JPH0754638Y2 - 真空ポンプ - Google Patents

真空ポンプ

Info

Publication number
JPH0754638Y2
JPH0754638Y2 JP1990042995U JP4299590U JPH0754638Y2 JP H0754638 Y2 JPH0754638 Y2 JP H0754638Y2 JP 1990042995 U JP1990042995 U JP 1990042995U JP 4299590 U JP4299590 U JP 4299590U JP H0754638 Y2 JPH0754638 Y2 JP H0754638Y2
Authority
JP
Japan
Prior art keywords
blade
vacuum pump
moving blade
stationary blade
stationary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990042995U
Other languages
English (en)
Japanese (ja)
Other versions
JPH046591U (enrdf_load_stackoverflow
Inventor
昭民 金子
知明 岡村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP1990042995U priority Critical patent/JPH0754638Y2/ja
Publication of JPH046591U publication Critical patent/JPH046591U/ja
Application granted granted Critical
Publication of JPH0754638Y2 publication Critical patent/JPH0754638Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Non-Positive Displacement Air Blowers (AREA)
JP1990042995U 1990-04-24 1990-04-24 真空ポンプ Expired - Lifetime JPH0754638Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990042995U JPH0754638Y2 (ja) 1990-04-24 1990-04-24 真空ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990042995U JPH0754638Y2 (ja) 1990-04-24 1990-04-24 真空ポンプ

Publications (2)

Publication Number Publication Date
JPH046591U JPH046591U (enrdf_load_stackoverflow) 1992-01-21
JPH0754638Y2 true JPH0754638Y2 (ja) 1995-12-18

Family

ID=31555029

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990042995U Expired - Lifetime JPH0754638Y2 (ja) 1990-04-24 1990-04-24 真空ポンプ

Country Status (1)

Country Link
JP (1) JPH0754638Y2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6228839B2 (ja) * 2013-12-26 2017-11-08 エドワーズ株式会社 真空排気機構、複合型真空ポンプ、および回転体部品
EP4123182A1 (de) * 2022-12-01 2023-01-25 Pfeiffer Vacuum Technology AG Vakuumpumpe und verfahren zur herstellung eines statorbauteils für einen stator einer vakuumpumpe

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63128287U (enrdf_load_stackoverflow) * 1987-02-16 1988-08-22

Also Published As

Publication number Publication date
JPH046591U (enrdf_load_stackoverflow) 1992-01-21

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term