JPS6276528U - - Google Patents
Info
- Publication number
- JPS6276528U JPS6276528U JP16650085U JP16650085U JPS6276528U JP S6276528 U JPS6276528 U JP S6276528U JP 16650085 U JP16650085 U JP 16650085U JP 16650085 U JP16650085 U JP 16650085U JP S6276528 U JPS6276528 U JP S6276528U
- Authority
- JP
- Japan
- Prior art keywords
- vapor phase
- phase growth
- growth apparatus
- susceptor
- induction heating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims description 5
- 230000006698 induction Effects 0.000 claims description 5
- 238000001947 vapour-phase growth Methods 0.000 claims 4
- 238000004804 winding Methods 0.000 claims 4
- 230000017525 heat dissipation Effects 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16650085U JPH0719142Y2 (ja) | 1985-10-31 | 1985-10-31 | 気相成長装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16650085U JPH0719142Y2 (ja) | 1985-10-31 | 1985-10-31 | 気相成長装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6276528U true JPS6276528U (enExample) | 1987-05-16 |
| JPH0719142Y2 JPH0719142Y2 (ja) | 1995-05-01 |
Family
ID=31097535
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16650085U Expired - Lifetime JPH0719142Y2 (ja) | 1985-10-31 | 1985-10-31 | 気相成長装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0719142Y2 (enExample) |
-
1985
- 1985-10-31 JP JP16650085U patent/JPH0719142Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0719142Y2 (ja) | 1995-05-01 |