JPH0727625Y2 - 基板収納カセット昇降機の振動防止装置 - Google Patents

基板収納カセット昇降機の振動防止装置

Info

Publication number
JPH0727625Y2
JPH0727625Y2 JP1988126338U JP12633888U JPH0727625Y2 JP H0727625 Y2 JPH0727625 Y2 JP H0727625Y2 JP 1988126338 U JP1988126338 U JP 1988126338U JP 12633888 U JP12633888 U JP 12633888U JP H0727625 Y2 JPH0727625 Y2 JP H0727625Y2
Authority
JP
Japan
Prior art keywords
substrate
cassette
storage cassette
substrate storage
vibration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988126338U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0249136U (enrdf_load_stackoverflow
Inventor
俊文 永田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP1988126338U priority Critical patent/JPH0727625Y2/ja
Publication of JPH0249136U publication Critical patent/JPH0249136U/ja
Application granted granted Critical
Publication of JPH0727625Y2 publication Critical patent/JPH0727625Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1988126338U 1988-09-29 1988-09-29 基板収納カセット昇降機の振動防止装置 Expired - Lifetime JPH0727625Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988126338U JPH0727625Y2 (ja) 1988-09-29 1988-09-29 基板収納カセット昇降機の振動防止装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988126338U JPH0727625Y2 (ja) 1988-09-29 1988-09-29 基板収納カセット昇降機の振動防止装置

Publications (2)

Publication Number Publication Date
JPH0249136U JPH0249136U (enrdf_load_stackoverflow) 1990-04-05
JPH0727625Y2 true JPH0727625Y2 (ja) 1995-06-21

Family

ID=31377774

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988126338U Expired - Lifetime JPH0727625Y2 (ja) 1988-09-29 1988-09-29 基板収納カセット昇降機の振動防止装置

Country Status (1)

Country Link
JP (1) JPH0727625Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5099386B2 (ja) * 2010-07-01 2012-12-19 村田機械株式会社 基板用のカセットの載置台

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5720444A (en) * 1980-07-11 1982-02-02 Citizen Watch Co Ltd Feeding device for semiconductor wafer
JPS6353330A (ja) * 1986-08-20 1988-03-07 Nippon Kokan Kk <Nkk> 上下振子式動吸振器

Also Published As

Publication number Publication date
JPH0249136U (enrdf_load_stackoverflow) 1990-04-05

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