JPH0749789Y2 - 電子ビ−ム露光装置 - Google Patents
電子ビ−ム露光装置Info
- Publication number
- JPH0749789Y2 JPH0749789Y2 JP1986178981U JP17898186U JPH0749789Y2 JP H0749789 Y2 JPH0749789 Y2 JP H0749789Y2 JP 1986178981 U JP1986178981 U JP 1986178981U JP 17898186 U JP17898186 U JP 17898186U JP H0749789 Y2 JPH0749789 Y2 JP H0749789Y2
- Authority
- JP
- Japan
- Prior art keywords
- piston rod
- wafer
- beam exposure
- cylinder
- electron beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Electron Beam Exposure (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986178981U JPH0749789Y2 (ja) | 1986-11-19 | 1986-11-19 | 電子ビ−ム露光装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986178981U JPH0749789Y2 (ja) | 1986-11-19 | 1986-11-19 | 電子ビ−ム露光装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6382935U JPS6382935U (US06168655-20010102-C00055.png) | 1988-05-31 |
JPH0749789Y2 true JPH0749789Y2 (ja) | 1995-11-13 |
Family
ID=31121623
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1986178981U Expired - Lifetime JPH0749789Y2 (ja) | 1986-11-19 | 1986-11-19 | 電子ビ−ム露光装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0749789Y2 (US06168655-20010102-C00055.png) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4802025B2 (ja) * | 2006-03-29 | 2011-10-26 | 株式会社ニューフレアテクノロジー | 基板のアース機構及び荷電粒子ビーム描画装置 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60167245A (ja) * | 1984-02-10 | 1985-08-30 | Hitachi Ltd | 試料保持装置 |
-
1986
- 1986-11-19 JP JP1986178981U patent/JPH0749789Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPS6382935U (US06168655-20010102-C00055.png) | 1988-05-31 |
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