CN1068280C - 一种喷墨打印机打印头用的喷嘴板 - Google Patents

一种喷墨打印机打印头用的喷嘴板 Download PDF

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CN1068280C
CN1068280C CN94115646A CN94115646A CN1068280C CN 1068280 C CN1068280 C CN 1068280C CN 94115646 A CN94115646 A CN 94115646A CN 94115646 A CN94115646 A CN 94115646A CN 1068280 C CN1068280 C CN 1068280C
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nozzle plate
nozzle
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N·于纳尔
R·-P·彼得斯
F·巴特尔斯
H·莱恩内克
F·F·诺克
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    • B41J2/135Nozzles
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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    • Y10S29/00Metal working
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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    • Y10T29/00Metal working
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    • Y10T29/49Method of mechanical manufacture
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    • Y10T29/49Method of mechanical manufacture
    • Y10T29/4998Combined manufacture including applying or shaping of fluent material
    • Y10T29/49988Metal casting

Abstract

一个喷嘴板具有用于喷墨打印头的多个功能区,该多个功能区包括喷嘴、墨腔、在墨腔和贮墨容器之间的连接通道,及适宜时还包括调节件,该功能区都通过一个型芯在一个模制步骤中模制成一个整块微型结构体。另外,为了提高打印质量,喷嘴板的功能区内可以包括过滤装置和流动结构。

Description

一种喷墨打印机打印头用的喷嘴板
本发明涉及一种喷墨打印机和彩色喷墨打印机所用打印头的喷嘴板。
本发明的目的是以更经济的方式生产这样的喷嘴板和装配有该喷嘴板的打印头,并且提高它们在打印速度和清晰度方面的功能。
喷墨打印头和彩色喷墨打印头的喷嘴板是广为人知的(惠普杂志(Hewlett-Packard Journal),1988年8月,第28-31页)(欧洲专利EP-495,663;EP 500,068);这种喷嘴板包括12至大约100个孔直径小至20微米的喷嘴。在每个喷嘴之前设有一个储墨腔,其通过特殊形状的通道与墨盒连通。一个装置与各喷嘴相连,用于喷射出体积为1至1000微微升的液滴。打印头经常是将墨盒与通常采用三块板结合在一起形成的,一块板是薄层结构,第二块板是带有输入通道和储墨腔的、用平板印刷术生产的塑料结构(通道板),和第三块包含有喷嘴的板(喷嘴板)。喷嘴板和通道板的制造以及将这些板组合在一起制成打印头都需要相当高的费用和很高的精度。
喷嘴板用例如由塑料件激光处理的方法生产。在其它方法中,采用的是导电基板,在其上特定部位设有不导电的塑料层。该不导电部位呈圆形,其间距相当于喷嘴板上喷嘴的规定间距。用电解法将金属镀覆到该基板上。此金属层比不导电层要厚,而且电解镀覆金属将不可避免地会越过不导电部位的边缘,出现在不导电层上。用这种方法,相对于平板印刷术生产的塑料层的不导电部位,可以使喷嘴直径较小。为了将喷嘴的截面积以及各喷嘴截面积的波动保持在规定的公差范围内,必须要应用复杂的制造和测量方法。在所述后一种生产方法中,孔的间距不可避免地要大于所生产板的厚度。由于稳定性的原因,该板必须有一个最小厚度值,因此孔间可能的最小间距受到限制,这样也使打印密度受到限制。
根据欧洲专利EP495,663,通道结构和喷嘴载体用铸造法来生产。喷嘴每次均用激光束单独打孔。通道结构和喷嘴用完全不同的方法分两步生产。另外,还需要精加工。这种方法也是非常复杂的。
因此本发明的目的是提供喷嘴板和通道板,用它们就可以用比较简单的方法将喷墨打印头装配起来,使其精度更高。
根据本发明,其目的是通过一个喷嘴板来实现的,该喷嘴板具有用于喷墨打印头的多个功能区,该多个功能区包括喷嘴、墨腔、在墨腔和贮墨容器之间的连接通道,及适宜时还包括调节件,该功能区都通过一个型芯在一个模制步骤中模制成一个整块微型结构体。另外,为了提高打印质量,喷嘴板的功能区内可以包括过滤装置和流动结构。其后,用语“区域功能”一般用以指喷嘴、墨腔、墨腔与贮墨容器之间连接通道,及如果适宜时,还指诸如调节件的喷嘴板的微型结构件。
微型结构的金属型芯在互补结构内包含喷嘴板的所有功能区,它可采用例如平版印刷术、最好是用有X射线照相的凹版印刷术和电蚀刻成型来生产。采用平版印刷术法还可以实现非圆形或非方形的喷嘴出口。该非圆形或非方形的喷嘴出口的截面形状可例如为三角形、矩形、梯形、五角形、六角形、七角形、八角形、多角形、椭圆形、星形、三叶形、四叶形、五叶形或多叶形。为此,使用一块金属基板,在其上覆盖有适当厚度的(正性或负性)X射线的第一抗层。透过其上带有X射线吸收装置的第一遮屏对该涂层进行照射,结果是使该第一抗层在照射部位的溶解性发生变化。对照射后的第一抗层进行显影时,其上保持溶解或成为溶解的区域均被去除掉。
随后,一般是覆盖适当厚度的第二X射线抗层,再透过第二遮屏用X射线对该抗层进行照射,所述第二遮屏上具有与第一遮屏上不同的吸收装置。对第二抗层进行显影后,用电解将某种金属镀覆在基板上的由塑料(抗层)构成的微型结构上,微型结构的所有凹坑中均完全充满金属。随后,金属继续镀覆,结果是用金属将整个微型结构覆盖。
将金属微型结构从基板上由塑料制成的微型结构上分离下来,就得到具有微型结构的金属型芯,它在互补结构上包含喷嘴板的所有功能区。
利用该型芯,具有微型结构的喷嘴板可以通过例如注模法在一个模制步骤中用塑料制成,成为一个带有所有功能区的整块微型结构体。
如果在注模法的模具内插入两块结构不同的型芯,就可以生产出在两侧均含有功能件的整体喷嘴板。图4所示为一种可以用此法生产的喷嘴板,它将喷嘴通道配置在板的两侧上,使打印密度翻倍和/或可使用两种不同的颜色。
除平版印刷术外,激光处理、精密机械加工和侵蚀技术等方法,以及这些方法的组合也可以用于生产型芯。喷嘴的截面形状还可以变化,例如,喷嘴可以制成其截面在流动方向上是逐渐减小的。这可以通过下述方法实现,例如:
一与表面上的垂直线成一个角度地照射抗层,或是
一在重叠的多个平面上多次使用平版印刷术,每次都用一个几何形状有所变化的遮屏,或是
一适当地改变曝光和显影参数。
确实,型芯的制作需要很高的精度而且可能是非常复杂的,因为在这种情况下,功能区相互间的布置需要调整。但是,这种努力是值得的,因为它只是在制造型芯时才需要。喷嘴板本身则可用大量复制的方法低成本地进行生产,无需额外支出,而在实际上具有同型芯一样的精度。
塑料制成的喷嘴板可以利用金属型芯通过注模法、反应模塑法或模压加工法进行生产。这些方法可以低成本大批量地生产喷嘴板。金属的喷嘴板也可以通过如上所述的方法以低成本生产塑料制成的阴模来进行生产。为此,与上述制作型芯的过程类似,该阴模在电镀成型工艺中转变成具有所需喷嘴孔和功能件的金属结构。
用塑料制成的喷嘴板可例如由:聚砜、聚醚砜或聚甲基丙烯酸甲脂、聚碳酸脂或聚醚醚酮或液晶聚合物制成。
用金属制成的喷嘴板可例如由:镍或镍或铜/镍合金或铜/锡/锌合金,这样的喷嘴板或直接插入或带有覆盖层。
本发明具有以下优点:
喷嘴板具有多个功能区,便于打印头的生产,特别是因为需要装配的单个零件很少。
通过型芯进行铸造,即使是结构非常复杂的喷嘴板也能以低成本大量地生产,且粗度很高。
这种方法有很高的结构溶解度,且允许功能区有很高的充填密度。具有大纵横比的结构,实际上任何所需的形状均能生产。
该喷嘴板允许使用高的打印速度,而且特别适用于有多种颜色的打印头。
功能区相互之间复杂的调整只是在制作型芯时才需要。
制造步骤数量和零件品种减少,结果生产率提高,同时,用于质量管理的费用也减少。
通过采用非圆或非方的喷嘴出口,可以实现对液滴分散程度的控制和获得稳定的作用方向。
本方法非常灵活,且可以用多种材料生产结构上有很大差异的喷嘴板。
喷嘴板的功能区可以紧凑布置。
喷嘴的间距可以小于板厚的十分之一。
下面通过具体实施例并参照附图对本发明的结构、方法及特点作更详细的说明。其中:
图1表示一个制作喷嘴板用的型芯的成型步骤及其结构的示意图;
图2表示一个喷嘴板及一个对置板的示意图;
图3表示喷嘴板与对置板组合之前的立体示意图,其中表明嘴嘴处的局部放大图;和
图4表示另一种结构布置的喷嘴板的轴测示意图。
图1示出用平版印刷术和电沉积法(电镀成型)生产型芯的主要步骤。在金属基板1上有第一抗层(光致抗蚀层)2,它为负性光致抗蚀剂。该负性光致抗蚀剂在未经光照射状态下是可溶解的,但经光照射后则变成不可溶解。该第一抗层受到透过第一遮屏3的平行光照射。该抗层的厚度相当于所要生产的结构的厚度。第一遮屏上有吸收装置4,该装置遮住位于其下的第一抗层的区域5。将第一抗层2上未经照射的部分去除后,覆盖上第二抗层6,该第二抗层也是负性光致抗蚀剂。该第而抗层填满第一抗层中的凹穴并覆盖第一抗层中的所有微型结构,然后,透过第二遮屏7对该两抗层进行照射。第二遮屏上有吸收装置8,其遮住位于其下的两个抗层的区域9。将第二抗层6未经照射的部分9以及进入到已去除第一抗层区域的材料除去后,就得到一个结构,该结构相当于喷嘴板的结构。已去除抗层的区域通过电解镀覆用金属(例如Ni、NiCo、Cu)充满,且使整个区域用金属层10覆盖住。将该金属层与基板和残留的抗层材料进行分离之后,就得到金属型芯11,该型芯的结构与喷嘴板的结构是互补的。利用型芯11进行铸造,就可生产出由塑料制成的喷嘴板12,该喷嘴板由喷嘴13和其它功能区14组成。
作为实施例,图2示出有一个喷嘴板12,其上带有喷嘴13、墨槽15、墨腔16、和用于固定对置板18上的调节部件的缺口17。该对置板18例如由硅构成,且其上有呈薄层结构的加热件19,该加热元件位于每个喷嘴的背面,液滴就靠它喷射出去。板18具有入墨口20和嵌入缺口17内的销栓21。
图3所示为喷嘴板12在与硅板18组装之前从上方看去的视图。该硅板上带有多个带电源导线的加热件19和具有入墨口20。喷嘴13呈两排布置,示于喷嘴板12的上侧。另外,还示出一个局部放大图,该图表明喷嘴板12的下侧细节。在其上可以看到有多个喷嘴13、墨槽15和各喷嘴用的墨腔16以及多个使墨槽与各个墨腔相连通的通墨道22。
喷嘴板12采用粘结、焊接或其它方式与硅板18连接在一起。
图4示出一个与两块硅板(未示出)装配在一起之前的整体式喷嘴板23;硅板上有用于各个喷嘴的加热件及其电连接件。位于各个喷嘴口24前方的是一个圆形墨腔25,它通过喷嘴通道26与墨槽27相连通。该喷嘴板在每一侧上有一排喷嘴;两排喷嘴相互间是偏置的。这种提供给双色打印头的喷嘴板在板的每一侧有一个墨槽,两个墨槽相互间是不连通的。另外,该喷嘴板在每一侧都有调节销栓28,以用于与两块硅板进行精密地装配。
实施例1:用于制作有轴向喷墨的喷嘴板用的型芯的方法
为了生产型芯,在铜制的基板(10毫米厚、约100毫米宽和约100毫米长)上施加一层100微米厚的聚甲基丙烯酸甲酯(PMMA)抗层。该抗层是正性光致抗蚀剂,该正性光致抗蚀剂在未经照射下是不可溶解的,但经照射后则变成可以溶解。该抗层透过第一X射线遮屏用同步加速器射线对该抗层进行照射。第一遮屏的结构形状与喷嘴板的结构配对。通过X射线照射,第一抗层经光照的区域变成可溶解的。通过第一遮屏照射过的区域用GG显影剂除去。
随后,将已经去除第一抗层的区域用镍充满,且将整块板用50微米厚的PMMA抗层覆盖住。透过第二X射线遮屏用同步加速器射线对该抗层进行照射。第二遮屏的结构在形状上与通道板的结构和第一遮屏的结构相配对。通过X射线照射,第二抗层经照射的区域成为可溶解的,由于有目标的放射剂量的累积,其深度约65微米。第二抗层透过第二遮屏受到照射的区域用如记载在美国专利第4,393,129号的GG显影剂除去。
用电解将镍镀覆在已经去除抗层的区域中,且将整块板用约8微米厚的镍层覆盖。第一平面的镍结构起电触点的作用。
将铜制的基板切掉,用聚乙二醇将两个抗层的残留物除去。这样就得到其结构与喷嘴和通道板的结构互补的型芯。
实施例2:带轴向喷墨的打印头用的喷嘴
利用根据实施例1的型芯所制作的喷嘴板包括有108个喷嘴,其呈两排布置,其直径为50微米,喷嘴长度为100微米。墨腔位于喷嘴下方深50微米且宽70微米处。墨槽同样是50微米深。通墨道中最窄处为大约30微米宽。
此整体式喷嘴板与硅板粘在一起,硅板上包括各喷嘴用的加热件、其电接线和入墨口。所用的粘合剂是聚氨酯粘合剂。
实施例3:用于板平面喷墨的打印头的喷嘴板。
利用根据实施例1的两个型芯制作的整体式喷嘴板在其两侧总共有216个喷嘴。各侧的喷嘴间距为84微米。现款排喷嘴相互间错位42微米。喷嘴通道在最窄处的尺寸是40微米宽和40微米深。位于喷嘴前面的墨腔直径是60微米,墨腔之间的壁厚是24微米。通墨道的最窄部分是20微米宽。
此整体式喷嘴板在其两侧均与一个硅板相粘接,硅板上含有各喷嘴用的加热件及其电接线。所用的粘合剂是聚氨酯粘合剂。
对于单色打印头,只在一侧的硅板上有入墨口和在喷嘴板的墨槽中则有一条通墨道。
对于双色打印头,可以采取两块硅板每块均设有一个供墨装置,在这种情况下,喷嘴板的墨槽中不需要有开口。

Claims (7)

1.一种用于喷墨打印头的具有多个功能区的喷嘴板,所述多个功能区包括喷嘴、墨腔、在墨腔和贮墨容器之间的连接通道,其特征在于:所述功能区都通过一个型芯在一个模制步骤中模制成一个整块微型结构体。
2.根据权利要求1所述的喷嘴板,其特征在于:所述多个功能区还包括所述喷嘴板的整块微型结构件如整块调节件,所述整块调节件通过一个型芯在与其它功能区同一的模制步骤中模制而成。
3.根据权利要求2所述的喷嘴板,其特征在于:所述喷嘴相互间的间距小于所述喷嘴板的厚度。
4.根据权利要求1至3中任意一项所述的喷嘴板,其特征在于:所述喷嘴板由塑料制成。
5.根据权利要求4所述的喷嘴板,其特征在于:所述塑料为聚砜或聚醚砜或聚甲基丙烯酸甲酯或聚碳酸酯或聚醚醚酮或液晶聚合物。
6.根据权利要求1至3中任意一项所述的喷嘴板,其特征在于:所述喷嘴板由金属制成。
7.根据权利要求6所述的喷嘴板,其特征在于:所述金属为镍或铜或镍/铜合金或铜/锡/锌合金。
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