JPH0735383Y2 - 薄膜気相成長装置 - Google Patents
薄膜気相成長装置Info
- Publication number
- JPH0735383Y2 JPH0735383Y2 JP11076289U JP11076289U JPH0735383Y2 JP H0735383 Y2 JPH0735383 Y2 JP H0735383Y2 JP 11076289 U JP11076289 U JP 11076289U JP 11076289 U JP11076289 U JP 11076289U JP H0735383 Y2 JPH0735383 Y2 JP H0735383Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- susceptor
- heater
- temperature
- thin film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000010409 thin film Substances 0.000 title description 11
- 238000007740 vapor deposition Methods 0.000 title description 5
- 238000010438 heat treatment Methods 0.000 claims description 18
- 230000002093 peripheral effect Effects 0.000 description 14
- 239000010453 quartz Substances 0.000 description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 10
- 239000000498 cooling water Substances 0.000 description 8
- 238000009826 distribution Methods 0.000 description 7
- 239000007789 gas Substances 0.000 description 7
- 239000010408 film Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 4
- 229910052799 carbon Inorganic materials 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000001947 vapour-phase growth Methods 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 2
- 230000006698 induction Effects 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 241000255925 Diptera Species 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000002500 effect on skin Effects 0.000 description 1
- 229910021478 group 5 element Inorganic materials 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 150000004678 hydrides Chemical class 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11076289U JPH0735383Y2 (ja) | 1989-09-21 | 1989-09-21 | 薄膜気相成長装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11076289U JPH0735383Y2 (ja) | 1989-09-21 | 1989-09-21 | 薄膜気相成長装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0350325U JPH0350325U (enrdf_load_stackoverflow) | 1991-05-16 |
| JPH0735383Y2 true JPH0735383Y2 (ja) | 1995-08-09 |
Family
ID=31659281
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11076289U Expired - Fee Related JPH0735383Y2 (ja) | 1989-09-21 | 1989-09-21 | 薄膜気相成長装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0735383Y2 (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5009727B2 (ja) * | 2007-09-04 | 2012-08-22 | ヤック株式会社 | 給油キャップホルダー |
| JP2013093460A (ja) * | 2011-10-26 | 2013-05-16 | Ulvac Japan Ltd | 成膜装置 |
| JP5833429B2 (ja) * | 2011-12-20 | 2015-12-16 | スタンレー電気株式会社 | 半導体製造装置 |
-
1989
- 1989-09-21 JP JP11076289U patent/JPH0735383Y2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0350325U (enrdf_load_stackoverflow) | 1991-05-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |