are adsorbed by the product intermediate silica. That is, the adsorption of alkali metal impurities in the cleaning water to the product intermediate silica is governed by the pH of the cleaning water, and the pH of the cleaning water rapidly increases as the pH approaches from the acidic region to the neutral region, and When repeatedly washing with water, if the pH of the system consisting of the silica to be washed and the washing water at least at the final stage (hereinafter simply referred to as the washing system) is maintained at 4.2 or less, alkali metal The present invention has been completed by finding that impurities can be prevented from being adsorbed on product intermediate silica.

【0006】本発明は「アルカリ金属珪酸塩水溶液を水
混和性有機媒体または酸溶液と接触させて生成した凝固
物を酸含有液で処理して不純物を抽出し、得られた非晶
質シリカを酸含有液と分離した後、不純物を実質的に含
まない洗滌用水で洗滌して高純度シリカを得る方法にお
いて、前記非晶質シリカを、その水洗滌の少なくとも最
終段階において、前記非晶質シリカと洗滌用水とを混合
してなる系のpHを 4.2〜2.2 の範囲に保って洗滌した
後、洗滌水と分離して加熱処理することを特徴とする高
純度シリカの製造方法。」を要旨とする。
According to the present invention, the "amorphous silica obtained by contacting an aqueous solution of an alkali metal silicate with a water-miscible organic medium or an acid solution, treating a coagulation product with an acid-containing solution to extract impurities, After separating from the acid-containing liquid, in a method of washing with washing water containing substantially no impurities to obtain high-purity silica, the amorphous silica is obtained by at least the final stage of washing with water. The method for producing high-purity silica is characterized in that the pH of the system prepared by mixing the washing water with the washing water is kept in the range of 4.2 to 2.2, and then the washing water is separated from the washing water and heat-treated. " To do.

【0007】好ましい態様としては、前記の少なくとも
最終段階における洗滌用水が、30〜300 ppm の酸を含む
水であることがよく、また、酸は、炭酸または硫酸であ
ることがよい。
In a preferred embodiment, the washing water at least in the final stage is water containing 30 to 300 ppm of acid, and the acid is carbonic acid or sulfuric acid.

【0008】また、加熱処理は、温度 800〜1400℃の範
囲で行われることがよい。
The heat treatment is preferably performed at a temperature of 800 to 1400 ° C.

【0009】以下、本発明について詳述する。本発明の
方法によって得られる高純度シリカは、不純物含有率が
極めて低く、Na, Kなどのアルカリ金属, Mg, Caなどの
アルカリ土類金属, FeおよびAlの各元素の含有率がそれ
ぞれ1ppm 以下である。
The present invention will be described in detail below. The high-purity silica obtained by the method of the present invention has an extremely low impurity content, and the content of each alkali metal such as Na and K, the alkaline earth metal such as Mg and Ca, and each element of Fe and Al is 1 ppm or less. Is.

【0010】本発明の方法の実施態様は、次の3工程を
含む。 (1) 非晶質シリカの調製工程 アルカリ金属珪酸塩水溶液を水混和性有機媒体または酸
溶液と接触させて、シリカゲルを生成させる。次いで、
得られたシリカゲルを酸含有液で処理して非晶質シリカ
とし不純物を抽出して、酸含有液と分離する。 (2) 非晶質シリカの洗滌工程 酸含有液と分離した非晶質シリカを、純水を用いて洗滌
する。この水洗滌の少なくとも最終段階において、洗滌
系のpHを 4.2〜2.2 の範囲に保って洗滌した後、非晶質
シリカと洗滌水とを分離する。 (3) 非晶質シリカの加熱処理工程 前記の洗滌処理を施した非晶質シリカを、温度 800〜14
00℃ の範囲で加熱処理する。
An embodiment of the method of the present invention comprises the following three steps. (1) Amorphous Silica Preparation Step An aqueous solution of an alkali metal silicate is brought into contact with a water-miscible organic medium or an acid solution to produce silica gel. Then
The obtained silica gel is treated with an acid-containing solution to obtain amorphous silica, and impurities are extracted to separate it from the acid-containing solution. (2) Amorphous silica washing step The amorphous silica separated from the acid-containing liquid is washed with pure water. At least at the final stage of this water washing, the washing system is washed while keeping the pH of the washing system in the range of 4.2 to 2.2, and then the amorphous silica and the washing water are separated. (3) Amorphous silica heat treatment step The amorphous silica subjected to the above-mentioned washing treatment is heated to a temperature of 800 to 14
Heat treatment in the range of 00 ℃.

【0011】以下、前記の各工程について詳述する。 (1) 非晶質シリカの調製工程 本発明の方法は、アルカリ金属珪酸塩水溶液を水混和性
有機媒体または酸溶液と接触させて生成した凝固物(ゲ
ル)を、酸含有液で処理して得られた非晶質シリカに適
用することができる。上記の方法の範囲内であれば、非
晶質シリカの製造法は特に限定されず、いずれの方法で
得られた非晶質シリカでもよい。原料のアルカリ金属珪
酸塩としては、珪酸のナトリウム塩, カリウム塩, リチ
ウム塩などを用いることができる。
The above steps will be described in detail below. (1) Amorphous silica preparation step The method of the present invention comprises treating an aqueous solution of an alkali metal silicate with a water-miscible organic medium or an acid solution to produce a coagulated product (gel), which is treated with an acid-containing solution. It can be applied to the obtained amorphous silica. The method for producing amorphous silica is not particularly limited as long as it is within the range of the above method, and amorphous silica obtained by any method may be used. As the alkali metal silicate as the raw material, sodium salt, potassium salt, lithium salt, etc. of silicic acid can be used.

【0012】非晶質シリカの製造法としては、本発明者
等が先に提案したたとえば、特開昭62- 3011号、特開昭
62- 3012号、特開昭62- 283809号または特開昭62- 2838
10号各公報記載の方法により、アルカリ金属珪酸塩水溶
液を水混和性有機媒体または酸溶液中に細孔から押し出
して得られた凝固物を、酸含有液で処理して不純物を抽
出する方法を用いることができる。
The method of producing amorphous silica has been previously proposed by the present inventors, for example, in Japanese Patent Laid-Open No. 62-3011 and Japanese Patent Laid-Open No.
62-3012, JP62-283809 or JP62-2838.
No. 10, according to the method described in each publication, a method of extracting impurities by treating the coagulated product obtained by extruding an aqueous solution of an alkali metal silicate through a pore into a water-miscible organic medium or an acid solution, treating the solution with an acid. Can be used.

【0013】より具体的な実施の態様としては、粘度が
2〜500 ポイズの範囲であるアルカリ金属珪酸塩水溶液
を、孔径0.05〜1mmの範囲であるノズルから、水混和性
有機媒体または濃度4規定以下の酸溶液からなる凝固浴
中に押し出して繊維状ないし柱状あるいは粒状に凝固さ
せ、得られた凝固物を酸含有液で処理する。
In a more specific embodiment, an aqueous solution of an alkali metal silicate having a viscosity in the range of 2 to 500 poise is supplied from a nozzle having a pore size in the range of 0.05 to 1 mm to a water-miscible organic medium or a concentration of 4N. It is extruded into a coagulation bath consisting of the following acid solution to coagulate into a fibrous, columnar or granular form, and the obtained coagulated product is treated with an acid-containing liquid.

【0014】凝固浴に用いられる水混和性有機媒体とし
ては、たとえば、メタノール, エタノール, n-プロパノ
ール等のアルコール類、酢酸メチル, 酢酸エチル等のエ
ステル類、アセトン, メチルエチルケトン等のケトン
類、ジメチルアセトアミド, ジメチルホルムアミドなど
のアミド類、ジメチルスルフォキシド等を挙げることが
できる。
Examples of the water-miscible organic medium used in the coagulation bath include alcohols such as methanol, ethanol and n-propanol, esters such as methyl acetate and ethyl acetate, ketones such as acetone and methyl ethyl ketone, and dimethylacetamide. Examples thereof include amides such as dimethylformamide, dimethylsulfoxide and the like.

【0015】また、凝固浴に用いられる酸としては、硫
酸, 硝酸, 塩酸などの無機酸であって、硫酸, 硝酸を用
いるのが好ましく、凝固浴としては、実用上、これらの
酸の水溶液が好ましい。酸濃度は、 0.1〜4規定、好ま
しくは 0.5〜3規定、更に好ましくは1〜2規定の範囲
である。凝固浴温度は、10〜60℃の範囲に保持するのが
よい。
The acid used in the coagulation bath is an inorganic acid such as sulfuric acid, nitric acid or hydrochloric acid, and it is preferable to use sulfuric acid or nitric acid. As the coagulation bath, an aqueous solution of these acids is practically used. preferable. The acid concentration is in the range of 0.1 to 4 N, preferably 0.5 to 3 N, and more preferably 1 to 2 N. The coagulation bath temperature is preferably kept in the range of 10 to 60 ° C.

【0016】酸含有液に用いられる酸としては、硫酸,
硝酸, 塩酸などの無機酸であって、硫酸, 硝酸を用いる
のが好ましく、酸含有液としては、実用上、これらの酸
の水溶液が好ましい。酸濃度は、 0.1〜8規定、好まし
くは 0.5〜7規定、更に好ましくは3〜6規定の範囲で
ある。
Acids used in the acid-containing liquid include sulfuric acid,
Among the inorganic acids such as nitric acid and hydrochloric acid, it is preferable to use sulfuric acid and nitric acid, and as the acid-containing liquid, an aqueous solution of these acids is preferable in practice. The acid concentration is in the range of 0.1 to 8 N, preferably 0.5 to 7 N, and more preferably 3 to 6 N.

【0017】酸含有液による凝固物の処理は、回分式で
凝固物と酸含有液とを混合する方式でも、また、凝固物
に酸含有液を連続的に供給して処理する連続方式でも、
いずれでもよく、製品中の不純物の許容されるレベルに
応じて選択すればよい。更に、不純物の抽出率を高める
手段として、回分式で新しい酸含有液を用いた繰り返し
処理を行うこともできる。
The treatment of the coagulation product with the acid-containing liquid may be a batch system in which the coagulation product and the acid-containing liquid are mixed, or a continuous system in which the acid-containing liquid is continuously supplied to the coagulation product for treatment.
Any of them may be used, and it may be selected depending on the allowable level of impurities in the product. Furthermore, as a means for increasing the extraction rate of impurities, it is also possible to perform a repeated treatment using a new acid-containing solution in a batch system.

【0018】(2) 非晶質シリカの洗滌工程 酸含有液による処理 (酸処理) によって、凝固物中の不
純物は抽剤である酸含有液 (酸処理液) 中に移行する。
酸処理を行った後、生成した非晶質シリカと抽剤である
酸処理液とは、濾過などの通常の固液分離操作によって
分離される。この際、酸処理液と分離された湿シリカの
表面には、凝固物から抽出された不純物を含む酸処理液
の一部が付着残留している。
(2) Amorphous silica washing step By the treatment with an acid-containing liquid (acid treatment), impurities in the coagulated substance are transferred into the acid-containing liquid (acid treatment liquid) as the extractant.
After the acid treatment, the produced amorphous silica and the acid treatment liquid as the extractant are separated by a usual solid-liquid separation operation such as filtration. At this time, on the surface of the wet silica separated from the acid treatment liquid, a part of the acid treatment liquid containing impurities extracted from the solidified substance remains attached.

【0019】アルカリ金属珪酸塩水溶液を原料としたと
き、前記湿シリカの表面に付着残留している酸処理液
は、酸処理により抽出された原料中の夾雑物と共に、最
高濃度の不純物である原料中のアルカリ金属が中和され
て生成した塩や、使用された酸含有液の過剰の酸分など
を含む。高純度シリカを得ようとするときは、酸処理液
と分離された湿シリカの表面に付着残留している不純物
の濃度を低減させるために、前記湿シリカに対して不純
物を実質的に含まない純水を用いた洗滌と固液分離の処
理を施し、これらの付着物 (不純物) を希釈し置換除去
する。
When an aqueous solution of an alkali metal silicate is used as a raw material, the acid treatment liquid remaining on the surface of the wet silica is a raw material which is the highest concentration of impurities together with impurities in the raw material extracted by the acid treatment. It contains salts produced by neutralization of the alkali metals therein and excess acid content of the acid-containing liquid used. When obtaining high-purity silica, the wet silica is substantially free of impurities in order to reduce the concentration of impurities remaining on the surface of the wet silica separated from the acid treatment liquid. After washing with pure water and solid-liquid separation, these deposits (impurities) are diluted and replaced.

【0020】純水を用いた洗滌と固液分離の処理は、処
理されたシリカに付着ないし包含される不純物濃度が、
製品シリカ中に含まれる不純物の許容されるレベルに達
するまで、必要に応じて繰り返して行う。この段階で
は、洗滌処理系の pH は、中性域になりやすい。従来の
高純度シリカの製造方法では、この段階で洗滌処理を終
了させていた。しかし、前述のとおりこのような洗滌処
理では、洗滌処理された製品中間体シリカのアルカリ金
属不純物による汚染がときに発生し、高純度シリカ製品
の歩留りを低下させ、生産設備の安定操業を阻害すると
いう問題点がある。
In the washing and solid-liquid separation treatments using pure water, the concentration of impurities attached to or contained in the treated silica is
Repeat as needed until an acceptable level of impurities in the product silica is reached. At this stage, the pH of the cleaning system tends to be in the neutral range. In the conventional method for producing high-purity silica, the washing treatment is completed at this stage. However, as described above, such washing treatment sometimes causes contamination of the washed product intermediate silica with alkali metal impurities, which reduces the yield of high-purity silica products and hinders stable operation of production equipment. There is a problem.

【0021】本発明の方法では、この水洗滌の少なくと
も最終段階における洗滌系の pH を4.2以下、好ましく
は 4.2〜2.2 の範囲に保持することによって、アルカリ
金属のシリカへの吸着を防ぎ、製品中間体シリカの汚染
の発生を防ぐ。洗滌系のpHを 4.2以下にする手段として
は、水洗滌の少なくとも最終段階において使用する洗滌
用水としての純水に酸を加えればよい。なお、水洗滌の
最終段階において、処理されたシリカに付着ないし包含
される酸以外の不純物の濃度が製品シリカに許容される
レベルに達しており、かつ、処理されたシリカに付着残
留した酸の濃度が、洗滌系の pH を 4.2以下になし得る
場合には、洗滌用水に酸を加える必要はない。添加する
酸としては、少ない量でアルカリ汚染を防ぐ効果を発揮
し、かつ、加熱処理によってシリカから揮散しやすいも
のが好ましい。具体的には、塩酸, 硝酸, 硫酸, 炭酸な
どの無機酸、ギ酸, 酢酸などの有機酸を用いることがで
きる。実用上、炭酸, 硫酸が好ましい。
In the method of the present invention, the pH of the washing system at least in the final stage of the washing with water is kept at 4.2 or less, preferably in the range of 4.2 to 2.2, so that the adsorption of alkali metal onto silica is prevented and the intermediate product is removed. Prevents the occurrence of contamination of body silica. As a means for adjusting the pH of the washing system to 4.2 or less, an acid may be added to pure water as washing water used at least at the final stage of washing with water. In the final stage of water washing, the concentration of impurities other than the acid attached to or contained in the treated silica has reached a level that is acceptable for the product silica, and the amount of acid remaining on the treated silica is It is not necessary to add acid to the washing water if the concentration can bring the pH of the washing system below 4.2. As the acid to be added, it is preferable to use a small amount of acid that exhibits the effect of preventing alkali contamination and is easily volatilized from silica by heat treatment. Specifically, inorganic acids such as hydrochloric acid, nitric acid, sulfuric acid and carbonic acid, and organic acids such as formic acid and acetic acid can be used. Practically, carbonic acid and sulfuric acid are preferable.

【0022】本発明の方法では、非晶質シリカをその水
洗滌の少なくとも最終段階で、30〜300 ppm 、好ましく
は40〜200 ppm 、更に好ましくは50〜100 ppm の酸を含
む水を用いて洗滌することができる。酸の濃度が、30 p
pm未満では、アルカリ金属のシリカへの吸着を防ぐ効果
が期待できず、一方、300 ppm を超えると加熱処理を施
しても酸分がシリカに残留する可能性が生ずると共に、
揮散する酸分による設備腐食あるいは環境汚染を防止す
るための負荷が増大する。
In the method of the present invention, the amorphous silica is treated with water containing 30 to 300 ppm, preferably 40 to 200 ppm, and more preferably 50 to 100 ppm of acid at least in the final stage of washing with water. Can be washed. Acid concentration is 30 p
If it is less than pm, the effect of preventing the adsorption of alkali metals to silica cannot be expected, while if it exceeds 300 ppm, the acid content may remain in the silica even if heat treatment is applied,
The load for preventing equipment corrosion or environmental pollution due to volatilized acid content increases.

【0023】本発明の方法における洗滌処理操作の態様
は、特に制約はなく、粉粒体物質について通常行われる
洗滌操作を選ぶことができる。このような操作として
は、たとえば、濾過・遠心分離など常法により処理して
酸処理液と分離され、酸処理液の一部が残留している湿
シリカの層に対して洗滌水を圧入・透過させ、残留して
いる酸処理液を洗滌水で置換洗滌(リンス洗滌ともい
う)する方法、または、湿シリカを洗滌水中にスラリー
状に分散させシリカに付着している物質を除去するケー
ク洗滌(リパルプ洗滌ともいう)による方法などを例示
することができる。水洗滌の少なくとも最終段階で、洗
滌処理する非晶質シリカの重量に対して、通常5〜15倍
の洗滌用水が用いられる。
The mode of the washing operation in the method of the present invention is not particularly limited, and the washing operation which is usually performed for the granular material can be selected. As such an operation, for example, a washing water is pressed into a layer of wet silica which is separated from the acid-treated solution by a conventional method such as filtration / centrifugation and in which a part of the acid-treated solution remains. A method of permeating and replacing the remaining acid treatment liquid with washing water (also called rinse washing), or a cake washing method in which wet silica is dispersed in a washing water in a slurry form to remove substances adhering to silica. (Also referred to as repulp washing) can be exemplified. At least at the final stage of washing with water, the washing water is usually used in an amount of 5 to 15 times the weight of the amorphous silica to be washed.

【0024】(3) 非晶質シリカの加熱処理工程 酸を含む系で洗滌処理を終了させる方法によって得られ
た非晶質シリカの表面には、酸が付着している。ところ
で、本発明の方法で得ようとする高純度シリカについて
は、その用途-特に VLSI の封止用樹脂組成物のフィラ
ーにおいて、イオン性不純物の存在は、VLSI のリード
線・リードフレームなどの腐食の原因となるため、その
濃度は厳しく規制されている。高純度シリカに含まれる
イオン性不純物の量は、高純度シリカを純水中で煮沸抽
出処理して得られた抽出水の電気伝導度の値によって評
価することができ、この電気伝導度の値が 10 μS/cm
以下であることが望まれている。このような高純度化の
要求に対応するために、非晶質シリカの表面に付着して
いる酸を、本工程における加熱処理によって除去する。
(3) Heat Treatment Step of Amorphous Silica Acid is attached to the surface of the amorphous silica obtained by the method of finishing the washing treatment with a system containing acid. By the way, regarding the high-purity silica to be obtained by the method of the present invention, its application-particularly in the filler of the VLSI encapsulating resin composition, the presence of ionic impurities causes corrosion of VLSI lead wires, lead frames, etc. Therefore, its concentration is strictly regulated. The amount of ionic impurities contained in the high-purity silica can be evaluated by the value of the electric conductivity of the extracted water obtained by boiling and extracting the high-purity silica in pure water. Is 10 μS / cm
The following is desired. In order to meet such a demand for high purification, the acid adhering to the surface of the amorphous silica is removed by the heat treatment in this step.

【0025】非晶質シリカの表面に付着している酸を除
去するには、温度 800℃以上の領域で加熱処理すること
が望ましい。処理の条件は、目的とする製品シリカに望
まれる品質・物性に応じて選定することができる。製品
シリカの物性を考慮すると、加熱処理の温度は、 900〜
1400℃、好ましくは1050〜1300℃、更に好ましくは1100
〜1250℃の範囲がよい。加熱処理温度が 800℃未満であ
るときは、得られた非晶質シリカに酸が残留して、本発
明の方法が目的とする高純度シリカが得られない。加熱
処理の時間は、加熱処理の方法・装置に依存し、たとえ
ば、静置方式では30分〜50時間、流動層ないし移動層方
式では1秒〜10時間の範囲である。
In order to remove the acid adhering to the surface of the amorphous silica, it is desirable to perform heat treatment at a temperature of 800 ° C. or higher. The treatment conditions can be selected according to the desired quality and physical properties of the desired product silica. Considering the physical properties of product silica, the temperature of heat treatment is 900 ~
1400 ° C, preferably 1050 to 1300 ° C, more preferably 1100
The range of ~ 1250 ° C is preferable. When the heat treatment temperature is lower than 800 ° C., acid remains in the obtained amorphous silica, and the high-purity silica intended by the method of the present invention cannot be obtained. The heat treatment time depends on the heat treatment method and device, and is, for example, in the range of 30 minutes to 50 hours in the stationary system and in the range of 1 second to 10 hours in the fluidized bed or moving bed system.

【0026】このような加熱処理によって、酸として硫
酸を用いたとき、残留する硫酸イオンの濃度が1ppm 以
下であり、純水中で煮沸抽出処理して得られた抽出水の
電気伝導度の値が1μS/cm以下である非晶質シリカを
得ることができる。
When sulfuric acid is used as the acid by such heat treatment, the concentration of residual sulfate ion is 1 ppm or less, and the electric conductivity of the extracted water obtained by boiling and extracting in pure water is measured. It is possible to obtain amorphous silica having a value of 1 μS / cm or less.

【0027】加熱処理を行う際に用いる装置としては、
原料シリカを所定の温度に維持することができるもので
あればよく、管状炉, 箱型炉, トンネル炉などを使用す
ることができる。また、加熱源は任意であり、電熱また
は燃焼ガスは経済的な熱源である。その他、プラズマ加
熱、イメージ炉を用いることもできる。
The apparatus used for the heat treatment is
It is sufficient that the raw material silica can be maintained at a predetermined temperature, and a tubular furnace, a box furnace, a tunnel furnace, or the like can be used. Further, the heating source is optional, and electric heat or combustion gas is an economical heat source. In addition, plasma heating and an image furnace can be used.

【0028】[0028]

【実施例】以下、実施例および比較例により本発明の方
法を具体的に説明する。なお、本発明は、以下の実施例
に限定されるものではない。 実施例1 JIS 3号水ガラスを加熱濃縮して、20℃における粘度を
300 cpsとした。この水ガラス約8リットルをポンプで
加圧し、濾過器 (目開き70μm) を経てノズル(孔径 0.
2mm, 孔数50個) を通して、50℃に保持された8重量%
硫酸水溶液 300リットルを入れた凝固浴中へ毎秒 0.4m
の速度で押し出した。繊維状で得られたシリカを、酸含
有液として10倍量の新たに調製した8重量%硫酸水溶液
中に浸漬して温度約95℃で約1時間攪拌して不純物の抽
出を行い、得られた非晶質シリカを酸含有液と分離し
た。ついで、被洗滌シリカの10倍量の純水を用いて4回
洗浄した。第4回目の洗滌液中の硫酸濃度は約8ppm で
あった。
The method of the present invention will be specifically described below with reference to examples and comparative examples. The present invention is not limited to the examples below. Example 1 JIS No. 3 water glass was heated and concentrated to obtain a viscosity at 20 ° C.
It was set to 300 cps. About 8 liters of this water glass was pressurized with a pump, passed through a filter (opening 70 μm), and then a nozzle (pore diameter: 0.
2mm, 50 holes) 8% by weight kept at 50 ℃
0.4m / s into a coagulation bath containing 300 liters of sulfuric acid
Extruded at the speed of. The fibrous silica was immersed in 10 times the amount of newly prepared 8 wt% sulfuric acid aqueous solution as an acid-containing solution and stirred at a temperature of about 95 ° C for about 1 hour to extract impurities. The amorphous silica was separated from the acid-containing liquid. Then, it was washed four times with pure water in an amount 10 times that of the silica to be washed. The sulfuric acid concentration in the fourth washing liquid was about 8 ppm.

【0029】第5回目の洗滌を最終回とし、純水に硫酸
を加えて調製した硫酸濃度 50 ppmの洗滌用水を被洗滌
シリカの10倍量を用いて洗滌した。この後、濾過による
固液分離を行って得られた湿シリカを熱風乾燥機により
温度 120℃に保持して8時間乾燥し、含水率 (加熱処理
シリカ基準の重量減少率)が7重量%である非晶質乾燥
シリカ 3.7kgを得た。この非晶質乾燥シリカの硫酸濃度
は、約 50 ppm であった。
The final washing was the fifth washing, and washing water having a sulfuric acid concentration of 50 ppm prepared by adding sulfuric acid to pure water was washed with 10 times the amount of silica to be washed. Then, the wet silica obtained by performing solid-liquid separation by filtration was dried at a temperature of 120 ° C. for 8 hours by a hot air dryer, and the water content (weight reduction rate based on heat-treated silica) was 7% by weight. 3.7 kg of some amorphous dry silica was obtained. The sulfuric acid concentration of this amorphous dry silica was about 50 ppm.

【0030】前記非晶質乾燥シリカ50gを石英ビーカー
に充填し、電気炉を用いて温度1250℃で1時間加熱処理
を行った。このようにして得られたシリカの不純物濃度
は、Na : 0.3 ppm, K : 0.1 ppm以下, Mg : 0.1 ppm以
下, Ca : 0.1 ppm, Fe : 0.5 ppm, SO4 2- : 0.1 ppm で
あった。
A quartz beaker was filled with 50 g of the amorphous dry silica and heat-treated at a temperature of 1250 ° C. for 1 hour using an electric furnace. The impurity concentration of the silica thus obtained was Na: 0.3 ppm, K: 0.1 ppm or less, Mg: 0.1 ppm or less, Ca: 0.1 ppm, Fe: 0.5 ppm, SO 4 2- : 0.1 ppm. .

【0031】また、前記非晶質乾燥シリカと加熱処理シ
リカを、それぞれ純水に分散させて各々濃度10重量%の
スラリーを調製し、揮発濃縮のない条件下で8時間煮沸
抽出処理して得られた上澄み液 (抽出水) の25℃におけ
る電気伝導度を測定した。電気伝導度の値は、乾燥シリ
カでは 40 μS/cm、加熱処理シリカでは1μS/cmで
あった。
The amorphous dry silica and the heat-treated silica are dispersed in pure water to prepare a slurry having a concentration of 10% by weight, which is obtained by boiling and extracting for 8 hours under conditions without volatilization and concentration. The electrical conductivity of the obtained supernatant (extracted water) at 25 ° C was measured. The value of electric conductivity was 40 μS / cm for dry silica and 1 μS / cm for heat-treated silica.

【0032】実施例2および比較例1 第5回目の洗滌を最終回とし、純水に硫酸を加えて調製
した表-1に示す各種の硫酸濃度の洗滌用水を用いたほか
は、実施例1の方法に準じて処理し、非晶質乾燥シリカ
および加熱処理シリカを得た。第5回目の洗滌で用いた
洗滌用水の硫酸濃度と洗滌系のpH、得られた乾燥シリカ
および加熱処理シリカのSO4 2- 濃度と煮沸抽出水の電気
伝導度の値、ならびに加熱処理シリカの Na 濃度を、表
-1に示した。なお、得られたシリカのNa以外の不純物濃
度は、いずれもK : 0.1 ppm以下,Mg : 0.1 ppm以下, C
a : 0.1 ppm, Fe : 0.5 ppmであった。
Example 2 and Comparative Example 1 Example 1 was repeated except that the fifth washing was performed last time and the washing water having various sulfuric acid concentrations shown in Table 1 prepared by adding sulfuric acid to pure water was used. Was treated according to the method of 1. to obtain amorphous dry silica and heat-treated silica. The sulfuric acid concentration of the washing water used in the fifth washing and the pH of the washing system, the SO 4 2- concentration of the obtained dried silica and heat-treated silica, and the electric conductivity of the boiling extract water, and the heat-treated silica Display Na concentration
-1 shown. In addition, the concentration of impurities other than Na in the obtained silica is K: 0.1 ppm or less, Mg: 0.1 ppm or less, C
a: 0.1 ppm, Fe: 0.5 ppm.

【0033】[0033]

【表1】 [Table 1]

【0034】表-1に示すように、本発明で規定する条件
で処理したとき、本発明が目的とする不純物が極めて少
ない高純度シリカを得ることができた (実施例1〜2)
。これに対して、第5回目 (最終回) の洗滌におい
て、本発明で規定した条件をはずれた洗滌用水を用いて
洗滌処理を行ったとき、規定した条件の下限に満たない
ときは、アルカリ金属による汚染が発生して得られたシ
リカのNa濃度が1ppmを超え (比較例1-1〜-2) 、一
方、規定した条件の上限を超えたときは、加熱処理シリ
カにおいても酸分の揮散が充分でなく、SO4 2- 濃度が 4
0 ppm であり、また、煮沸抽出水の電気伝導度の値は32
μS/cmであって (比較例1-3) 、いずれも、本発明が
目的とする高純度シリカを得ることができなかった。
As shown in Table 1, when treated under the conditions specified in the present invention, it was possible to obtain high-purity silica containing very few impurities, which is the object of the present invention (Examples 1 and 2).
. On the other hand, in the fifth (final) washing, when the washing treatment is performed using the washing water that deviates from the conditions specified in the present invention, if the lower limit of the specified conditions is not reached, the alkali metal When the Na concentration of the silica obtained by the contamination caused by the above exceeds 1 ppm (Comparative Examples 1-1 to -2) and, on the other hand, exceeds the upper limit of the specified conditions, the volatilization of the acid content also occurs in the heat-treated silica. Is not enough, SO 4 2- concentration is 4
It is 0 ppm, and the electric conductivity of boiling water is 32.
It was μS / cm (Comparative Example 1-3), but in any case, the high-purity silica aimed at by the present invention could not be obtained.

【0035】[0035]

【発明の効果】【The invention's effect】

【0036】本発明の方法によって、シリカのアルカリ
金属による汚染の発生を防止して目的とする製品シリカ
の品質の安定性を向上させ、不純物が極めて少ない高純
度シリカを効率よく製造することができる。本発明の方
法で得られた高純度シリカは、各種の充填材・分散剤な
どの用途、透明石英ガラス・特殊セラミックスなどの原
料のほか、 VLSI 封止用樹脂組成物のフィラー原料とし
て好適に用いられる。
According to the method of the present invention, it is possible to prevent the contamination of silica with alkali metal, improve the stability of the quality of the intended product silica, and efficiently produce high-purity silica containing very few impurities. . The high-purity silica obtained by the method of the present invention is suitable for use as various fillers and dispersants, as a raw material for transparent quartz glass and special ceramics, and as a filler raw material for VLSI encapsulating resin compositions. To be

Claims (9)

【特許請求の範囲】[Claims] 【請求項1】 アルカリ金属珪酸塩水溶液を水混和性有
機媒体または酸溶液と接触させて生成した凝固物を酸含
有液で処理して不純物を抽出し、得られた非晶質シリカ
を酸含有液と分離した後、不純物を実質的に含まない洗
滌用水で洗滌して高純度シリカを得る方法において、前
記非晶質シリカを、その水洗滌の少なくとも最終段階に
おいて、前記非晶質シリカと洗滌用水とを混合してなる
系のpHを 4.2〜2.2 の範囲に保って洗滌した後、洗滌水
と分離して加熱処理することを特徴とする高純度シリカ
の製造方法。
1. An amorphous silica obtained by acid-containing an amorphous silica obtained by treating a solidified product produced by contacting an aqueous solution of an alkali metal silicate with a water-miscible organic medium or an acid solution with an acid-containing solution to extract impurities. After separating from the liquid, in a method of obtaining high-purity silica by washing with washing water substantially free of impurities, the amorphous silica is washed with the amorphous silica at least at the final stage of the water washing. A method for producing high-purity silica, which comprises washing the system by mixing it with water while maintaining the pH in the range of 4.2 to 2.2, then separating the system from the washing water and performing heat treatment.
【請求項2】 アルカリ金属珪酸塩が、珪酸ナトリウ
ム, 珪酸カリウムおよび珪酸リチウムからなる群から選
ばれた少なくとも一種である請求項1記載の高純度シリ
カの製造方法。
2. The method for producing high-purity silica according to claim 1, wherein the alkali metal silicate is at least one selected from the group consisting of sodium silicate, potassium silicate and lithium silicate.
【請求項3】 水混和性有機媒体が、メタノール, エタ
ノール, n-プロパノール等のアルコール類、酢酸メチ
ル, 酢酸エチル等のエステル類、アセトン, メチルエチ
ルケトン等のケトン類、ジメチルアセトアミド, ジメチ
ルホルムアミドなどのアミド類およびジメチルスルフォ
キシドからなる群から選ばれた少なくとも一種である請
求項1記載の高純度シリカの製造方法。
3. The water-miscible organic medium comprises alcohols such as methanol, ethanol and n-propanol, esters such as methyl acetate and ethyl acetate, ketones such as acetone and methyl ethyl ketone, amides such as dimethylacetamide and dimethylformamide. The method for producing high-purity silica according to claim 1, wherein the high-purity silica is at least one selected from the group consisting of compounds and dimethyl sulfoxide.
【請求項4】 酸溶液が、硫酸, 硝酸および塩酸からな
る群から選ばれた少なくとも一種の酸の水溶液であっ
て、酸濃度が 0.1〜4規定の範囲である請求項1記載の
高純度シリカの製造方法。
4. The high-purity silica according to claim 1, wherein the acid solution is an aqueous solution of at least one acid selected from the group consisting of sulfuric acid, nitric acid and hydrochloric acid, and the acid concentration is in the range of 0.1 to 4 N. Manufacturing method.
【請求項5】 酸含有液が、硫酸, 硝酸および塩酸から
なる群から選ばれた少なくとも一種の酸の水溶液であっ
て、酸濃度が 0.1〜8規定の範囲である請求項1記載の
高純度シリカの製造方法。
5. The high purity according to claim 1, wherein the acid-containing liquid is an aqueous solution of at least one acid selected from the group consisting of sulfuric acid, nitric acid and hydrochloric acid, and the acid concentration is in the range of 0.1 to 8 N. Method for producing silica.
【請求項6】 酸が、塩酸, 硝酸, 硫酸, 炭酸などの無
機酸、およびギ酸,酢酸などの有機酸からなる群から選
ばれた少なくとも一種の酸である請求項1記載の高純度
シリカの製造方法。
6. The high-purity silica according to claim 1, wherein the acid is at least one acid selected from the group consisting of inorganic acids such as hydrochloric acid, nitric acid, sulfuric acid and carbonic acid, and organic acids such as formic acid and acetic acid. Production method.
【請求項7】 前記の水洗滌の少なくとも最終段階にお
ける洗滌用水が、30〜300 ppm の硫酸を含む水である請
求項1記載の高純度シリカの製造方法。
7. The method for producing high-purity silica according to claim 1, wherein the washing water in at least the final stage of the washing with water is water containing 30 to 300 ppm of sulfuric acid.
【請求項8】 前記最終段階の洗滌処理の後、洗滌水と
分離された非晶質シリカが、30〜300 ppm の硫酸を含む
ものである請求項1記載の高純度シリカの製造方法。
8. The method for producing high-purity silica according to claim 1, wherein the amorphous silica separated from the washing water after the final washing step contains 30 to 300 ppm of sulfuric acid.
【請求項9】 加熱処理を、温度 800〜1400℃の範囲で
行う請求項1記載の高純度シリカの製造方法。
9. The method for producing high-purity silica according to claim 1, wherein the heat treatment is performed at a temperature of 800 to 1400 ° C.
JP33288294A 1994-12-15 1994-12-15 Method for producing high purity silica Expired - Lifetime JP3722860B2 (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007026680A1 (en) * 2005-08-31 2007-03-08 Kurimoto, Ltd. Amorphous silicon oxide powder and method for production thereof
JP2012207112A (en) * 2011-03-29 2012-10-25 Admatechs Co Ltd Composition for surface coat
JP2013209243A (en) * 2012-03-30 2013-10-10 Taiheiyo Cement Corp Method for producing high purity silica
CN113955760A (en) * 2021-10-22 2022-01-21 福建思科硅材料有限公司 White carbon black preparation equipment and process

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007026680A1 (en) * 2005-08-31 2007-03-08 Kurimoto, Ltd. Amorphous silicon oxide powder and method for production thereof
US8178067B2 (en) 2005-08-31 2012-05-15 Kurimoto, Ltd. Method of making amorphous silicon powder
JP5100385B2 (en) * 2005-08-31 2012-12-19 勝義 近藤 Method for producing amorphous silicon oxide powder
JP2012207112A (en) * 2011-03-29 2012-10-25 Admatechs Co Ltd Composition for surface coat
JP2013209243A (en) * 2012-03-30 2013-10-10 Taiheiyo Cement Corp Method for producing high purity silica
CN113955760A (en) * 2021-10-22 2022-01-21 福建思科硅材料有限公司 White carbon black preparation equipment and process

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