JPH0715136Y2 - ウエハ回転装置 - Google Patents
ウエハ回転装置Info
- Publication number
- JPH0715136Y2 JPH0715136Y2 JP2965288U JP2965288U JPH0715136Y2 JP H0715136 Y2 JPH0715136 Y2 JP H0715136Y2 JP 2965288 U JP2965288 U JP 2965288U JP 2965288 U JP2965288 U JP 2965288U JP H0715136 Y2 JPH0715136 Y2 JP H0715136Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- center
- centering cup
- rotary table
- pins
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000002093 peripheral effect Effects 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 8
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 3
- 238000005468 ion implantation Methods 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000004570 mortar (masonry) Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Landscapes
- Jigs For Machine Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2965288U JPH0715136Y2 (ja) | 1988-03-05 | 1988-03-05 | ウエハ回転装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2965288U JPH0715136Y2 (ja) | 1988-03-05 | 1988-03-05 | ウエハ回転装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01133738U JPH01133738U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-09-12 |
| JPH0715136Y2 true JPH0715136Y2 (ja) | 1995-04-10 |
Family
ID=31254046
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2965288U Expired - Lifetime JPH0715136Y2 (ja) | 1988-03-05 | 1988-03-05 | ウエハ回転装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0715136Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4038653B2 (ja) * | 2001-12-03 | 2008-01-30 | 株式会社安川電機 | ウェハ搬送フォーク |
| DE102007005208A1 (de) * | 2007-01-29 | 2008-07-31 | Suss Microtec Test Systems Gmbh | Verfahren zum Prüfen elektronischer Bauelemente und Prüfvorrichtung zur Durchführung des Verfahrens |
| JP5478187B2 (ja) * | 2009-10-13 | 2014-04-23 | トーヨーエイテック株式会社 | ワークの芯出し装置 |
| JP2021135257A (ja) * | 2020-02-28 | 2021-09-13 | 株式会社ミツトヨ | ワーク設置治具 |
-
1988
- 1988-03-05 JP JP2965288U patent/JPH0715136Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01133738U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-09-12 |
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