JPH01107124U - - Google Patents
Info
- Publication number
- JPH01107124U JPH01107124U JP1988001402U JP140288U JPH01107124U JP H01107124 U JPH01107124 U JP H01107124U JP 1988001402 U JP1988001402 U JP 1988001402U JP 140288 U JP140288 U JP 140288U JP H01107124 U JPH01107124 U JP H01107124U
- Authority
- JP
- Japan
- Prior art keywords
- quartz
- reaction tube
- semiconductor wafer
- tube
- deposition apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988001402U JPH01107124U (enExample) | 1988-01-08 | 1988-01-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988001402U JPH01107124U (enExample) | 1988-01-08 | 1988-01-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01107124U true JPH01107124U (enExample) | 1989-07-19 |
Family
ID=31201256
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988001402U Pending JPH01107124U (enExample) | 1988-01-08 | 1988-01-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01107124U (enExample) |
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1988
- 1988-01-08 JP JP1988001402U patent/JPH01107124U/ja active Pending