JPH073632Y2 - レーザｃｖｄ装置 - Google Patents

レーザｃｖｄ装置

Info

Publication number
JPH073632Y2
JPH073632Y2 JP1988052098U JP5209888U JPH073632Y2 JP H073632 Y2 JPH073632 Y2 JP H073632Y2 JP 1988052098 U JP1988052098 U JP 1988052098U JP 5209888 U JP5209888 U JP 5209888U JP H073632 Y2 JPH073632 Y2 JP H073632Y2
Authority
JP
Japan
Prior art keywords
laser
slit
thin film
opening
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988052098U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01156538U (enrdf_load_stackoverflow
Inventor
朗 上原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP1988052098U priority Critical patent/JPH073632Y2/ja
Publication of JPH01156538U publication Critical patent/JPH01156538U/ja
Application granted granted Critical
Publication of JPH073632Y2 publication Critical patent/JPH073632Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Electrodes Of Semiconductors (AREA)
JP1988052098U 1988-04-20 1988-04-20 レーザｃｖｄ装置 Expired - Lifetime JPH073632Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988052098U JPH073632Y2 (ja) 1988-04-20 1988-04-20 レーザｃｖｄ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988052098U JPH073632Y2 (ja) 1988-04-20 1988-04-20 レーザｃｖｄ装置

Publications (2)

Publication Number Publication Date
JPH01156538U JPH01156538U (enrdf_load_stackoverflow) 1989-10-27
JPH073632Y2 true JPH073632Y2 (ja) 1995-01-30

Family

ID=31278107

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988052098U Expired - Lifetime JPH073632Y2 (ja) 1988-04-20 1988-04-20 レーザｃｖｄ装置

Country Status (1)

Country Link
JP (1) JPH073632Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0834188B2 (ja) * 1989-03-31 1996-03-29 日本電気株式会社 レーザｃｖｄ方法およびレーザｃｖｄ装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0627334B2 (ja) * 1986-09-11 1994-04-13 日本電気株式会社 レ−ザ利用薄膜形成装置

Also Published As

Publication number Publication date
JPH01156538U (enrdf_load_stackoverflow) 1989-10-27

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