JPH071791Y2 - 半導体ウエハ取外装置 - Google Patents
半導体ウエハ取外装置Info
- Publication number
- JPH071791Y2 JPH071791Y2 JP1988138323U JP13832388U JPH071791Y2 JP H071791 Y2 JPH071791 Y2 JP H071791Y2 JP 1988138323 U JP1988138323 U JP 1988138323U JP 13832388 U JP13832388 U JP 13832388U JP H071791 Y2 JPH071791 Y2 JP H071791Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- polishing jig
- jig
- wax
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Mechanical Treatment Of Semiconductor (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988138323U JPH071791Y2 (ja) | 1988-10-24 | 1988-10-24 | 半導体ウエハ取外装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988138323U JPH071791Y2 (ja) | 1988-10-24 | 1988-10-24 | 半導体ウエハ取外装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0258331U JPH0258331U (fr) | 1990-04-26 |
JPH071791Y2 true JPH071791Y2 (ja) | 1995-01-18 |
Family
ID=31400553
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1988138323U Expired - Lifetime JPH071791Y2 (ja) | 1988-10-24 | 1988-10-24 | 半導体ウエハ取外装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH071791Y2 (fr) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW201241134A (en) * | 2010-12-14 | 2012-10-16 | Sumitomo Bakelite Co | Method of processing a base material |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5612735A (en) * | 1979-07-10 | 1981-02-07 | Nec Corp | Peeling of monocrystalline wafer |
JPS56161340U (fr) * | 1980-04-28 | 1981-12-01 |
-
1988
- 1988-10-24 JP JP1988138323U patent/JPH071791Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0258331U (fr) | 1990-04-26 |
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