JPH0784358B2 - シリコン融液からのデンドライトウエブ引き上げ装置 - Google Patents
シリコン融液からのデンドライトウエブ引き上げ装置Info
- Publication number
- JPH0784358B2 JPH0784358B2 JP60242559A JP24255985A JPH0784358B2 JP H0784358 B2 JPH0784358 B2 JP H0784358B2 JP 60242559 A JP60242559 A JP 60242559A JP 24255985 A JP24255985 A JP 24255985A JP H0784358 B2 JPH0784358 B2 JP H0784358B2
- Authority
- JP
- Japan
- Prior art keywords
- silicon
- crucible
- web
- barrier
- melt
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/02—Single-crystal growth by pulling from a melt, e.g. Czochralski method adding crystallising materials or reactants forming it in situ to the melt
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/10—Crucibles or containers for supporting the melt
- C30B15/12—Double crucible methods
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
- Recrystallisation Techniques (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US66606684A | 1984-10-29 | 1984-10-29 | |
US666066 | 1984-10-29 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61174188A JPS61174188A (ja) | 1986-08-05 |
JPH0784358B2 true JPH0784358B2 (ja) | 1995-09-13 |
Family
ID=24672685
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP60242559A Expired - Lifetime JPH0784358B2 (ja) | 1984-10-29 | 1985-10-28 | シリコン融液からのデンドライトウエブ引き上げ装置 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JPH0784358B2 (da) |
DE (1) | DE3534807A1 (da) |
FR (1) | FR2572424B1 (da) |
GB (1) | GB2166062B (da) |
IN (1) | IN161924B (da) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2198966A (en) * | 1986-12-09 | 1988-06-29 | Westinghouse Electric Corp | Method of growing silicon dendritic-web crystals |
IN168114B (da) * | 1986-12-18 | 1991-02-09 | Westinghouse Electric Corp | |
US4747774A (en) * | 1987-02-09 | 1988-05-31 | Westinghouse Electric Corp. | Conforming crucible/susceptor system for silicon crystal growth |
DE3733487C2 (de) * | 1987-10-03 | 1997-08-14 | Leybold Ag | Vorrichtung zum Ziehen von Einkristallen |
DE3840445C2 (de) * | 1987-12-03 | 1996-08-14 | Toshiba Ceramics Co | Vorrichtung und Verfahren zum Ziehen eines Einkristalls |
US4919901A (en) * | 1987-12-31 | 1990-04-24 | Westinghouse Electric Corp. | Barrier design for crucibles for silicon dendritic web growth |
EP0340941A1 (en) * | 1988-04-28 | 1989-11-08 | Nkk Corporation | Method and apparatus for manufacturing silicon single crystals |
JPH035392A (ja) * | 1989-05-30 | 1991-01-11 | Nkk Corp | シリコン単結晶の製造装置 |
AU632886B2 (en) * | 1990-01-25 | 1993-01-14 | Ebara Corporation | Melt replenishment system for dendritic web growth |
JP2585123B2 (ja) * | 1990-04-13 | 1997-02-26 | 東芝セラミックス株式会社 | シリコン単結晶の製造方法 |
BR9203110A (pt) | 1992-08-12 | 1994-03-01 | Petroleo Brasileiro Sa | Composicao catalitica passivadora para o craqueamento de hidrocarbonetos,alumina e processo de craqueamento catalitico fluido |
JP2010208869A (ja) * | 2009-03-06 | 2010-09-24 | Sharp Corp | 多結晶体または単結晶体の製造装置および製造方法 |
JP5923700B1 (ja) * | 2015-11-30 | 2016-05-25 | 並木精密宝石株式会社 | 大型efg法用育成炉の蓋体構造 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2152801A1 (de) * | 1970-11-09 | 1972-05-10 | Little Inc A | Verfahren und Ofen zum Ziehen von Kristallen gleichförmiger Zusammensetzung nach dem Czochralski-Verfahren |
US4036595A (en) * | 1975-11-06 | 1977-07-19 | Siltec Corporation | Continuous crystal growing furnace |
JPS5373481A (en) * | 1976-12-13 | 1978-06-29 | Nippon Telegr & Teleph Corp <Ntt> | Continuous preparation apparatus for sheet crystal |
US4389377A (en) * | 1981-07-10 | 1983-06-21 | The United States Of America As Represented By The United States Department Of Energy | Apparatus for growing a dendritic web |
JPS58130195A (ja) * | 1982-01-27 | 1983-08-03 | Toshiba Ceramics Co Ltd | 単結晶シリコン引上装置 |
-
1985
- 1985-09-25 IN IN679/CAL/85A patent/IN161924B/en unknown
- 1985-09-30 DE DE19853534807 patent/DE3534807A1/de not_active Ceased
- 1985-10-02 GB GB08524260A patent/GB2166062B/en not_active Expired
- 1985-10-09 FR FR8514957A patent/FR2572424B1/fr not_active Expired - Lifetime
- 1985-10-28 JP JP60242559A patent/JPH0784358B2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
GB8524260D0 (en) | 1985-11-06 |
JPS61174188A (ja) | 1986-08-05 |
GB2166062B (en) | 1988-02-17 |
FR2572424A1 (fr) | 1986-05-02 |
DE3534807A1 (de) | 1986-06-05 |
FR2572424B1 (fr) | 1991-01-11 |
IN161924B (da) | 1988-02-27 |
GB2166062A (en) | 1986-04-30 |
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