JPH0715138Y2 - 縦型収納治具 - Google Patents
縦型収納治具Info
- Publication number
- JPH0715138Y2 JPH0715138Y2 JP1986015694U JP1569486U JPH0715138Y2 JP H0715138 Y2 JPH0715138 Y2 JP H0715138Y2 JP 1986015694 U JP1986015694 U JP 1986015694U JP 1569486 U JP1569486 U JP 1569486U JP H0715138 Y2 JPH0715138 Y2 JP H0715138Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- arc
- shaped
- storage jig
- holding portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 claims description 29
- 230000002093 peripheral effect Effects 0.000 claims description 21
- 235000012431 wafers Nutrition 0.000 description 121
- 238000000034 method Methods 0.000 description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 11
- 230000000052 comparative effect Effects 0.000 description 9
- 239000007789 gas Substances 0.000 description 9
- 238000010438 heat treatment Methods 0.000 description 8
- 239000010453 quartz Substances 0.000 description 8
- 230000000694 effects Effects 0.000 description 7
- 238000009792 diffusion process Methods 0.000 description 6
- 239000010409 thin film Substances 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 5
- 238000009434 installation Methods 0.000 description 5
- 239000012495 reaction gas Substances 0.000 description 5
- 238000007796 conventional method Methods 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 230000007547 defect Effects 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- 238000000605 extraction Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986015694U JPH0715138Y2 (ja) | 1986-02-07 | 1986-02-07 | 縦型収納治具 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986015694U JPH0715138Y2 (ja) | 1986-02-07 | 1986-02-07 | 縦型収納治具 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62128633U JPS62128633U (enrdf_load_stackoverflow) | 1987-08-14 |
| JPH0715138Y2 true JPH0715138Y2 (ja) | 1995-04-10 |
Family
ID=30806862
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986015694U Expired - Lifetime JPH0715138Y2 (ja) | 1986-02-07 | 1986-02-07 | 縦型収納治具 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0715138Y2 (enrdf_load_stackoverflow) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2961167B2 (ja) * | 1988-03-18 | 1999-10-12 | 東京エレクトロン株式会社 | ボート並びにそれを用いた熱処理装置及び方法 |
| JPH0648859Y2 (ja) * | 1989-03-03 | 1994-12-12 | ラムコ株式会社 | ウエハー支持具 |
| JP2537563Y2 (ja) * | 1989-03-20 | 1997-06-04 | 東横化学 株式会社 | 縦型減圧気相成長装置 |
| US5492229A (en) * | 1992-11-27 | 1996-02-20 | Toshiba Ceramics Co., Ltd. | Vertical boat and a method for making the same |
| JP3280438B2 (ja) * | 1992-11-30 | 2002-05-13 | 東芝セラミックス株式会社 | 縦型ボート |
| JP3250628B2 (ja) * | 1992-12-17 | 2002-01-28 | 東芝セラミックス株式会社 | 縦型半導体熱処理用治具 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS523731Y2 (enrdf_load_stackoverflow) * | 1971-06-21 | 1977-01-26 | ||
| JPS51879A (en) * | 1974-06-21 | 1976-01-07 | Hitachi Ltd | Cvd sochi |
| JPS60124031U (ja) * | 1984-01-27 | 1985-08-21 | 富士通株式会社 | 縦型炉 |
-
1986
- 1986-02-07 JP JP1986015694U patent/JPH0715138Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62128633U (enrdf_load_stackoverflow) | 1987-08-14 |
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