JPH0719154Y2 - ウェハーカセットダム装置 - Google Patents
ウェハーカセットダム装置Info
- Publication number
- JPH0719154Y2 JPH0719154Y2 JP5447190U JP5447190U JPH0719154Y2 JP H0719154 Y2 JPH0719154 Y2 JP H0719154Y2 JP 5447190 U JP5447190 U JP 5447190U JP 5447190 U JP5447190 U JP 5447190U JP H0719154 Y2 JPH0719154 Y2 JP H0719154Y2
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- support rod
- mounting
- cassette mounting
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000011295 pitch Substances 0.000 claims description 13
- 235000012431 wafers Nutrition 0.000 description 34
- 238000011144 upstream manufacturing Methods 0.000 description 10
- 230000001360 synchronised effect Effects 0.000 description 4
- 238000006073 displacement reaction Methods 0.000 description 3
- 238000005192 partition Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000000452 restraining effect Effects 0.000 description 1
Landscapes
- Warehouses Or Storage Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5447190U JPH0719154Y2 (ja) | 1990-05-24 | 1990-05-24 | ウェハーカセットダム装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5447190U JPH0719154Y2 (ja) | 1990-05-24 | 1990-05-24 | ウェハーカセットダム装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0412648U JPH0412648U (enExample) | 1992-01-31 |
| JPH0719154Y2 true JPH0719154Y2 (ja) | 1995-05-01 |
Family
ID=31576564
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5447190U Expired - Lifetime JPH0719154Y2 (ja) | 1990-05-24 | 1990-05-24 | ウェハーカセットダム装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0719154Y2 (enExample) |
-
1990
- 1990-05-24 JP JP5447190U patent/JPH0719154Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0412648U (enExample) | 1992-01-31 |
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