JPH0527488Y2 - - Google Patents
Info
- Publication number
- JPH0527488Y2 JPH0527488Y2 JP1926289U JP1926289U JPH0527488Y2 JP H0527488 Y2 JPH0527488 Y2 JP H0527488Y2 JP 1926289 U JP1926289 U JP 1926289U JP 1926289 U JP1926289 U JP 1926289U JP H0527488 Y2 JPH0527488 Y2 JP H0527488Y2
- Authority
- JP
- Japan
- Prior art keywords
- retaining ring
- semiconductor wafer
- planet
- holding
- deposition source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 claims description 33
- 230000002093 peripheral effect Effects 0.000 claims description 14
- 238000007738 vacuum evaporation Methods 0.000 claims description 9
- 230000008021 deposition Effects 0.000 claims description 6
- 235000012431 wafers Nutrition 0.000 description 35
- 238000007740 vapor deposition Methods 0.000 description 11
- 239000002184 metal Substances 0.000 description 10
- 210000002105 tongue Anatomy 0.000 description 9
- 238000001704 evaporation Methods 0.000 description 6
- 230000008020 evaporation Effects 0.000 description 6
- 238000003466 welding Methods 0.000 description 6
- 210000000078 claw Anatomy 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 238000005498 polishing Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 239000008188 pellet Substances 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1926289U JPH0527488Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-02-20 | 1989-02-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1926289U JPH0527488Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-02-20 | 1989-02-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02110666U JPH02110666U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-09-04 |
| JPH0527488Y2 true JPH0527488Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1993-07-13 |
Family
ID=31234616
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1926289U Expired - Lifetime JPH0527488Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-02-20 | 1989-02-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0527488Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1989
- 1989-02-20 JP JP1926289U patent/JPH0527488Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH02110666U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-09-04 |