JPS63140620U - - Google Patents
Info
- Publication number
- JPS63140620U JPS63140620U JP3368787U JP3368787U JPS63140620U JP S63140620 U JPS63140620 U JP S63140620U JP 3368787 U JP3368787 U JP 3368787U JP 3368787 U JP3368787 U JP 3368787U JP S63140620 U JPS63140620 U JP S63140620U
- Authority
- JP
- Japan
- Prior art keywords
- tube
- furnace core
- core tube
- scavenger
- furnace
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims 2
- 239000002516 radical scavenger Substances 0.000 claims 2
Landscapes
- Muffle Furnaces And Rotary Kilns (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987033687U JPH0737310Y2 (ja) | 1987-03-05 | 1987-03-05 | 熱処理炉 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987033687U JPH0737310Y2 (ja) | 1987-03-05 | 1987-03-05 | 熱処理炉 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63140620U true JPS63140620U (enExample) | 1988-09-16 |
| JPH0737310Y2 JPH0737310Y2 (ja) | 1995-08-23 |
Family
ID=30841528
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987033687U Expired - Lifetime JPH0737310Y2 (ja) | 1987-03-05 | 1987-03-05 | 熱処理炉 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0737310Y2 (enExample) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5426664A (en) * | 1977-07-29 | 1979-02-28 | Nec Corp | Tool for heat treatment of semiconductor wafer |
| JPS59119031U (ja) * | 1983-02-01 | 1984-08-11 | セイコーインスツルメンツ株式会社 | 拡散装置 |
-
1987
- 1987-03-05 JP JP1987033687U patent/JPH0737310Y2/ja not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5426664A (en) * | 1977-07-29 | 1979-02-28 | Nec Corp | Tool for heat treatment of semiconductor wafer |
| JPS59119031U (ja) * | 1983-02-01 | 1984-08-11 | セイコーインスツルメンツ株式会社 | 拡散装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0737310Y2 (ja) | 1995-08-23 |