JPH0412648U - - Google Patents
Info
- Publication number
- JPH0412648U JPH0412648U JP5447190U JP5447190U JPH0412648U JP H0412648 U JPH0412648 U JP H0412648U JP 5447190 U JP5447190 U JP 5447190U JP 5447190 U JP5447190 U JP 5447190U JP H0412648 U JPH0412648 U JP H0412648U
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- support rod
- wafer
- shelves
- conveyor chains
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011295 pitch Substances 0.000 claims 1
- 230000001360 synchronised effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
Landscapes
- Warehouses Or Storage Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5447190U JPH0719154Y2 (ja) | 1990-05-24 | 1990-05-24 | ウェハーカセットダム装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5447190U JPH0719154Y2 (ja) | 1990-05-24 | 1990-05-24 | ウェハーカセットダム装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0412648U true JPH0412648U (enExample) | 1992-01-31 |
| JPH0719154Y2 JPH0719154Y2 (ja) | 1995-05-01 |
Family
ID=31576564
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5447190U Expired - Lifetime JPH0719154Y2 (ja) | 1990-05-24 | 1990-05-24 | ウェハーカセットダム装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0719154Y2 (enExample) |
-
1990
- 1990-05-24 JP JP5447190U patent/JPH0719154Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0719154Y2 (ja) | 1995-05-01 |
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