JPH0191267U - - Google Patents
Info
- Publication number
- JPH0191267U JPH0191267U JP18750087U JP18750087U JPH0191267U JP H0191267 U JPH0191267 U JP H0191267U JP 18750087 U JP18750087 U JP 18750087U JP 18750087 U JP18750087 U JP 18750087U JP H0191267 U JPH0191267 U JP H0191267U
- Authority
- JP
- Japan
- Prior art keywords
- cavity
- dew condensation
- measuring section
- prevention device
- condensation prevention
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005494 condensation Effects 0.000 claims description 3
- 238000009833 condensation Methods 0.000 claims description 3
- 230000002265 prevention Effects 0.000 claims description 3
- 239000003566 sealing material Substances 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987187500U JPH075425Y2 (ja) | 1987-12-09 | 1987-12-09 | 測定部の結露防止装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987187500U JPH075425Y2 (ja) | 1987-12-09 | 1987-12-09 | 測定部の結露防止装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0191267U true JPH0191267U (enrdf_load_stackoverflow) | 1989-06-15 |
JPH075425Y2 JPH075425Y2 (ja) | 1995-02-08 |
Family
ID=31478648
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987187500U Expired - Lifetime JPH075425Y2 (ja) | 1987-12-09 | 1987-12-09 | 測定部の結露防止装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH075425Y2 (enrdf_load_stackoverflow) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03126052U (enrdf_load_stackoverflow) * | 1990-04-02 | 1991-12-19 | ||
JPH0464780U (enrdf_load_stackoverflow) * | 1990-10-15 | 1992-06-03 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014011373A (ja) * | 2012-07-02 | 2014-01-20 | Tokyo Electron Ltd | 半導体検査システム及びインターフェース部の結露防止方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS613450U (ja) * | 1984-06-13 | 1986-01-10 | オリオン機械株式会社 | 恒温環境試験装置 |
JPS62163982A (ja) * | 1986-01-14 | 1987-07-20 | Mitsubishi Electric Corp | 集積回路装置の低温測定装置 |
JPS6453977U (enrdf_load_stackoverflow) * | 1987-09-30 | 1989-04-03 |
-
1987
- 1987-12-09 JP JP1987187500U patent/JPH075425Y2/ja not_active Expired - Lifetime
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS613450U (ja) * | 1984-06-13 | 1986-01-10 | オリオン機械株式会社 | 恒温環境試験装置 |
JPS62163982A (ja) * | 1986-01-14 | 1987-07-20 | Mitsubishi Electric Corp | 集積回路装置の低温測定装置 |
JPS6453977U (enrdf_load_stackoverflow) * | 1987-09-30 | 1989-04-03 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03126052U (enrdf_load_stackoverflow) * | 1990-04-02 | 1991-12-19 | ||
JPH0464780U (enrdf_load_stackoverflow) * | 1990-10-15 | 1992-06-03 |
Also Published As
Publication number | Publication date |
---|---|
JPH075425Y2 (ja) | 1995-02-08 |