JPH0781069A - インキジェット印刷ヘッドのための複数の機能部分を有するノズル板およびその製造方法 - Google Patents
インキジェット印刷ヘッドのための複数の機能部分を有するノズル板およびその製造方法Info
- Publication number
- JPH0781069A JPH0781069A JP6205099A JP20509994A JPH0781069A JP H0781069 A JPH0781069 A JP H0781069A JP 6205099 A JP6205099 A JP 6205099A JP 20509994 A JP20509994 A JP 20509994A JP H0781069 A JPH0781069 A JP H0781069A
- Authority
- JP
- Japan
- Prior art keywords
- nozzle plate
- nozzle
- functional parts
- metal
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 18
- 238000007641 inkjet printing Methods 0.000 title claims 2
- 239000007788 liquid Substances 0.000 claims abstract description 43
- 239000002184 metal Substances 0.000 claims abstract description 25
- 229910052751 metal Inorganic materials 0.000 claims abstract description 25
- 239000004033 plastic Substances 0.000 claims abstract description 13
- 229920003023 plastic Polymers 0.000 claims abstract description 13
- 238000000034 method Methods 0.000 claims description 16
- 230000000295 complement effect Effects 0.000 claims description 5
- 238000000465 moulding Methods 0.000 claims description 4
- 238000010276 construction Methods 0.000 claims description 2
- 238000003860 storage Methods 0.000 claims description 2
- 230000001105 regulatory effect Effects 0.000 claims 1
- 238000007493 shaping process Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 abstract description 11
- 239000000126 substance Substances 0.000 abstract description 2
- 238000005266 casting Methods 0.000 abstract 3
- 238000010521 absorption reaction Methods 0.000 abstract 2
- 229910052710 silicon Inorganic materials 0.000 description 14
- 239000010703 silicon Substances 0.000 description 14
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 13
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 10
- 238000010438 heat treatment Methods 0.000 description 6
- 239000000853 adhesive Substances 0.000 description 5
- 230000001070 adhesive effect Effects 0.000 description 5
- 239000006096 absorbing agent Substances 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 4
- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000000975 dye Substances 0.000 description 3
- 238000005323 electroforming Methods 0.000 description 3
- 238000001746 injection moulding Methods 0.000 description 3
- 238000001459 lithography Methods 0.000 description 3
- 239000004926 polymethyl methacrylate Substances 0.000 description 3
- 238000005868 electrolysis reaction Methods 0.000 description 2
- 238000005304 joining Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- -1 polyethersulphones Polymers 0.000 description 2
- 229920002635 polyurethane Polymers 0.000 description 2
- 239000004814 polyurethane Substances 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
- 230000005469 synchrotron radiation Effects 0.000 description 2
- 229910000531 Co alloy Inorganic materials 0.000 description 1
- 229920000106 Liquid crystal polymer Polymers 0.000 description 1
- 239000004977 Liquid-crystal polymers (LCPs) Substances 0.000 description 1
- 229910003266 NiCo Inorganic materials 0.000 description 1
- 239000002202 Polyethylene glycol Substances 0.000 description 1
- 229910001297 Zn alloy Inorganic materials 0.000 description 1
- QXZUUHYBWMWJHK-UHFFFAOYSA-N [Co].[Ni] Chemical compound [Co].[Ni] QXZUUHYBWMWJHK-UHFFFAOYSA-N 0.000 description 1
- PDYXSJSAMVACOH-UHFFFAOYSA-N [Cu].[Zn].[Sn] Chemical compound [Cu].[Zn].[Sn] PDYXSJSAMVACOH-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- 238000004049 embossing Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000013532 laser treatment Methods 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 229920002492 poly(sulfone) Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 229920002530 polyetherether ketone Polymers 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 238000011282 treatment Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14032—Structure of the pressure chamber
- B41J2/1404—Geometrical characteristics
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/1433—Structure of nozzle plates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
- B41J2/1603—Production of bubble jet print heads of the front shooter type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/162—Manufacturing of the nozzle plates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1625—Manufacturing processes electroforming
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1632—Manufacturing processes machining
- B41J2/1634—Manufacturing processes machining laser machining
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1637—Manufacturing processes molding
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14387—Front shooter
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14403—Structure thereof only for on-demand ink jet heads including a filter
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S29/00—Metal working
- Y10S29/005—Method or apparatus with casting
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49401—Fluid pattern dispersing device making, e.g., ink jet
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/4998—Combined manufacture including applying or shaping of fluent material
- Y10T29/49982—Coating
- Y10T29/49984—Coating and casting
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/4998—Combined manufacture including applying or shaping of fluent material
- Y10T29/49988—Metal casting
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Geometry (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Micromachines (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE4329728A DE4329728A1 (de) | 1993-09-03 | 1993-09-03 | Düsenplatte für Fluidstrahl-Druckkopf und Verfahren zu deren Herstellung |
DE4329728.5 | 1993-09-03 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0781069A true JPH0781069A (ja) | 1995-03-28 |
Family
ID=6496729
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6205099A Pending JPH0781069A (ja) | 1993-09-03 | 1994-08-30 | インキジェット印刷ヘッドのための複数の機能部分を有するノズル板およびその製造方法 |
Country Status (6)
Country | Link |
---|---|
US (2) | US5588597A (de) |
EP (1) | EP0641657B1 (de) |
JP (1) | JPH0781069A (de) |
KR (1) | KR950008131A (de) |
CN (2) | CN1068280C (de) |
DE (2) | DE4329728A1 (de) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006272563A (ja) * | 2005-03-28 | 2006-10-12 | Sumitomo Bakelite Co Ltd | マイクロチャネル基板作製用鋳型の作製方法 |
JP2007046147A (ja) * | 2005-01-14 | 2007-02-22 | Seiko Instruments Inc | 電鋳型とその製造方法及び電鋳部品の製造方法 |
JP2010042683A (ja) * | 2003-09-24 | 2010-02-25 | Seiko Epson Corp | 液体噴射ヘッド及びその製造方法並びに液体噴射装置 |
JP2019520191A (ja) * | 2016-04-26 | 2019-07-18 | インターナショナル・ビジネス・マシーンズ・コーポレーションInternational Business Machines Corporation | 大スケール表面処理装置を有する垂直マイクロ流体プローブヘッド |
JP2019157113A (ja) * | 2018-03-08 | 2019-09-19 | 株式会社リコー | インクセット、画像形成装置、及び画像形成方法 |
Families Citing this family (45)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4329728A1 (de) * | 1993-09-03 | 1995-03-09 | Microparts Gmbh | Düsenplatte für Fluidstrahl-Druckkopf und Verfahren zu deren Herstellung |
US5818479A (en) * | 1993-09-03 | 1998-10-06 | Microparts Gmbh | Nozzle plate for a liquid jet print head |
US5992769A (en) * | 1995-06-09 | 1999-11-30 | The Regents Of The University Of Michigan | Microchannel system for fluid delivery |
KR100225082B1 (ko) * | 1997-01-15 | 1999-10-15 | 윤종용 | 프린트 헤드의 잉크 분사 장치 구조 |
EP1019696A4 (de) * | 1997-09-19 | 2003-07-23 | Aclara Biosciences Inc | Apparat und verfahren zum transfer von flüssigkeiten |
JP2957528B2 (ja) * | 1997-10-07 | 1999-10-04 | 株式会社東京機械製作所 | インクジェット印刷用ノズル、そのオリフィス部材及びオリフィス部材の製造方法 |
US6339881B1 (en) * | 1997-11-17 | 2002-01-22 | Xerox Corporation | Ink jet printhead and method for its manufacture |
US6209203B1 (en) * | 1998-01-08 | 2001-04-03 | Lexmark International, Inc. | Method for making nozzle array for printhead |
US6382777B1 (en) * | 1998-06-19 | 2002-05-07 | Canon Kabushiki Kaisha | Liquid jet recording head |
KR100325520B1 (ko) * | 1998-12-10 | 2002-04-17 | 윤종용 | 유체 분사 장치의 제조 방법_ |
US6416678B1 (en) | 1998-12-22 | 2002-07-09 | Xerox Corporation | Solid bi-layer structures for use with high viscosity inks in acoustic ink printing and methods of fabrication |
US6507001B1 (en) | 1999-01-19 | 2003-01-14 | Xerox Corporation | Nozzles for ink jet devices and laser ablating or precision injection molding methods for microfabrication of the nozzles |
US6161270A (en) * | 1999-01-29 | 2000-12-19 | Eastman Kodak Company | Making printheads using tapecasting |
JP2001113698A (ja) * | 1999-10-19 | 2001-04-24 | Nec Niigata Ltd | ノズルプレート及びその製造方法及びインクジェット記録ヘッド |
JP2003136728A (ja) * | 2001-11-05 | 2003-05-14 | Sony Corp | インクジェットプリントヘッド及びこれを備えたインクジェットプリンタ、並びにインクジェットプリントヘッドの製造方法 |
SE522623C2 (sv) * | 2001-09-19 | 2004-02-24 | Aamic Ab | Metod för tillverkning av munstycksplatta med miniatyrmunstycken, munstycksplatta med miniatyrmunstycken och skrivarhuvud av bläckstråletyp |
JP4249438B2 (ja) * | 2002-07-05 | 2009-04-02 | 日本ニュークローム株式会社 | 銅―錫合金めっき用ピロリン酸浴 |
US20040021741A1 (en) * | 2002-07-30 | 2004-02-05 | Ottenheimer Thomas H. | Slotted substrate and method of making |
US6666546B1 (en) | 2002-07-31 | 2003-12-23 | Hewlett-Packard Development Company, L.P. | Slotted substrate and method of making |
KR20040051879A (ko) * | 2002-12-13 | 2004-06-19 | 강신일 | 유리 성형용 초경합금제 마이크로 몰드인서트 및 그 제조방법 |
US7548775B2 (en) | 2003-10-21 | 2009-06-16 | The Regents Of The University Of Michigan | Intracranial neural interface system |
US7490405B2 (en) * | 2004-03-24 | 2009-02-17 | Fujifilm Corporation | Method for manufacturing a liquid droplet discharge head. |
JP4639718B2 (ja) * | 2004-09-22 | 2011-02-23 | セイコーエプソン株式会社 | 液体噴射ヘッドの圧力発生室形成板製造装置、液体噴射ヘッドの圧力発生室形成板製造方法及び液体噴射ヘッド |
BRPI0518779A2 (pt) * | 2004-12-01 | 2008-12-09 | Haldex Hydraulics Corp | sistema de acionamento hidrÁulico |
JP4362629B2 (ja) * | 2005-01-31 | 2009-11-11 | 独立行政法人産業技術総合研究所 | 一括転写型インクジェット用ノズルプレートの製造方法 |
US9014796B2 (en) | 2005-06-14 | 2015-04-21 | Regents Of The University Of Michigan | Flexible polymer microelectrode with fluid delivery capability and methods for making same |
EP1931419B1 (de) * | 2005-10-07 | 2016-08-10 | NeuroNexus Technologies, Inc. | Modulares mehrkanal-mikroelektrodenarray |
WO2007089738A2 (en) * | 2006-01-26 | 2007-08-09 | The Regents Of The University Of Michigan | Microelectrode with laterally extending platform for reduction of tissue encapsulation |
JP4577226B2 (ja) * | 2006-02-02 | 2010-11-10 | ソニー株式会社 | 液体吐出ヘッド及び液体吐出装置 |
US8877074B2 (en) * | 2006-12-15 | 2014-11-04 | The Regents Of The University Of California | Methods of manufacturing microdevices in laminates, lead frames, packages, and printed circuit boards |
US8731673B2 (en) | 2007-02-26 | 2014-05-20 | Sapiens Steering Brain Stimulation B.V. | Neural interface system |
US8565894B2 (en) * | 2007-10-17 | 2013-10-22 | Neuronexus Technologies, Inc. | Three-dimensional system of electrode leads |
US8224417B2 (en) * | 2007-10-17 | 2012-07-17 | Neuronexus Technologies, Inc. | Guide tube for an implantable device system |
US8958862B2 (en) | 2007-10-17 | 2015-02-17 | Neuronexus Technologies, Inc. | Implantable device including a resorbable carrier |
US8498720B2 (en) | 2008-02-29 | 2013-07-30 | Neuronexus Technologies, Inc. | Implantable electrode and method of making the same |
US9289142B2 (en) | 2008-03-24 | 2016-03-22 | Neuronexus Technologies, Inc. | Implantable electrode lead system with a three dimensional arrangement and method of making the same |
US20090240314A1 (en) * | 2008-03-24 | 2009-09-24 | Kong K C | Implantable electrode lead system with a three dimensional arrangement and method of making the same |
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-
1993
- 1993-09-03 DE DE4329728A patent/DE4329728A1/de not_active Withdrawn
-
1994
- 1994-07-29 DE DE59407762T patent/DE59407762D1/de not_active Expired - Fee Related
- 1994-07-29 EP EP94111846A patent/EP0641657B1/de not_active Expired - Lifetime
- 1994-08-30 US US08/297,780 patent/US5588597A/en not_active Expired - Fee Related
- 1994-08-30 JP JP6205099A patent/JPH0781069A/ja active Pending
- 1994-08-31 KR KR1019940021734A patent/KR950008131A/ko not_active Application Discontinuation
- 1994-09-02 CN CN94115646A patent/CN1068280C/zh not_active Expired - Fee Related
-
1996
- 1996-09-17 US US08/715,096 patent/US5809646A/en not_active Expired - Fee Related
-
2000
- 2000-01-25 CN CN00101197A patent/CN1264646A/zh active Pending
Cited By (7)
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JP2010042683A (ja) * | 2003-09-24 | 2010-02-25 | Seiko Epson Corp | 液体噴射ヘッド及びその製造方法並びに液体噴射装置 |
JP4735755B2 (ja) * | 2003-09-24 | 2011-07-27 | セイコーエプソン株式会社 | 液体噴射ヘッド及びその製造方法並びに液体噴射装置 |
JP2007046147A (ja) * | 2005-01-14 | 2007-02-22 | Seiko Instruments Inc | 電鋳型とその製造方法及び電鋳部品の製造方法 |
JP2006272563A (ja) * | 2005-03-28 | 2006-10-12 | Sumitomo Bakelite Co Ltd | マイクロチャネル基板作製用鋳型の作製方法 |
JP4513626B2 (ja) * | 2005-03-28 | 2010-07-28 | 住友ベークライト株式会社 | マイクロチャネル基板作製用鋳型の作製方法 |
JP2019520191A (ja) * | 2016-04-26 | 2019-07-18 | インターナショナル・ビジネス・マシーンズ・コーポレーションInternational Business Machines Corporation | 大スケール表面処理装置を有する垂直マイクロ流体プローブヘッド |
JP2019157113A (ja) * | 2018-03-08 | 2019-09-19 | 株式会社リコー | インクセット、画像形成装置、及び画像形成方法 |
Also Published As
Publication number | Publication date |
---|---|
US5809646A (en) | 1998-09-22 |
CN1068280C (zh) | 2001-07-11 |
EP0641657A1 (de) | 1995-03-08 |
DE59407762D1 (de) | 1999-03-18 |
DE4329728A1 (de) | 1995-03-09 |
KR950008131A (ko) | 1995-04-17 |
US5588597A (en) | 1996-12-31 |
CN1264646A (zh) | 2000-08-30 |
EP0641657B1 (de) | 1999-02-03 |
CN1112879A (zh) | 1995-12-06 |
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