JPH02102650U - - Google Patents

Info

Publication number
JPH02102650U
JPH02102650U JP1005489U JP1005489U JPH02102650U JP H02102650 U JPH02102650 U JP H02102650U JP 1005489 U JP1005489 U JP 1005489U JP 1005489 U JP1005489 U JP 1005489U JP H02102650 U JPH02102650 U JP H02102650U
Authority
JP
Japan
Prior art keywords
charged particle
magnetic sensors
particle beam
aligned
directions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1005489U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0733363Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989010054U priority Critical patent/JPH0733363Y2/ja
Publication of JPH02102650U publication Critical patent/JPH02102650U/ja
Application granted granted Critical
Publication of JPH0733363Y2 publication Critical patent/JPH0733363Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP1989010054U 1989-01-31 1989-01-31 荷電粒子ビーム電流検出装置 Expired - Fee Related JPH0733363Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989010054U JPH0733363Y2 (ja) 1989-01-31 1989-01-31 荷電粒子ビーム電流検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989010054U JPH0733363Y2 (ja) 1989-01-31 1989-01-31 荷電粒子ビーム電流検出装置

Publications (2)

Publication Number Publication Date
JPH02102650U true JPH02102650U (enExample) 1990-08-15
JPH0733363Y2 JPH0733363Y2 (ja) 1995-07-31

Family

ID=31217370

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989010054U Expired - Fee Related JPH0733363Y2 (ja) 1989-01-31 1989-01-31 荷電粒子ビーム電流検出装置

Country Status (1)

Country Link
JP (1) JPH0733363Y2 (enExample)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6424353A (en) * 1987-07-21 1989-01-26 Yokogawa Electric Corp Charged beam measuring device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6424353A (en) * 1987-07-21 1989-01-26 Yokogawa Electric Corp Charged beam measuring device

Also Published As

Publication number Publication date
JPH0733363Y2 (ja) 1995-07-31

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees