JPH075425Y2 - 測定部の結露防止装置 - Google Patents

測定部の結露防止装置

Info

Publication number
JPH075425Y2
JPH075425Y2 JP1987187500U JP18750087U JPH075425Y2 JP H075425 Y2 JPH075425 Y2 JP H075425Y2 JP 1987187500 U JP1987187500 U JP 1987187500U JP 18750087 U JP18750087 U JP 18750087U JP H075425 Y2 JPH075425 Y2 JP H075425Y2
Authority
JP
Japan
Prior art keywords
test
constant temperature
cavity
dew condensation
board
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987187500U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0191267U (enrdf_load_stackoverflow
Inventor
義仁 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Advantest Corp
Original Assignee
Advantest Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corp filed Critical Advantest Corp
Priority to JP1987187500U priority Critical patent/JPH075425Y2/ja
Publication of JPH0191267U publication Critical patent/JPH0191267U/ja
Application granted granted Critical
Publication of JPH075425Y2 publication Critical patent/JPH075425Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1987187500U 1987-12-09 1987-12-09 測定部の結露防止装置 Expired - Lifetime JPH075425Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987187500U JPH075425Y2 (ja) 1987-12-09 1987-12-09 測定部の結露防止装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987187500U JPH075425Y2 (ja) 1987-12-09 1987-12-09 測定部の結露防止装置

Publications (2)

Publication Number Publication Date
JPH0191267U JPH0191267U (enrdf_load_stackoverflow) 1989-06-15
JPH075425Y2 true JPH075425Y2 (ja) 1995-02-08

Family

ID=31478648

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987187500U Expired - Lifetime JPH075425Y2 (ja) 1987-12-09 1987-12-09 測定部の結露防止装置

Country Status (1)

Country Link
JP (1) JPH075425Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014007084A1 (ja) * 2012-07-02 2014-01-09 東京エレクトロン株式会社 半導体検査システム及びインターフェース部の結露防止方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2535744Y2 (ja) * 1990-04-02 1997-05-14 株式会社アドバンテスト Ｉｃ試験装置
JP2544014Y2 (ja) * 1990-10-15 1997-08-13 株式会社アドバンテスト 恒温槽

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS613450U (ja) * 1984-06-13 1986-01-10 オリオン機械株式会社 恒温環境試験装置
JPS62163982A (ja) * 1986-01-14 1987-07-20 Mitsubishi Electric Corp 集積回路装置の低温測定装置
JPH0645910Y2 (ja) * 1987-09-30 1994-11-24 日立電子エンジニアリング株式会社 ソケットボードの結露防止装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014007084A1 (ja) * 2012-07-02 2014-01-09 東京エレクトロン株式会社 半導体検査システム及びインターフェース部の結露防止方法
CN104380450A (zh) * 2012-07-02 2015-02-25 东京毅力科创株式会社 半导体检查系统及接口部的结露防止方法

Also Published As

Publication number Publication date
JPH0191267U (enrdf_load_stackoverflow) 1989-06-15

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