JPH0750679Y2 - サーモパイル型赤外線センサ - Google Patents
サーモパイル型赤外線センサInfo
- Publication number
- JPH0750679Y2 JPH0750679Y2 JP1526390U JP1526390U JPH0750679Y2 JP H0750679 Y2 JPH0750679 Y2 JP H0750679Y2 JP 1526390 U JP1526390 U JP 1526390U JP 1526390 U JP1526390 U JP 1526390U JP H0750679 Y2 JPH0750679 Y2 JP H0750679Y2
- Authority
- JP
- Japan
- Prior art keywords
- carbon film
- hard carbon
- infrared sensor
- substrate
- diaphragm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 229910021385 hard carbon Inorganic materials 0.000 claims description 12
- 239000000758 substrate Substances 0.000 claims description 10
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 239000006096 absorbing agent Substances 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910003481 amorphous carbon Inorganic materials 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- 230000004043 responsiveness Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
Landscapes
- Measuring Temperature Or Quantity Of Heat (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
- Radiation Pyrometers (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1526390U JPH0750679Y2 (ja) | 1990-02-20 | 1990-02-20 | サーモパイル型赤外線センサ |
| DE4102524A DE4102524C2 (de) | 1990-01-30 | 1991-01-29 | Infrarotsensor |
| US07/648,134 US5056929A (en) | 1990-01-30 | 1991-01-30 | Temperature compensation type infrared sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1526390U JPH0750679Y2 (ja) | 1990-02-20 | 1990-02-20 | サーモパイル型赤外線センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03109028U JPH03109028U (enrdf_load_html_response) | 1991-11-08 |
| JPH0750679Y2 true JPH0750679Y2 (ja) | 1995-11-15 |
Family
ID=31518581
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1526390U Expired - Lifetime JPH0750679Y2 (ja) | 1990-01-30 | 1990-02-20 | サーモパイル型赤外線センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0750679Y2 (enrdf_load_html_response) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4978501B2 (ja) * | 2008-02-14 | 2012-07-18 | 日本電気株式会社 | 熱型赤外線検出器及びその製造方法 |
| DE112011101444T5 (de) * | 2010-04-26 | 2013-04-11 | HME Co. Ltd. | Temperatursensoreinrichtung und Strahlungsthermometer, der diese Vorrichtung verwendet, Herstellungsverfahren für Temperatursensorvorrichtungen, Mehrlagen-Dünnfilm-Thermosäule, die einen Fotoresistfilm und ein Strahlungsthermometer unter Benutzung dieser Thermosäule verwendet, sowie Herstellungsverfahren einer mehrlagigen Dünnfilm-Thermosäule |
-
1990
- 1990-02-20 JP JP1526390U patent/JPH0750679Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH03109028U (enrdf_load_html_response) | 1991-11-08 |
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