JPH077114Y2 - 把持装置 - Google Patents

把持装置

Info

Publication number
JPH077114Y2
JPH077114Y2 JP1989131408U JP13140889U JPH077114Y2 JP H077114 Y2 JPH077114 Y2 JP H077114Y2 JP 1989131408 U JP1989131408 U JP 1989131408U JP 13140889 U JP13140889 U JP 13140889U JP H077114 Y2 JPH077114 Y2 JP H077114Y2
Authority
JP
Japan
Prior art keywords
arms
article
gripping
center
gripped
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989131408U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0368794U (enrdf_load_html_response
Inventor
和男 久保田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP1989131408U priority Critical patent/JPH077114Y2/ja
Publication of JPH0368794U publication Critical patent/JPH0368794U/ja
Application granted granted Critical
Publication of JPH077114Y2 publication Critical patent/JPH077114Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1989131408U 1989-11-09 1989-11-09 把持装置 Expired - Lifetime JPH077114Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989131408U JPH077114Y2 (ja) 1989-11-09 1989-11-09 把持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989131408U JPH077114Y2 (ja) 1989-11-09 1989-11-09 把持装置

Publications (2)

Publication Number Publication Date
JPH0368794U JPH0368794U (enrdf_load_html_response) 1991-07-08
JPH077114Y2 true JPH077114Y2 (ja) 1995-02-22

Family

ID=31678918

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989131408U Expired - Lifetime JPH077114Y2 (ja) 1989-11-09 1989-11-09 把持装置

Country Status (1)

Country Link
JP (1) JPH077114Y2 (enrdf_load_html_response)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5570948B2 (ja) * 2010-11-02 2014-08-13 株式会社アルバック 基板縦方向揺動装置、基板ステージ装置及びイオン注入装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6367090U (enrdf_load_html_response) * 1986-10-20 1988-05-06

Also Published As

Publication number Publication date
JPH0368794U (enrdf_load_html_response) 1991-07-08

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