JPH0723844B2 - 表面形状測定器 - Google Patents

表面形状測定器

Info

Publication number
JPH0723844B2
JPH0723844B2 JP60062265A JP6226585A JPH0723844B2 JP H0723844 B2 JPH0723844 B2 JP H0723844B2 JP 60062265 A JP60062265 A JP 60062265A JP 6226585 A JP6226585 A JP 6226585A JP H0723844 B2 JPH0723844 B2 JP H0723844B2
Authority
JP
Japan
Prior art keywords
light
pupil
objective lens
sample
optical system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP60062265A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61219805A (ja
Inventor
嘉明 堀川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Olympus Corp
Original Assignee
Olympus Optical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Optical Co Ltd filed Critical Olympus Optical Co Ltd
Priority to JP60062265A priority Critical patent/JPH0723844B2/ja
Priority to DE19863610530 priority patent/DE3610530A1/de
Publication of JPS61219805A publication Critical patent/JPS61219805A/ja
Priority to US07/320,850 priority patent/US4930896A/en
Publication of JPH0723844B2 publication Critical patent/JPH0723844B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Automatic Focus Adjustment (AREA)
  • Measurement Of Optical Distance (AREA)
JP60062265A 1985-03-27 1985-03-27 表面形状測定器 Expired - Fee Related JPH0723844B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP60062265A JPH0723844B2 (ja) 1985-03-27 1985-03-27 表面形状測定器
DE19863610530 DE3610530A1 (de) 1985-03-27 1986-03-27 Oberflaechenstrukturmessgeraet
US07/320,850 US4930896A (en) 1985-03-27 1989-03-02 Surface structure measuring apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60062265A JPH0723844B2 (ja) 1985-03-27 1985-03-27 表面形状測定器

Publications (2)

Publication Number Publication Date
JPS61219805A JPS61219805A (ja) 1986-09-30
JPH0723844B2 true JPH0723844B2 (ja) 1995-03-15

Family

ID=13195142

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60062265A Expired - Fee Related JPH0723844B2 (ja) 1985-03-27 1985-03-27 表面形状測定器

Country Status (3)

Country Link
US (1) US4930896A (en, 2012)
JP (1) JPH0723844B2 (en, 2012)
DE (1) DE3610530A1 (en, 2012)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07107481B2 (ja) * 1987-05-21 1995-11-15 アンリツ株式会社 変位測定装置
DE3720079A1 (de) * 1987-06-16 1988-12-29 Breitmeier Ulrich Optischer abtastkopf
DE3840820A1 (de) * 1988-12-03 1990-06-07 Breitmeier Ulrich Messkopf
DE4015893C2 (de) * 1990-05-17 1994-06-16 Phototherm Dr Petry Gmbh Verfahren und Vorrichtung zur Untersuchung der inneren Struktur eines absorptionsfähigen Prüflings
EP0503111A1 (en) * 1991-03-13 1992-09-16 Toyohiko Kashiwagi Aspherical lens, method of producing the lens and apparatus for producing the lens
DE4109696A1 (de) * 1991-03-23 1992-09-24 Parker Praedifa Gmbh Verfahren und vorrichtung zum bestimmen des vulkanisationsgrades von elastomeren
US5220397A (en) * 1992-03-25 1993-06-15 Peisen Huang Method and apparatus for angle measurement based on the internal reflection effect
CN1038781C (zh) * 1993-06-26 1998-06-17 南京理工大学 高精度大孔径移相式数字平面干涉仪
DE19522201A1 (de) * 1994-06-21 1996-01-04 Rodenstock Optik G Vorrichtung zur berührungslosen Messung des Abstandes einer reflektierenden Oberfläche von einer Referenzebene
DE29715904U1 (de) * 1997-09-01 1997-10-23 OMECA Messtechnik GmbH, 14513 Teltow Interferenzoptische Meßeinrichtung
JP2949220B2 (ja) * 1998-02-12 1999-09-13 工業技術院長 極微小顕微鏡分光装置
DE19930628A1 (de) * 1999-07-02 2001-02-01 Graul Renate Topographiemeßgerät
US6486457B1 (en) * 1999-10-07 2002-11-26 Agilent Technologies, Inc. Apparatus and method for autofocus
JP2001201324A (ja) * 2000-01-20 2001-07-27 Minolta Co Ltd 形状計測装置
WO2002006765A1 (de) * 2000-07-13 2002-01-24 Werth Messtechnik Gmbh Verfahren zum berührungslosen messen von geometrien von gegenständen
JP3858571B2 (ja) * 2000-07-27 2006-12-13 株式会社日立製作所 パターン欠陥検査方法及びその装置
US6731383B2 (en) * 2000-09-12 2004-05-04 August Technology Corp. Confocal 3D inspection system and process
US6870609B2 (en) * 2001-02-09 2005-03-22 August Technology Corp. Confocal 3D inspection system and process
US20020145734A1 (en) * 2001-02-09 2002-10-10 Cory Watkins Confocal 3D inspection system and process
US20020148984A1 (en) * 2001-02-09 2002-10-17 Cory Watkins Confocal 3D inspection system and process
US6773935B2 (en) * 2001-07-16 2004-08-10 August Technology Corp. Confocal 3D inspection system and process
US6970287B1 (en) 2001-07-16 2005-11-29 August Technology Corp. Confocal 3D inspection system and process
US6882415B1 (en) 2001-07-16 2005-04-19 August Technology Corp. Confocal 3D inspection system and process
JP3729154B2 (ja) * 2002-05-10 2005-12-21 株式会社日立製作所 パターン欠陥検査方法及びその装置
JP3729156B2 (ja) * 2002-06-07 2005-12-21 株式会社日立製作所 パターン欠陥検出方法およびその装置
US7164108B2 (en) * 2003-04-24 2007-01-16 Coherent, Inc. Detection system for optical beam pointing and shaping
JP2005189475A (ja) * 2003-12-25 2005-07-14 Fujinon Corp 顕微鏡装置
JP4680052B2 (ja) * 2005-12-22 2011-05-11 シスメックス株式会社 標本撮像装置及びこれを備える標本分析装置
TW201111739A (en) * 2009-09-18 2011-04-01 Arcs Prec Technology Co Ltd Lens mount for use in measurement device

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3589815A (en) * 1968-06-21 1971-06-29 Information Dev Corp Noncontact measuring probe
US4088408A (en) * 1976-11-08 1978-05-09 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Device for measuring the contour of a surface
US4251125A (en) * 1976-12-28 1981-02-17 Canon Kabushiki Kaisha Scanning optical system including an afocal system
JPS6011325B2 (ja) * 1977-01-21 1985-03-25 キヤノン株式会社 走査装置
JPS5483854A (en) * 1977-12-16 1979-07-04 Canon Inc Measuring device
JPS54114182A (en) * 1978-02-27 1979-09-06 Canon Inc Alingment device
JPS54143240A (en) * 1978-04-28 1979-11-08 Jeol Ltd Scanning optical system of thermography apparatus
JPS58194007A (ja) * 1982-05-10 1983-11-11 Olympus Optical Co Ltd 合焦検出装置
JPS58208610A (ja) * 1982-05-17 1983-12-05 ブリティッシュ・テクノロジー・グループ・リミテッド 物体の表面検査装置
DE3220080A1 (de) * 1982-05-28 1984-02-23 Universität Stuttgart Institut für Technische Optik, 7000 Stuttgart Geraet zur beruehrungslosen messung der oberflaechenrauheit
JPS5963503A (ja) * 1982-10-02 1984-04-11 Canon Inc マ−ク位置検出方法
JPS5990007A (ja) * 1982-11-16 1984-05-24 Olympus Optical Co Ltd 光学式寸度測定装置
GB2135150A (en) * 1983-02-15 1984-08-22 Gen Electric Optical inspection system

Also Published As

Publication number Publication date
US4930896A (en) 1990-06-05
DE3610530C2 (en, 2012) 1989-10-26
DE3610530A1 (de) 1986-10-02
JPS61219805A (ja) 1986-09-30

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees