JPH0754284Y2 - 搬送型スパッタリング成膜装置 - Google Patents

搬送型スパッタリング成膜装置

Info

Publication number
JPH0754284Y2
JPH0754284Y2 JP1989013683U JP1368389U JPH0754284Y2 JP H0754284 Y2 JPH0754284 Y2 JP H0754284Y2 JP 1989013683 U JP1989013683 U JP 1989013683U JP 1368389 U JP1368389 U JP 1368389U JP H0754284 Y2 JPH0754284 Y2 JP H0754284Y2
Authority
JP
Japan
Prior art keywords
rails
main body
sputtering film
film forming
carriage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989013683U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02106456U (enrdf_load_stackoverflow
Inventor
岳雄 高橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP1989013683U priority Critical patent/JPH0754284Y2/ja
Publication of JPH02106456U publication Critical patent/JPH02106456U/ja
Application granted granted Critical
Publication of JPH0754284Y2 publication Critical patent/JPH0754284Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Physical Vapour Deposition (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
JP1989013683U 1989-02-08 1989-02-08 搬送型スパッタリング成膜装置 Expired - Lifetime JPH0754284Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989013683U JPH0754284Y2 (ja) 1989-02-08 1989-02-08 搬送型スパッタリング成膜装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989013683U JPH0754284Y2 (ja) 1989-02-08 1989-02-08 搬送型スパッタリング成膜装置

Publications (2)

Publication Number Publication Date
JPH02106456U JPH02106456U (enrdf_load_stackoverflow) 1990-08-23
JPH0754284Y2 true JPH0754284Y2 (ja) 1995-12-18

Family

ID=31224199

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989013683U Expired - Lifetime JPH0754284Y2 (ja) 1989-02-08 1989-02-08 搬送型スパッタリング成膜装置

Country Status (1)

Country Link
JP (1) JPH0754284Y2 (enrdf_load_stackoverflow)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4688777A (en) * 1985-11-01 1987-08-25 The Budd Company Pair of stacked springs for a railway car
JPS637165U (enrdf_load_stackoverflow) * 1986-06-25 1988-01-18
JPS6313307U (enrdf_load_stackoverflow) * 1986-07-14 1988-01-28
JPS6339161U (enrdf_load_stackoverflow) * 1986-08-26 1988-03-14

Also Published As

Publication number Publication date
JPH02106456U (enrdf_load_stackoverflow) 1990-08-23

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