JPH0719142Y2 - 気相成長装置 - Google Patents

気相成長装置

Info

Publication number
JPH0719142Y2
JPH0719142Y2 JP16650085U JP16650085U JPH0719142Y2 JP H0719142 Y2 JPH0719142 Y2 JP H0719142Y2 JP 16650085 U JP16650085 U JP 16650085U JP 16650085 U JP16650085 U JP 16650085U JP H0719142 Y2 JPH0719142 Y2 JP H0719142Y2
Authority
JP
Japan
Prior art keywords
vapor phase
heating coil
phase growth
winding
susceptor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP16650085U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6276528U (enExample
Inventor
公弟 岩田
武敏 石川
義教 中川
忠正 古屋
秀雄 西城
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electronics Industry Co Ltd
Shibaura Machine Co Ltd
Original Assignee
Fuji Electronics Industry Co Ltd
Toshiba Machine Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electronics Industry Co Ltd, Toshiba Machine Co Ltd filed Critical Fuji Electronics Industry Co Ltd
Priority to JP16650085U priority Critical patent/JPH0719142Y2/ja
Publication of JPS6276528U publication Critical patent/JPS6276528U/ja
Application granted granted Critical
Publication of JPH0719142Y2 publication Critical patent/JPH0719142Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP16650085U 1985-10-31 1985-10-31 気相成長装置 Expired - Lifetime JPH0719142Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16650085U JPH0719142Y2 (ja) 1985-10-31 1985-10-31 気相成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16650085U JPH0719142Y2 (ja) 1985-10-31 1985-10-31 気相成長装置

Publications (2)

Publication Number Publication Date
JPS6276528U JPS6276528U (enExample) 1987-05-16
JPH0719142Y2 true JPH0719142Y2 (ja) 1995-05-01

Family

ID=31097535

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16650085U Expired - Lifetime JPH0719142Y2 (ja) 1985-10-31 1985-10-31 気相成長装置

Country Status (1)

Country Link
JP (1) JPH0719142Y2 (enExample)

Also Published As

Publication number Publication date
JPS6276528U (enExample) 1987-05-16

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