JPH0728112B2 - Manufacturing method of ceramic substrate having dividing groove - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to a method for manufacturing a ceramic substrate having a groove for division, and more particularly to a method for preventing cracks and breaks at the tip of the groove for division.

(Prior Art) When manufacturing a ceramic substrate used for many functional components or a ceramic substrate such as a package for a large-scale integrated circuit as an electronic component, a single ceramic green sheet is subjected to a large number of identical printings and perforations. A method is employed in which a dividing groove is provided in this, and after sintering, it is divided into a large number and mass-produced.

Conventionally, in the method of manufacturing a substrate having a groove for division, a means for attaching an acute-angled blade to a die to cut a required size of one ceramic green sheet and constructing a groove for division at the same time is used. Referring to FIG. 3 (a), reference numeral 1 is a ceramic generation type substrate obtained by cutting a ceramic green sheet into a required size, and 2 is a dividing groove cut in a V shape for cutting and dividing. It is cut to the end face of 1.

When constructing the dividing grooves in the ceramic green sheet as described above, cracks 3 may be generated from the V-shaped groove bottom at the end edge of the dividing groove 2 of the ceramic green sheet 1 as shown in the sectional view in FIG. Also, even if a crack does not occur during the construction of the groove, there is a problem that due to the stress at that time, during the resin removal baking or the main firing of the ceramic green sheet, a crack is likely to occur at the same time, which may lead to breakage. . Therefore, at present, in order to avoid the cracks and fractures as described above as much as possible, the dividing grooves are formed as shown in FIG.
Of the dividing groove 2'which does not reach the end face and ends internally, and the dividing groove 2 cut to the end face are used together, and the dividing groove 2'is manufactured in consideration of increasing the dividing groove 2'and decreasing the dividing groove 2 '. ing.

(Problems to be Solved by the Invention) Even if the above consideration is taken into consideration, as long as the dividing groove 2 extending to the end face of the ceramic generation type substrate 1 is constructed, the degree of danger is reduced, but the above is as above. There is a risk of cracks and fractures.

(Means and Actions for Solving Problems) The present invention has been made to solve the above problems, and is a ceramic generation type in which a ceramic green sheet is cut and at the same time a dividing groove 2 is constructed. At the time of constructing the groove, the peripheral end face of the substrate is rubbed with a solvent-impregnated sponge buff, the surface of the end face is softened by the frictional heat, and part of the tip of the V-shaped dividing groove is filled with the flow of the base material. A method of repairing the generated cracks and reinforcing it to prevent cracks and breakage from the groove portion during baking and main baking is adopted.

(Example) FIG. 1 (a) is a perspective view for explaining a method for manufacturing a ceramic substrate having a dividing groove according to the present invention, and FIG. 1 (b) is a circle A in FIG. 1 (a). FIG. 3 is an enlarged perspective view of the enclosed portion. As in FIG. 3 of the conventional example, 1 is a ceramic green sheet, alumina powder 96, flux (SiO ₂ , Ca).
O, MgO composition) 4, resin 8-12, plasticizer 4-6, solvent 20-
A raw sheet made of 30 slips by the doctor blade method was cut into the required dimensions (75 mm length × 75 mm width × 0.8 mm thickness), and at the same time, a V-shaped dividing groove was cut into 20 small substrates. 2 are constructed. When there is a crack, the crack is repaired, and at least the end surface 4 of the raw sheet processed as described above is buffed with a sponge buff in order to reinforce the crack. The surface is softened, and a part of the surface is welded to the groove end to fill the bottom of the groove. Reference numeral 5 indicates the portion filled in this way, which is indicated by hatching in FIG.

The raw sheet substrate prepared as described above was baked and placed on an alumina refractory setter at 1600 ° C. in the air and fired. When the cracks and breakages in the resin removing step and the firing step were compared between the above-mentioned example and a ceramic substrate manufactured by a conventional method to the same size as the example as a comparative example, the results shown in the following table were obtained.

In addition, at the time of buffing, it is more effective to spray a small amount of a solvent such as butyl carbidle or methyl ethyl ketone on the buff by spraying.

(Effects of the Invention) In the method of manufacturing a ceramic substrate having a dividing groove, the dividing groove is provided at the same time as the cutting of the ceramic green sheet according to the present invention, and the peripheral end surface of the cut ceramic green sheet is buffed. By repairing and reinforcing, cracks and fractures during baking and main baking could be prevented, and defects could be reduced.

[Brief description of drawings]

FIG. 1 (a) is a perspective view for explaining a method of manufacturing a ceramic substrate having a dividing groove according to the present invention, and FIG. 1 (b) is an enlarged view of a portion surrounded by a circle A in FIG. 1 (a). FIG. 2 is a perspective view, FIG. 2 is a cross-sectional view for explaining a crack generation state, and FIG. 3 is a perspective view for explaining a conventional method for manufacturing a ceramic substrate having a dividing groove. 1: Ceramic substrate, 2: Dividing groove.

Claims (1)

[Claims] 1. A method for manufacturing a ceramic substrate by baking and main-baking a ceramic green sheet in which dividing grooves are preliminarily constructed so as to be divided into a large number of small substrates,
A method for manufacturing a ceramic substrate having a dividing groove portion, wherein the peripheral end surface of the ceramic green sheet is buffed with a solvent-impregnated buff to repair and reinforce the end portion of the dividing groove.