JPH0719084Y2 - イオン注入装置 - Google Patents

イオン注入装置

Info

Publication number
JPH0719084Y2
JPH0719084Y2 JP12925288U JP12925288U JPH0719084Y2 JP H0719084 Y2 JPH0719084 Y2 JP H0719084Y2 JP 12925288 U JP12925288 U JP 12925288U JP 12925288 U JP12925288 U JP 12925288U JP H0719084 Y2 JPH0719084 Y2 JP H0719084Y2
Authority
JP
Japan
Prior art keywords
ion
ion beam
electrode
frequency
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP12925288U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0250952U (OSRAM
Inventor
武志 須之内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP12925288U priority Critical patent/JPH0719084Y2/ja
Publication of JPH0250952U publication Critical patent/JPH0250952U/ja
Application granted granted Critical
Publication of JPH0719084Y2 publication Critical patent/JPH0719084Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP12925288U 1988-09-30 1988-09-30 イオン注入装置 Expired - Lifetime JPH0719084Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12925288U JPH0719084Y2 (ja) 1988-09-30 1988-09-30 イオン注入装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12925288U JPH0719084Y2 (ja) 1988-09-30 1988-09-30 イオン注入装置

Publications (2)

Publication Number Publication Date
JPH0250952U JPH0250952U (OSRAM) 1990-04-10
JPH0719084Y2 true JPH0719084Y2 (ja) 1995-05-01

Family

ID=31383356

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12925288U Expired - Lifetime JPH0719084Y2 (ja) 1988-09-30 1988-09-30 イオン注入装置

Country Status (1)

Country Link
JP (1) JPH0719084Y2 (OSRAM)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9147554B2 (en) * 2009-07-02 2015-09-29 Axcelis Technologies, Inc. Use of beam scanning to improve uniformity and productivity of a 2D mechanical scan implantation system

Also Published As

Publication number Publication date
JPH0250952U (OSRAM) 1990-04-10

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