JPH01145124U - - Google Patents

Info

Publication number
JPH01145124U
JPH01145124U JP1988042456U JP4245688U JPH01145124U JP H01145124 U JPH01145124 U JP H01145124U JP 1988042456 U JP1988042456 U JP 1988042456U JP 4245688 U JP4245688 U JP 4245688U JP H01145124 U JPH01145124 U JP H01145124U
Authority
JP
Japan
Prior art keywords
gas
tube
cap part
quartz tube
impurities
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1988042456U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988042456U priority Critical patent/JPH01145124U/ja
Publication of JPH01145124U publication Critical patent/JPH01145124U/ja
Pending legal-status Critical Current

Links

JP1988042456U 1988-03-30 1988-03-30 Pending JPH01145124U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988042456U JPH01145124U (enExample) 1988-03-30 1988-03-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988042456U JPH01145124U (enExample) 1988-03-30 1988-03-30

Publications (1)

Publication Number Publication Date
JPH01145124U true JPH01145124U (enExample) 1989-10-05

Family

ID=31268864

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988042456U Pending JPH01145124U (enExample) 1988-03-30 1988-03-30

Country Status (1)

Country Link
JP (1) JPH01145124U (enExample)

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