JPH10158070A - Ceramic sintering jig and production of ceramic parts - Google Patents

Ceramic sintering jig and production of ceramic parts

Info

Publication number
JPH10158070A
JPH10158070A JP8328049A JP32804996A JPH10158070A JP H10158070 A JPH10158070 A JP H10158070A JP 8328049 A JP8328049 A JP 8328049A JP 32804996 A JP32804996 A JP 32804996A JP H10158070 A JPH10158070 A JP H10158070A
Authority
JP
Japan
Prior art keywords
ceramic
sintering jig
sintered body
sintering
jig
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8328049A
Other languages
Japanese (ja)
Inventor
Eiji Sasaki
英二 佐々木
Akira Fujiki
章 藤木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissan Motor Co Ltd
Original Assignee
Nissan Motor Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissan Motor Co Ltd filed Critical Nissan Motor Co Ltd
Priority to JP8328049A priority Critical patent/JPH10158070A/en
Publication of JPH10158070A publication Critical patent/JPH10158070A/en
Pending legal-status Critical Current

Links

Landscapes

  • Devices For Post-Treatments, Processing, Supply, Discharge, And Other Processes (AREA)

Abstract

PROBLEM TO BE SOLVED: To improve the production yield by preventing sticking among ceramic compacts caused when the compacts are sintered while being stacked in plural stages by forming recesses and/or penetrating holes on at least one principal surface of a ceramic sintering jig. SOLUTION: After a ceramic powder having the same compsn. as that of a ceramic sintered body is calcined and pulverized, the powder is mixed with a binder, plasticizer and dispersion medium and compacted into a sheet, punched into a specified shape and sintered to obtain a ceramic sintered body. Recesses and/or penetrating holes are formed on at least one principal surface of the obtd. ceramic sintered body to obtain ceramic sintering jigs 31 to 3n . The sintering jigs 31 to 3n are superimposed alternately with ceramic compacts 41 to 4n then stacked in plural stages as they are and sintered integrally to obtain ceramic sintered bodies. The obtd. ceramic sintered body is separated from the ceramic sintering jigs 31 to 3n . Thereby, the warpage of the ceramic sintered body can be prevented.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、セラミック焼結治
具及びこれを用いたセラミック部品の製造方法に係り、
更に詳しくは、複数枚段積み焼成に用いるセラミック製
の焼結用治具、及び複数枚段積み焼成してもセラミック
成形体同士が固着せず、分離の際に欠けを生じさせるこ
との無いセラミック部品の製造方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a ceramic sintering jig and a method for manufacturing a ceramic component using the same.
More specifically, a ceramic sintering jig used for firing a plurality of sheets, and a ceramic that does not stick to each other even when firing a plurality of sheets and does not cause chipping during separation The present invention relates to a method for manufacturing a component.

【0002】[0002]

【従来の技術】従来、セラミック部品、例えば、電子部
品としての圧電素子は、BaTiO3、PbTiO3及び
PbZrO3等を主成分とするセラミック焼結体と、こ
のセラミック焼結体の表裏面に被着形成された銀製の電
極から構成されている。
2. Description of the Related Art Conventionally, a ceramic component, for example, a piezoelectric element as an electronic component has a ceramic sintered body mainly composed of BaTiO 3 , PbTiO 3, PbZrO 3, etc., and is coated on the front and back surfaces of the ceramic sintered body. It is composed of deposited silver electrodes.

【0003】かかる誘導体素子は、通常、生産性を上げ
るために、プレス成形法などによって形成されたセラミ
ック成形体を複数枚段積みし、1000〜1300℃の
温度で一度に焼成して各セラミック成形体を焼結一体化
させた後、その表裏面に電極を被着することにより形成
されており、各セラミック成形体の表裏面のうちの少な
くとも一面には、セラミック成形体同士が焼結の際に固
着するのを防止するため、凹状線又は凸状線が形成され
ており、例えば、特開昭61−117152号公報に
は、このようなセラミック部品の製造方法が開示されて
いる。
In order to increase the productivity, such a derivative element is usually formed by stacking a plurality of ceramic molded bodies formed by a press molding method or the like and firing them at a temperature of 1000 to 1300 ° C. at a time. After the bodies are sintered and integrated, the electrodes are formed by applying electrodes to the front and back surfaces of the ceramic bodies. A concave line or a convex line is formed in order to prevent the ceramic component from sticking to the surface. For example, Japanese Patent Application Laid-Open No. 61-117152 discloses a method for manufacturing such a ceramic component.

【0004】[0004]

【発明が解決しようとする課題】しかしながら、このよ
うな従来のセラミック部品の製造方法においては、セラ
ミック成形体の表面及び/又は裏面に凹状線又は凸状線
が形成されているものの、凹凸を設けている部分の間隔
が広いことから、複数枚段積みした場合には、セラミッ
ク成形体同士はほぼ面接触状態となり接触部分が未だ多
く、焼成の際の固着を完全には解消し得ないという課題
があった。
However, in such a conventional method for manufacturing a ceramic component, although a concave or convex line is formed on the surface and / or the back surface of the ceramic molded body, irregularities are formed. The problem is that when multiple sheets are stacked, the ceramic molded bodies are almost in surface contact with each other, and there are still many contacting parts, and the fixation during firing cannot be completely eliminated. was there.

【0005】また、凹凸を線状に設けているので、固着
したセラミック焼結体を焼成後に強制的に分離すると、
各セラミック焼結体がその凹凸線に沿って割れ・欠けを
生じたり、完全に分離できないものが製造されたりし
て、製造歩留りを著しく低下させるという課題もあっ
た。
Further, since the irregularities are linearly provided, if the fixed ceramic sintered body is forcibly separated after firing,
There is also a problem that each ceramic sintered body is cracked or chipped along its uneven line, or one that cannot be completely separated is manufactured, thereby significantly reducing the manufacturing yield.

【0006】本発明は、このような従来技術の有する課
題に鑑みてなされたものであり、その目的とするところ
は、複数枚段積みして焼成する際に、セラミック成形体
同士が固着するのを解消し、製造歩留りを向上できるセ
ラミック焼結治具及びセラミック部品の製造方法を提供
することにある。
SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems of the prior art. It is an object of the present invention to provide a method in which a plurality of ceramic molded bodies adhere to each other when firing a plurality of sheets. It is an object of the present invention to provide a ceramic sintering jig and a method for manufacturing a ceramic component, which can solve the above problem and can improve the production yield.

【0007】また、本発明の他の目的は、セラミック成
形体を焼成した後に研磨する必要のないセラミック部品
の製造方法を提供することにある。更に、本発明の更に
他の目的は、セラミック成形体と凹部を設けたセラミッ
ク焼結治具とを複数枚交互に重ね合わせることにより、
段積みする際の互いの端面位置合わせを容易にし、セラ
ミック成形体の反りを回避できるセラミック部品の製造
方法を提供することにある。
Another object of the present invention is to provide a method of manufacturing a ceramic component which does not require polishing after firing the ceramic molded body. Still another object of the present invention is to alternately stack a plurality of ceramic molded bodies and ceramic sintering jigs provided with recesses,
It is an object of the present invention to provide a method for manufacturing a ceramic component, which facilitates the alignment of the end faces during stacking and avoids warpage of the ceramic molded body.

【0008】[0008]

【課題を解決するための手段】本発明者らは、上記課題
を解決すべく鋭意研究した結果、特定のセラミック焼結
治具をセラミック成形体間に配置することにより、上記
目的が達成できることを見出し、本発明を完成するに至
った。
Means for Solving the Problems The inventors of the present invention have made intensive studies to solve the above problems, and as a result, have found that the above object can be achieved by disposing a specific ceramic sintering jig between ceramic molded bodies. As a result, the present invention has been completed.

【0009】即ち、本発明のセラミック焼結治具は、複
数のセラミック成形体を積み上げて焼成する際に、これ
らセラミック成形体間に配置するセラミック製の焼結用
治具であって、少なくとも一主面に凹部及び/又は貫通
孔を配設して成ることを特徴とする。ここで、「主面」
とは、積み上げ方向に垂直な面をいうものとし、セラミ
ック焼結治具がシート状をなす場合には、その側面以外
の面である表面及び/又は裏面を意味するものとする。
That is, the ceramic sintering jig of the present invention is a ceramic sintering jig disposed between the ceramic molded bodies when a plurality of ceramic molded bodies are stacked and fired. It is characterized in that a concave portion and / or a through hole is provided on the main surface. Here, "principal surface"
The term “surface” refers to a surface perpendicular to the stacking direction, and when the ceramic sintering jig has a sheet shape, it means a surface other than the side surface and / or the back surface.

【0010】また、本発明のセラミック部品の製造方法
は、上述のセラミック焼結治具を用いてセラミック部品
を製造するに当たり、セラミック成形体と上記セラミッ
ク焼結治具とを交互に重ね合わせて積み上げ、次いで、
そのまま状態で複数枚段積み一体焼成してセラミック焼
結体を得、しかる後、得られたセラミック焼結体をそれ
ぞれ分離することを特徴とする。
In the method of manufacturing a ceramic component according to the present invention, when a ceramic component is manufactured using the above-described ceramic sintering jig, the ceramic compact and the ceramic sintering jig are alternately stacked and stacked. And then
It is characterized by stacking a plurality of sheets as they are and firing them integrally to obtain a ceramic sintered body, and then separating the obtained ceramic sintered bodies.

【0011】[0011]

【発明の実施の形態】以下、本発明の焼結治具及び製造
方法について詳細に説明する。上述の如く、本発明のセ
ラミック焼結治具は、少なくとも一主面に凹部若しくは
貫通孔又はこの両者を有する。図1(a)及び(b)
は、本発明のセラミック焼結治具の一実施形態を示す平
面及び断面図であって、セラミック焼結治具1は、その
一主面である表面又は裏面に多数の凹部2を有してい
る。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The sintering jig and manufacturing method of the present invention will be described in detail below. As described above, the ceramic sintering jig of the present invention has a concave portion, a through hole, or both on at least one main surface. FIG. 1 (a) and (b)
1 is a plan view and a cross-sectional view showing one embodiment of a ceramic sintering jig of the present invention. A ceramic sintering jig 1 has a large number of concave portions 2 on a front surface or a back surface which is one main surface thereof. I have.

【0012】また、本焼結治具において、凹部2は両主
面に設けてもよく、例えば、図2(a)及び(b)に示
す本焼結治具の他の実施形態では、セラミック焼結治具
1の両主面(表面と裏面)に、凹部2が多数形成されて
いる。更に、本焼結治具においては、凹部の代わりに貫
通孔を設けてもよく、例えば、図3(a)及び(b)に
示す本焼結治具の更に他の実施形態では、セラミック焼
結治具1の主面間に多数の貫通孔2’が設けられてい
る。
In this sintering jig, the recess 2 may be provided on both main surfaces. For example, in another embodiment of the sintering jig shown in FIGS. A large number of recesses 2 are formed on both main surfaces (front and back surfaces) of the sintering jig 1. Further, in this sintering jig, a through hole may be provided instead of the concave portion. For example, in still another embodiment of the sintering jig shown in FIGS. A large number of through holes 2 ′ are provided between the main surfaces of the jig 1.

【0013】次に、本焼結治具の製造方法について説明
する。本焼結治具は、セラミック粉末を仮焼成して粉砕
し、適当なバインダー、可塑剤、分散媒を加えて、押出
し法によりシート状に成形したものを所定形状に打ち抜
き加工し、しかる後、約1200℃の温度で焼成してセ
ラミック焼結体を得、得られた焼結体の少なくとも一主
面に凹部及び/又は貫通孔を形成することにより、製造
することができる。
Next, a method for manufacturing the present sintering jig will be described. The sintering jig is prepared by calcining and crushing ceramic powder, adding an appropriate binder, a plasticizer, and a dispersing medium, and extruding a sheet formed by extrusion into a predetermined shape. It can be manufactured by firing at a temperature of about 1200 ° C. to obtain a ceramic sintered body, and forming a concave portion and / or a through hole on at least one main surface of the obtained sintered body.

【0014】上記凹部の形成方法は、特に限定されるも
のではないが、サンドブラスト処理やガラスビーズブラ
スト処理及びレーザードリル加工などにより形成するこ
とができる。また、上記貫通孔の形成方法も、特に限定
されるものではなく、レーザードリル加工などにより貫
通孔を形成できる。
The method of forming the concave portion is not particularly limited, but the concave portion can be formed by sand blasting, glass bead blasting, laser drilling, or the like. The method of forming the through hole is not particularly limited, and the through hole can be formed by laser drilling or the like.

【0015】次に、本発明のセラミック部品の製造方法
について説明する。本製造方法では、上述のようにして
得られた焼結治具と、得ようとするセラミック部品にな
るべきセラミック成形体とを、図4(a)及び(b)に
示すように交互に重ね合わせて複数枚段積みし、そのま
ま状態で一体焼成する。なお、図4(a)は図1に示し
た焼結治具を用いた例であり、図4(b)は図2に示し
た焼結治具を用いた例を示している。
Next, a method of manufacturing a ceramic component according to the present invention will be described. In this manufacturing method, the sintering jig obtained as described above and a ceramic molded body to be a ceramic part to be obtained are alternately stacked as shown in FIGS. 4 (a) and 4 (b). A plurality of sheets are stacked together and fired integrally in that state. FIG. 4A shows an example using the sintering jig shown in FIG. 1, and FIG. 4B shows an example using the sintering jig shown in FIG.

【0016】図4(a)及び(b)から明らかなよう
に、本製造方法では、各セラミック焼結治具31〜3n
セラミック成形体41〜4nとは、点接触しており、両者
の接合面積は小さい。従って、上記一体焼成の際にセラ
ミック成形体のそれぞれが固着することが皆無となる。
[0016] FIG. 4 (a) and (b) As is apparent from, in this manufacturing method, the respective ceramic sintered jig 3 1 to 3 n and the ceramic molded body 4 1 to 4 n, in point contact And the joint area between them is small. Therefore, there is no possibility that each of the ceramic molded bodies is fixed at the time of the integral firing.

【0017】また、本製造方法においては、セラミック
焼結治具とセラミック成形体とが同一の組成を有するよ
うにすることが好ましい。この理由は、セラミック焼結
治具とセラミック成形体とを重ね合わせ、複数枚段積み
一体焼成した場合、セラミック焼結治具とセラミック成
形体が反応してセラミック成形体の組成が変化すること
を防止するためである。
Further, in the present manufacturing method, it is preferable that the ceramic sintering jig and the ceramic molded body have the same composition. The reason for this is that, when a ceramic sintering jig and a ceramic molded body are overlapped, and a plurality of sheets are stacked and fired integrally, the composition of the ceramic molded body changes due to the reaction between the ceramic sintering jig and the ceramic molded body. This is to prevent it.

【0018】具体的には、得ようとするセラミック部品
が、BaTiO3、PbTiO3及びPbZrO3等を主
成分とする圧電素子に関するセラミック焼結体である場
合には、これに応じて、セラミック焼結治具もBaTi
3、PbTiO3及びPbZrO3を主成分とするセラ
ミック焼結体から構成するのが好ましい。
Specifically, when the ceramic component to be obtained is a ceramic sintered body relating to a piezoelectric element mainly containing BaTiO 3 , PbTiO 3, PbZrO 3, etc. The jig is also BaTi
It is preferable to use a ceramic sintered body containing O 3 , PbTiO 3 and PbZrO 3 as main components.

【0019】更に、セラミック焼結治具は、積み上げ方
向(段積み方向)から観察した場合に、上記セラミック
成形体の形状と同一の形状を有することが好ましい。例
えば、セラミック成形体の上記形状が矩形の場合には、
これと同一寸法の矩形、また、セラミック成形体の上記
形状が円形の場合には、これと同一径の円形とするのが
好ましい。
Further, it is preferable that the ceramic sintering jig has the same shape as that of the ceramic molded body when observed from the stacking direction (the stacking direction). For example, when the shape of the ceramic molded body is rectangular,
In the case of a rectangle having the same size as the above, or the above-mentioned shape of the ceramic molded body is a circle, it is preferable that the shape be a circle of the same diameter.

【0020】セラミック焼結治具とセラミック焼結体の
形状を上述のように調整することにより、それぞれを交
互に重ね合わせ複数枚段積みした際、セラミック焼結治
具とセラミック成形体との端面に位置ズレが生じても、
セラミック焼結治具の剛性を利用し、横方向から押圧す
ることで端面の位置ズレを修正できる。従って、上記一
体焼成に際し、得られるセラミック焼結体の反りが皆無
となり、セラミック成形体を焼成した後、セラミック焼
結体の表面を研磨する必要がなくなる。
By adjusting the shapes of the ceramic sintering jig and the ceramic sintered body as described above, when the ceramic sintering jig and the ceramic compact are stacked alternately and a plurality of sheets are stacked, the end faces of the ceramic sintering jig and the ceramic compact are stacked. Even if the position shifts,
Utilizing the rigidity of the ceramic sintering jig, it is possible to correct the positional deviation of the end face by pressing from the lateral direction. Therefore, in the above-described integral firing, there is no warping of the obtained ceramic sintered body, and there is no need to polish the surface of the ceramic sintered body after firing the ceramic molded body.

【0021】[0021]

【実施例】以下、本発明を実施例及び比較例により更に
詳細に説明するが、本発明はこの実施例に限定されるも
のではない。 (実施例)本実施例では、セラミック焼結治具及びセラ
ミック成形体双方の材質をBaTiO3とし、両者を図
4に示すように複数枚段積みし、一体焼成した。
EXAMPLES Hereinafter, the present invention will be described in more detail with reference to Examples and Comparative Examples, but the present invention is not limited to these Examples. (Embodiment) In this embodiment, both the ceramic sintering jig and the ceramic compact were made of BaTiO 3, and a plurality of both were stacked and fired integrally as shown in FIG.

【0022】図5により、複数の凹部を形成したセラミ
ック焼結治具の製造の手順を説明する。まず、主として
BaTiO3から成る原料粉末にバインダーを加えて混
練体を作製し、次いで、押出し製法で厚さ0.5mmの
シート状体を得た。得られたシート状体をφ20mmの
金型で100枚打抜き、1200℃の温度で焼結し、φ
15mmのセラミック焼結体を得た。しかる後、この焼
結体の一主面にφ20μmのサンドで2分間ショットブ
ラストを行い複数の凹部を形成し、セラミック焼結治具
を得た。
With reference to FIG. 5, a procedure for manufacturing a ceramic sintering jig having a plurality of recesses will be described. First, a kneaded body was prepared by adding a binder to a raw material powder mainly composed of BaTiO 3 , and then a sheet having a thickness of 0.5 mm was obtained by an extrusion method. 100 sheets of the obtained sheet were punched with a φ20 mm mold and sintered at a temperature of 1200 ° C.
A ceramic sintered body of 15 mm was obtained. Thereafter, shot blasting was performed on one main surface of the sintered body with φ20 μm sand for 2 minutes to form a plurality of concave portions, thereby obtaining a ceramic sintering jig.

【0023】次に、セラミック成形体シートをφ15m
mの金型で100枚打抜き、このセラミック成形体と上
記セラミック焼結治具とを交互に重ね合わせ、それぞれ
20枚ごとに段積みして、ピンセットでセラミック焼結
治具とセラミック成形体の端面位置合わせを行い、12
00℃の温度で焼結してセラミック焼結体(セラミック
部品)を得た。
Next, the ceramic molded body sheet is
m, and the ceramic molding and the ceramic sintering jig are alternately overlapped with each other, and the ceramic sintering jig is stacked on every 20 sheets, and the end faces of the ceramic sintering jig and the ceramic molding are tweezers. After aligning, 12
Sintering was performed at a temperature of 00 ° C. to obtain a ceramic sintered body (ceramic part).

【0024】しかる後、上述の如く一体焼結して得られ
たセラミック焼結体をアルコール中に浸漬し、300W
の超音波処理を1分間行ない、セラミック焼結体の分離
状態を観察した。その結果、分離しないセラミック焼結
体は皆無であり、分離率は100%であった。また、分
離したセラミック焼結体の反りは、極めて小さく、問題
にならないレベルで、歩留まりを一段と向上することが
できた。
Thereafter, the ceramic sintered body obtained by integrally sintering as described above is immersed in alcohol, and
Was performed for 1 minute, and the separated state of the ceramic sintered body was observed. As a result, there was no ceramic sintered body that did not separate, and the separation rate was 100%. Further, the warpage of the separated ceramic sintered body was extremely small, and the yield could be further improved to a level that did not cause a problem.

【0025】(比較例)上記実施例で用いたセラミック
成形体シートの上面に350メッシュの型を300kg
f/cm2で押圧し、8μmの凹状線を形成し、更に、
φ15mmの金型で100枚打抜き、上記実施例と同様
の操作を繰り返しセラミック焼結体を得、その分離状況
を観察した。その結果、各々のセラミック焼結体に分離
したものは、100枚中95枚であり、分離した焼結体
のうち7枚が凹状線に沿って割れており、88枚が正常
であった。更に、セラミック焼結体の反りを測定した結
果、割れの無い88枚の焼結体の中で、0.1mm以上
の反りのある焼結体が33枚あった。この反りのほとん
どは、セラミック焼結体の縁のダレによるもので、良品
率は55%となった。
(Comparative Example) A 350-mesh mold was placed on the upper surface of the ceramic molded body sheet used in the above-mentioned embodiment at 300 kg.
f / cm 2 to form an 8 μm concave line,
A 100-sheet die was punched with a φ15 mm mold, and the same operation as in the above example was repeated to obtain a ceramic sintered body, and the state of separation was observed. As a result, the number of the separated ceramic sintered bodies was 95 out of 100, 7 of the separated sintered bodies were broken along the concave line, and 88 were normal. Furthermore, as a result of measuring the warpage of the ceramic sintered body, 33 of the 88 sintered bodies having no crack had warpage of 0.1 mm or more. Most of the warpage was due to sagging of the edge of the ceramic sintered body, and the yield rate was 55%.

【0026】以上、本発明を実施形態及び実施例により
詳細に説明したが、本発明はこれら実施形態及び実施例
に限定されるものではなく、本発明の要旨の範囲内にお
いて種々の変形が可能である。例えば、本発明の焼結治
具に設けた凹部及び貫通孔は、セラミック成形体との点
接触を可能にするようなものであればよく、その孔形状
などは適宜変更できる。また、焼結治具の主面には、凹
部と貫通孔の双方を設けてもよい。更に、焼結治具の平
面形状も特に限定されるものではない。
Although the present invention has been described in detail with reference to the embodiments and examples, the present invention is not limited to these embodiments and examples, and various modifications can be made within the scope of the present invention. It is. For example, the concave portion and the through hole provided in the sintering jig of the present invention may be any as long as they enable point contact with the ceramic molded body, and the hole shape and the like can be appropriately changed. Further, both the concave portion and the through hole may be provided on the main surface of the sintering jig. Further, the planar shape of the sintering jig is not particularly limited.

【0027】[0027]

【発明の効果】以上説明してきたように、本発明によれ
ば、特定のセラミック焼結治具をセラミック成形体間に
配置することとしたため、複数枚段積みして焼成する際
に、セラミック成形体同士が固着するのを解消し、製造
歩留りを向上できるセラミック焼結治具及びセラミック
部品の製造方法を提供することができる。
As described above, according to the present invention, since a specific ceramic sintering jig is arranged between the ceramic compacts, a plurality of ceramic sintering jigs are stacked and fired during firing. It is possible to provide a ceramic sintering jig and a method for manufacturing a ceramic component, which can prevent the bodies from sticking to each other and improve the production yield.

【0028】また、本発明のセラミック焼結治具とセラ
ミック成形体の組成を同一とすることにより、焼成の際
にセラミック焼結治具とセラミック成形体が反応してセ
ラミック成形体の組成が変化することを防止することも
できる。更に、本発明のセラミック焼結治具とセラミッ
ク焼結体の形状を同一にすることにより、得られるセラ
ミック焼結体の反りが皆無となり、セラミック焼結体の
表面を研磨する必要がなくなる。
Further, by making the composition of the ceramic sintering jig of the present invention and the ceramic molded body the same, the composition of the ceramic molded body changes due to the reaction between the ceramic sintering jig and the ceramic molded body during firing. Can be prevented. Further, by making the shape of the ceramic sintering jig of the present invention and the shape of the ceramic sintered body the same, there is no warpage of the obtained ceramic sintered body, and it is not necessary to polish the surface of the ceramic sintered body.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の焼結治具の一実施形態を示す平面及び
断面図である。
FIG. 1 is a plan view and a sectional view showing an embodiment of a sintering jig of the present invention.

【図2】本発明の焼結治具の他の実施形態を示す平面及
び断面図である。
FIG. 2 is a plan view and a sectional view showing another embodiment of the sintering jig of the present invention.

【図3】本発明の焼結治具の更に他の実施形態を示す平
面及び断面図である。
FIG. 3 is a plan view and a sectional view showing still another embodiment of the sintering jig of the present invention.

【図4】本発明の焼結治具とセラミック成形体とを交互
に重ね合わせて複数枚段積みした状態を示す断面図であ
る。
FIG. 4 is a cross-sectional view showing a state in which a plurality of sintering jigs and ceramic molded bodies of the present invention are alternately overlapped and stacked.

【図5】本発明の焼結治具の製造手順を示す工程図であ
る。
FIG. 5 is a process chart showing a manufacturing procedure of the sintering jig of the present invention.

【符号の説明】[Explanation of symbols]

1 セラミック焼結治具 2 凹部 2’ 貫通孔 DESCRIPTION OF SYMBOLS 1 Ceramic sintering jig 2 Recess 2 'Through-hole

Claims (7)

【特許請求の範囲】[Claims] 【請求項1】 複数のセラミック成形体を積み上げて焼
成する際に、これらセラミック成形体間に配置するセラ
ミック製の焼結用治具であって、少なくとも一主面に凹
部及び/又は貫通孔を配設して成ることを特徴とするセ
ラミック焼結治具。
1. A ceramic sintering jig disposed between a plurality of ceramic compacts when stacking and firing the plurality of ceramic compacts, wherein at least one main surface has a concave portion and / or a through hole. A ceramic sintering jig characterized by being arranged.
【請求項2】 上記セラミック成形体を焼成して得られ
るセラミック焼結体と同一の組成を有することを特徴と
する請求項1記載のセラミック焼結治具。
2. The ceramic sintering jig according to claim 1, wherein said ceramic sintering jig has the same composition as a ceramic sintered body obtained by firing said ceramic molded body.
【請求項3】 上記セラミック成形体の積み上げ方向に
おける形状と同一の形状を有することを特徴とする請求
項1又は2記載のセラミック焼結治具。
3. The ceramic sintering jig according to claim 1, wherein said ceramic sintering jig has the same shape as the shape of said ceramic molded body in the stacking direction.
【請求項4】 上記凹部をサンドブラスト及び/又はガ
ラスビーズブラスト処理により設けたことを特徴とする
請求項1〜3のいずれか1つの項に記載のセラミック焼
結治具。
4. The ceramic sintering jig according to claim 1, wherein said recess is provided by sand blasting and / or glass bead blasting.
【請求項5】 上記凹部又は貫通孔をレーザードリル加
工で設けたことを特徴とする請求項1〜3のいずれか1
つの項に記載のセラミック焼結治具。
5. The method according to claim 1, wherein the recess or the through hole is formed by laser drilling.
Ceramic sintering jigs described in the two items.
【請求項6】 請求項1〜5のいずれか1つの項に記載
のセラミック焼結治具を用いてセラミック部品を製造す
るに当たり、 セラミック成形体と上記セラミック焼結治具とを交互に
重ね合わせて積み上げ、次いで、そのまま状態で複数枚
段積み一体焼成してセラミック焼結体を得、 しかる後、得られたセラミック焼結体をそれぞれ分離す
る、ことを特徴とするセラミック部品の製造方法。
6. In producing a ceramic component using the ceramic sintering jig according to any one of claims 1 to 5, a ceramic compact and the ceramic sintering jig are alternately overlapped. A plurality of stacked ceramic sheets, and then integrally firing the plurality of stacked sheets as they are to obtain a ceramic sintered body, and thereafter separating the obtained ceramic sintered bodies, respectively.
【請求項7】 上記複数枚段積み一体焼成する際、請求
項3記載のセラミック焼結治具を用いて、上記セラミッ
ク成形体の端面位置合わせを行うことを特徴とする請求
項6記載のセラミック部品の製造方法。
7. The ceramic according to claim 6, wherein the ceramic sintering jig according to claim 3 is used to align the end face of the ceramic molded body when the plurality of sheets are integrally fired. The method of manufacturing the part.
JP8328049A 1996-11-25 1996-11-25 Ceramic sintering jig and production of ceramic parts Pending JPH10158070A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8328049A JPH10158070A (en) 1996-11-25 1996-11-25 Ceramic sintering jig and production of ceramic parts

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8328049A JPH10158070A (en) 1996-11-25 1996-11-25 Ceramic sintering jig and production of ceramic parts

Publications (1)

Publication Number Publication Date
JPH10158070A true JPH10158070A (en) 1998-06-16

Family

ID=18205949

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8328049A Pending JPH10158070A (en) 1996-11-25 1996-11-25 Ceramic sintering jig and production of ceramic parts

Country Status (1)

Country Link
JP (1) JPH10158070A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI380972B (en) * 2008-08-13 2013-01-01
USRE49919E1 (en) * 2013-01-02 2024-04-16 Lg Electronics Inc. Ice maker

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI380972B (en) * 2008-08-13 2013-01-01
USRE49919E1 (en) * 2013-01-02 2024-04-16 Lg Electronics Inc. Ice maker

Similar Documents

Publication Publication Date Title
US20060035194A1 (en) Ceramic setter plate and method for manufacturing multilayer ceramic substrate using the same
JPH09277523A (en) Piezoelectric vibration member and its preparation
JPH10158070A (en) Ceramic sintering jig and production of ceramic parts
US9728706B2 (en) Method for producing a multilayer element
JP4674397B2 (en) Manufacturing method of ceramic body
JP4421910B2 (en) Heat treatment tray and method for producing ceramic product using the same
JPH01228730A (en) Manufacture of ceramic die
JP2003529942A (en) Method and apparatus for manufacturing a multilayer actuator
JPS61117152A (en) Ceramic part and manufacture
JP3731916B2 (en) Manufacturing method of ceramic laminated piezoelectric element
JP3325483B2 (en) Method of manufacturing glaze substrate for thermal head
JPH10236878A (en) Ceramic parts and their production
JPH04168052A (en) Manufacture of ink jet head
JPH0312952A (en) Manufacture of ceramic circuit board
JPH04145674A (en) Electrostrictive effect element and production of the same
JPH0967169A (en) Firing jig and production of ceramic substrate formed by using the same
JPH0748409B2 (en) Ceramic substrate and manufacturing method thereof
JPH0734073B2 (en) PLZT display device manufacturing apparatus and device manufacturing method
JP2829276B2 (en) Method and apparatus for manufacturing ceramic substrate
JP2512570B2 (en) Method for producing anisotropically conductive ceramic composite
JPH04336255A (en) Ink jet head
JPH0357062B2 (en)
JPH118107A (en) Manufacture of ceramic electronic part
JPH098377A (en) Production of piezoelectric transformer
JPH05178672A (en) Production of ceramics