JPS63184389A - Manufacture of ceramic substrate with breakable trench - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Detailed Description of the Invention] (Industrial Application Field) The present invention relates to a method of manufacturing a ceramic substrate provided with a dividing groove, and particularly relates to a method for preventing cracking and breakage at the tip of the dividing groove. .

(Prior art) When manufacturing ceramic substrates used in many functional parts and electronic components such as large-scale integrated circuit packages, a single green ceramic sheet is subjected to numerous identical printings and holes. A method has been adopted in which dividing grooves are formed in this, and after sintering, the material is divided into a large number of parts for mass production.

Conventionally, the manufacturing method of this substrate with grooves for dividing has adopted a method of attaching a sharp blade to a mold and simultaneously cutting a single raw ceramic sheet to a required size and simultaneously constructing grooves for dividing. To explain in Fig. 3 (A), 1 is a ceramic-formed substrate that has been cut into required dimensions from a raw ceramic sheet, and 2 is a dividing groove cut into a V-shape for cutting and dividing the ceramic-formed substrate. The cut is made to the end face of 1.

When forming the dividing grooves in the raw ceramic sheet as described above, cracks 3 may occur from the bottom of the V-shaped groove at the edge of the dividing groove a2 of the raw ceramic sheet 1, as shown in the cross-sectional view in FIG. Additionally, even if no cracks occur during groove construction, due to the stress at that time, cracks are likely to occur during resin removal baking or final firing of the raw ceramic sheet, which may lead to breakage. . Therefore, in order to avoid the above-mentioned cracks and breaks as much as possible, currently, the dividing grooves are formed into dividing grooves 2' that do not reach the end face of the ceramic forming substrate 1 but end inside the end face, as shown in FIG. 3(B). The dividing groove 2 is used in combination with the dividing groove 2 cut to
It is manufactured with consideration given to increasing the number of dividing grooves 2 and decreasing the number of dividing grooves 2.

(Problems to be Solved by the Invention) Even if the above considerations are taken into consideration, as long as the dividing groove 2 extending to the end face of the ceramic forming substrate 1 is provided, the above-mentioned problem may occur even though the degree of danger is reduced. There is a risk of cracking and breaking.

(Means and effects for solving the problems) The present invention has been made to solve the problems as described above, and is made by cutting a raw ceramic sheet and forming a ceramic raw material with dividing grooves 2 at the same time. By rubbing the peripheral edge surface of the substrate with a sponge buff impregnated with a solvent, the surface of the edge surface is softened by the frictional heat, and a part of the tip of the V-shaped dividing groove is filled with the flow of substrate. This method involves repairing cracks that have occurred and reinforcing the grooves to prevent cracks and breakage from occurring during baking and final firing.

(Example) FIG. 1(A) is a perspective view for explaining the manufacturing method of a ceramic substrate having dividing grooves according to the present invention, and FIG. 1(B) is a circle A in FIG. 1(A). It is an enlarged perspective view of the enclosed part, and 1 is a ceramic raw sheet as in the conventional example shown in FIG.
, CaO, MgO composition) 4, resin 8-12, plasticizer 4-
6. Cut a raw sheet made from a slip containing 20 to 30% solvent using the doctor blade method into the required dimensions (height 75mm x width 7
5 mm x 0.8 mm thick), and a V-shaped dividing groove 2 is provided so that there are 20 small substrates at the same time. Then, in order to repair the cracks if there are any cracks or to strengthen them even if there are no cracks, the end faces 4 of the raw sheet processed as described above are buffed with a sponge huff, and the friction between the end faces and the huffs causes the end faces to The surface softens and a portion of it welds to the groove ends and fills the bottom of the groove. 5 shows the part filled in this way, and Figure 1 (
b) is shown by hunting.

The raw sheet substrate produced as described above was baked and then placed on an alumina refractory center at 1600° C. in the air and fired. The results shown in the table below were obtained by comparing the cracks and breaks in the resin extraction process and firing process for the above example and a ceramic substrate manufactured by a conventional method to the same dimensions as the example as a comparative example.

In addition, during the huffing process, it is more effective if a small amount of a solvent such as butyl carbide or methyl ethyl ketone is sprayed onto the huff.

Note: In the above table, the numerator is the number of substrates where cracks or breaks have occurred, and the denominator is the number of substrates (effects of the invention). By constructing a groove and repairing and reinforcing the peripheral end surface of the cut raw ceramic sheet by huffing, it is possible to prevent cracks and breaks during baking and main firing, and reduce defects. was completed.

[Brief explanation of the drawing]

Figure 1 (a) is a perspective view for explaining the method of manufacturing a ceramic substrate having dividing grooves according to the present invention, and Figure 1 (b) is an enlarged view of the part surrounded by circle A in Figure 1 (a). A perspective view, FIG. 2 is a sectional view to explain the occurrence of cracks,
FIG. 3 is a perspective view for explaining a conventional manufacturing method of a ceramic substrate having dividing grooves. 1: Ceramic substrate, 2: Dividing groove.

Claims (1)

[Claims] In a method of manufacturing a ceramic substrate by baking and firing a green ceramic sheet in which dividing grooves have been formed in advance so as to be divided into a large number of small substrates, the peripheral end surface of the green ceramic sheet is coated with a solvent-impregnated buff. A method for manufacturing a ceramic substrate having a dividing groove, the method comprising repairing and reinforcing the ends of the dividing groove by buffing.