JPH0735395Y2 - スピンチャック - Google Patents

スピンチャック

Info

Publication number
JPH0735395Y2
JPH0735395Y2 JP10014690U JP10014690U JPH0735395Y2 JP H0735395 Y2 JPH0735395 Y2 JP H0735395Y2 JP 10014690 U JP10014690 U JP 10014690U JP 10014690 U JP10014690 U JP 10014690U JP H0735395 Y2 JPH0735395 Y2 JP H0735395Y2
Authority
JP
Japan
Prior art keywords
wafer
chuck plate
suction
chuck
movable piece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP10014690U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0459155U (enrdf_load_stackoverflow
Inventor
通弘 橋爪
Original Assignee
株式会社エンヤシステム
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社エンヤシステム filed Critical 株式会社エンヤシステム
Priority to JP10014690U priority Critical patent/JPH0735395Y2/ja
Publication of JPH0459155U publication Critical patent/JPH0459155U/ja
Application granted granted Critical
Publication of JPH0735395Y2 publication Critical patent/JPH0735395Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
  • Coating Apparatus (AREA)
JP10014690U 1990-09-27 1990-09-27 スピンチャック Expired - Fee Related JPH0735395Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10014690U JPH0735395Y2 (ja) 1990-09-27 1990-09-27 スピンチャック

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10014690U JPH0735395Y2 (ja) 1990-09-27 1990-09-27 スピンチャック

Publications (2)

Publication Number Publication Date
JPH0459155U JPH0459155U (enrdf_load_stackoverflow) 1992-05-21
JPH0735395Y2 true JPH0735395Y2 (ja) 1995-08-09

Family

ID=31842569

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10014690U Expired - Fee Related JPH0735395Y2 (ja) 1990-09-27 1990-09-27 スピンチャック

Country Status (1)

Country Link
JP (1) JPH0735395Y2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011138706A3 (en) * 2010-05-07 2012-04-12 Lam Research Ag Device for holding wafer shaped articles
CN107393855A (zh) * 2016-05-17 2017-11-24 上海新昇半导体科技有限公司 一种晶圆定位装置及方法

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001223194A (ja) * 1999-12-01 2001-08-17 Ses Co Ltd 枚葉式基板洗浄装置および基板洗浄システム
JP2001223195A (ja) * 1999-12-01 2001-08-17 Ses Co Ltd 枚葉式基板洗浄方法、枚葉式基板洗浄装置および基板洗浄システム
JP2002164318A (ja) * 2000-11-27 2002-06-07 Ishii Hyoki Corp 基板スピン装置
JP4488646B2 (ja) * 2001-04-23 2010-06-23 株式会社トプコン ウェーハ保持装置
JP4502260B2 (ja) * 2004-10-28 2010-07-14 株式会社ディスコ スピンナー洗浄装置及びダイシング装置
KR100829923B1 (ko) * 2006-08-30 2008-05-16 세메스 주식회사 스핀헤드 및 이를 이용하는 기판처리방법
JP2008258484A (ja) * 2007-04-06 2008-10-23 Tatsumo Kk ウェハクランプ装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011138706A3 (en) * 2010-05-07 2012-04-12 Lam Research Ag Device for holding wafer shaped articles
US9130002B2 (en) 2010-05-07 2015-09-08 Lam Research Ag Device for holding wafer shaped articles
CN107393855A (zh) * 2016-05-17 2017-11-24 上海新昇半导体科技有限公司 一种晶圆定位装置及方法

Also Published As

Publication number Publication date
JPH0459155U (enrdf_load_stackoverflow) 1992-05-21

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Legal Events

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