JPH0754286Y2 - 蒸着用プラネタ - Google Patents
蒸着用プラネタInfo
- Publication number
- JPH0754286Y2 JPH0754286Y2 JP6811590U JP6811590U JPH0754286Y2 JP H0754286 Y2 JPH0754286 Y2 JP H0754286Y2 JP 6811590 U JP6811590 U JP 6811590U JP 6811590 U JP6811590 U JP 6811590U JP H0754286 Y2 JPH0754286 Y2 JP H0754286Y2
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- planetar
- vapor deposition
- planetary
- holding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000007740 vapor deposition Methods 0.000 title claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 22
- 238000003825 pressing Methods 0.000 claims description 9
- 230000008020 evaporation Effects 0.000 claims description 6
- 238000001704 evaporation Methods 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 3
- 239000010409 thin film Substances 0.000 claims description 3
- 210000000078 claw Anatomy 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000008188 pellet Substances 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6811590U JPH0754286Y2 (ja) | 1990-06-27 | 1990-06-27 | 蒸着用プラネタ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6811590U JPH0754286Y2 (ja) | 1990-06-27 | 1990-06-27 | 蒸着用プラネタ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0429654U JPH0429654U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1992-03-10 |
| JPH0754286Y2 true JPH0754286Y2 (ja) | 1995-12-18 |
Family
ID=31602277
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6811590U Expired - Lifetime JPH0754286Y2 (ja) | 1990-06-27 | 1990-06-27 | 蒸着用プラネタ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0754286Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4002959B2 (ja) * | 2004-06-25 | 2007-11-07 | 株式会社昭和真空 | 基板ドーム回転機構 |
-
1990
- 1990-06-27 JP JP6811590U patent/JPH0754286Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0429654U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1992-03-10 |