JPH0734928Y2 - 処理物保持装置 - Google Patents
処理物保持装置Info
- Publication number
- JPH0734928Y2 JPH0734928Y2 JP1988095496U JP9549688U JPH0734928Y2 JP H0734928 Y2 JPH0734928 Y2 JP H0734928Y2 JP 1988095496 U JP1988095496 U JP 1988095496U JP 9549688 U JP9549688 U JP 9549688U JP H0734928 Y2 JPH0734928 Y2 JP H0734928Y2
- Authority
- JP
- Japan
- Prior art keywords
- rotation
- arm
- jig
- rotation axis
- revolving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988095496U JPH0734928Y2 (ja) | 1988-07-19 | 1988-07-19 | 処理物保持装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988095496U JPH0734928Y2 (ja) | 1988-07-19 | 1988-07-19 | 処理物保持装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0217553U JPH0217553U (nl) | 1990-02-05 |
JPH0734928Y2 true JPH0734928Y2 (ja) | 1995-08-09 |
Family
ID=31320164
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1988095496U Expired - Lifetime JPH0734928Y2 (ja) | 1988-07-19 | 1988-07-19 | 処理物保持装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0734928Y2 (nl) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2019210135A1 (en) * | 2018-04-28 | 2019-10-31 | Applied Materials, Inc. | In-situ wafer rotation for carousel processing chambers |
US11482436B2 (en) * | 2018-01-10 | 2022-10-25 | Lam Research Corporation | Rotational indexer with additional rotational axes |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005290425A (ja) * | 2004-03-31 | 2005-10-20 | Tdk Corp | スパッタ蒸着装置における基板の回転機構 |
CN112964277B (zh) * | 2021-03-05 | 2023-05-30 | 中国电子科技集团公司第四十八研究所 | 一种石英谐振子修平设备的多工位工件台 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59190359A (ja) * | 1983-01-19 | 1984-10-29 | マルチ−ア−ク・バキユ−ム・システムズ・インコ−ポレ−テツド | 真空蒸着装置の基体保持装置 |
-
1988
- 1988-07-19 JP JP1988095496U patent/JPH0734928Y2/ja not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59190359A (ja) * | 1983-01-19 | 1984-10-29 | マルチ−ア−ク・バキユ−ム・システムズ・インコ−ポレ−テツド | 真空蒸着装置の基体保持装置 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11482436B2 (en) * | 2018-01-10 | 2022-10-25 | Lam Research Corporation | Rotational indexer with additional rotational axes |
US11699610B2 (en) | 2018-01-10 | 2023-07-11 | Lam Research Corporation | Rotational indexer with additional rotational axes |
WO2019210135A1 (en) * | 2018-04-28 | 2019-10-31 | Applied Materials, Inc. | In-situ wafer rotation for carousel processing chambers |
US11798825B2 (en) | 2018-04-28 | 2023-10-24 | Applied Materials, Inc. | In-situ wafer rotation for carousel processing chambers |
Also Published As
Publication number | Publication date |
---|---|
JPH0217553U (nl) | 1990-02-05 |
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