JPH0737310Y2 - 熱処理炉 - Google Patents

熱処理炉

Info

Publication number
JPH0737310Y2
JPH0737310Y2 JP1987033687U JP3368787U JPH0737310Y2 JP H0737310 Y2 JPH0737310 Y2 JP H0737310Y2 JP 1987033687 U JP1987033687 U JP 1987033687U JP 3368787 U JP3368787 U JP 3368787U JP H0737310 Y2 JPH0737310 Y2 JP H0737310Y2
Authority
JP
Japan
Prior art keywords
tube
core tube
heat treatment
treatment furnace
annular body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987033687U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63140620U (enExample
Inventor
晃二 大西
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Co Ltd
Original Assignee
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Priority to JP1987033687U priority Critical patent/JPH0737310Y2/ja
Publication of JPS63140620U publication Critical patent/JPS63140620U/ja
Application granted granted Critical
Publication of JPH0737310Y2 publication Critical patent/JPH0737310Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1987033687U 1987-03-05 1987-03-05 熱処理炉 Expired - Lifetime JPH0737310Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987033687U JPH0737310Y2 (ja) 1987-03-05 1987-03-05 熱処理炉

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987033687U JPH0737310Y2 (ja) 1987-03-05 1987-03-05 熱処理炉

Publications (2)

Publication Number Publication Date
JPS63140620U JPS63140620U (enExample) 1988-09-16
JPH0737310Y2 true JPH0737310Y2 (ja) 1995-08-23

Family

ID=30841528

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987033687U Expired - Lifetime JPH0737310Y2 (ja) 1987-03-05 1987-03-05 熱処理炉

Country Status (1)

Country Link
JP (1) JPH0737310Y2 (enExample)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5426664A (en) * 1977-07-29 1979-02-28 Nec Corp Tool for heat treatment of semiconductor wafer
JPS59119031U (ja) * 1983-02-01 1984-08-11 セイコーインスツルメンツ株式会社 拡散装置

Also Published As

Publication number Publication date
JPS63140620U (enExample) 1988-09-16

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