JPH0733363Y2 - 荷電粒子ビーム電流検出装置 - Google Patents

荷電粒子ビーム電流検出装置

Info

Publication number
JPH0733363Y2
JPH0733363Y2 JP1989010054U JP1005489U JPH0733363Y2 JP H0733363 Y2 JPH0733363 Y2 JP H0733363Y2 JP 1989010054 U JP1989010054 U JP 1989010054U JP 1005489 U JP1005489 U JP 1005489U JP H0733363 Y2 JPH0733363 Y2 JP H0733363Y2
Authority
JP
Japan
Prior art keywords
beam current
sample
particle beam
electron beam
current
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1989010054U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02102650U (enExample
Inventor
秀人 古味
武 荒木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP1989010054U priority Critical patent/JPH0733363Y2/ja
Publication of JPH02102650U publication Critical patent/JPH02102650U/ja
Application granted granted Critical
Publication of JPH0733363Y2 publication Critical patent/JPH0733363Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP1989010054U 1989-01-31 1989-01-31 荷電粒子ビーム電流検出装置 Expired - Fee Related JPH0733363Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989010054U JPH0733363Y2 (ja) 1989-01-31 1989-01-31 荷電粒子ビーム電流検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989010054U JPH0733363Y2 (ja) 1989-01-31 1989-01-31 荷電粒子ビーム電流検出装置

Publications (2)

Publication Number Publication Date
JPH02102650U JPH02102650U (enExample) 1990-08-15
JPH0733363Y2 true JPH0733363Y2 (ja) 1995-07-31

Family

ID=31217370

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989010054U Expired - Fee Related JPH0733363Y2 (ja) 1989-01-31 1989-01-31 荷電粒子ビーム電流検出装置

Country Status (1)

Country Link
JP (1) JPH0733363Y2 (enExample)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6424353A (en) * 1987-07-21 1989-01-26 Yokogawa Electric Corp Charged beam measuring device

Also Published As

Publication number Publication date
JPH02102650U (enExample) 1990-08-15

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