JPH0754286Y2 - 蒸着用プラネタ - Google Patents

蒸着用プラネタ

Info

Publication number
JPH0754286Y2
JPH0754286Y2 JP6811590U JP6811590U JPH0754286Y2 JP H0754286 Y2 JPH0754286 Y2 JP H0754286Y2 JP 6811590 U JP6811590 U JP 6811590U JP 6811590 U JP6811590 U JP 6811590U JP H0754286 Y2 JPH0754286 Y2 JP H0754286Y2
Authority
JP
Japan
Prior art keywords
semiconductor wafer
planetar
vapor deposition
planetary
holding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP6811590U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0429654U (OSRAM
Inventor
捨男 小川
Original Assignee
関西日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 関西日本電気株式会社 filed Critical 関西日本電気株式会社
Priority to JP6811590U priority Critical patent/JPH0754286Y2/ja
Publication of JPH0429654U publication Critical patent/JPH0429654U/ja
Application granted granted Critical
Publication of JPH0754286Y2 publication Critical patent/JPH0754286Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP6811590U 1990-06-27 1990-06-27 蒸着用プラネタ Expired - Lifetime JPH0754286Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6811590U JPH0754286Y2 (ja) 1990-06-27 1990-06-27 蒸着用プラネタ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6811590U JPH0754286Y2 (ja) 1990-06-27 1990-06-27 蒸着用プラネタ

Publications (2)

Publication Number Publication Date
JPH0429654U JPH0429654U (OSRAM) 1992-03-10
JPH0754286Y2 true JPH0754286Y2 (ja) 1995-12-18

Family

ID=31602277

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6811590U Expired - Lifetime JPH0754286Y2 (ja) 1990-06-27 1990-06-27 蒸着用プラネタ

Country Status (1)

Country Link
JP (1) JPH0754286Y2 (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4002959B2 (ja) * 2004-06-25 2007-11-07 株式会社昭和真空 基板ドーム回転機構

Also Published As

Publication number Publication date
JPH0429654U (OSRAM) 1992-03-10

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