JPH0746853Y2 - 差動排気系 - Google Patents

差動排気系

Info

Publication number
JPH0746853Y2
JPH0746853Y2 JP1990124960U JP12496090U JPH0746853Y2 JP H0746853 Y2 JPH0746853 Y2 JP H0746853Y2 JP 1990124960 U JP1990124960 U JP 1990124960U JP 12496090 U JP12496090 U JP 12496090U JP H0746853 Y2 JPH0746853 Y2 JP H0746853Y2
Authority
JP
Japan
Prior art keywords
space
gate valve
vacuum region
vacuum
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1990124960U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0480983U (enrdf_load_stackoverflow
Inventor
利治 畠中
雄一 藏谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP1990124960U priority Critical patent/JPH0746853Y2/ja
Publication of JPH0480983U publication Critical patent/JPH0480983U/ja
Application granted granted Critical
Publication of JPH0746853Y2 publication Critical patent/JPH0746853Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Sliding Valves (AREA)
  • Details Of Valves (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP1990124960U 1990-11-26 1990-11-26 差動排気系 Expired - Lifetime JPH0746853Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990124960U JPH0746853Y2 (ja) 1990-11-26 1990-11-26 差動排気系

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990124960U JPH0746853Y2 (ja) 1990-11-26 1990-11-26 差動排気系

Publications (2)

Publication Number Publication Date
JPH0480983U JPH0480983U (enrdf_load_stackoverflow) 1992-07-14
JPH0746853Y2 true JPH0746853Y2 (ja) 1995-10-25

Family

ID=31872586

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990124960U Expired - Lifetime JPH0746853Y2 (ja) 1990-11-26 1990-11-26 差動排気系

Country Status (1)

Country Link
JP (1) JPH0746853Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7278444B2 (en) * 2005-02-22 2007-10-09 Mks Instruments, Inc. Valve assembly having improved pump-down performance

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5839885A (ja) * 1981-08-31 1983-03-08 Shimadzu Corp パイプライン用ゲ−トバルブ
JPS58165584A (ja) * 1982-03-26 1983-09-30 Tokuda Seisakusho Ltd 真空排気装置

Also Published As

Publication number Publication date
JPH0480983U (enrdf_load_stackoverflow) 1992-07-14

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