JPH0713216Y2 - プラズマ処理装置 - Google Patents

プラズマ処理装置

Info

Publication number
JPH0713216Y2
JPH0713216Y2 JP3265088U JP3265088U JPH0713216Y2 JP H0713216 Y2 JPH0713216 Y2 JP H0713216Y2 JP 3265088 U JP3265088 U JP 3265088U JP 3265088 U JP3265088 U JP 3265088U JP H0713216 Y2 JPH0713216 Y2 JP H0713216Y2
Authority
JP
Japan
Prior art keywords
electrode
plasma processing
processing apparatus
outer electrode
inner electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP3265088U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01137528U (enrdf_load_stackoverflow
Inventor
俊哉 橋口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP3265088U priority Critical patent/JPH0713216Y2/ja
Publication of JPH01137528U publication Critical patent/JPH01137528U/ja
Application granted granted Critical
Publication of JPH0713216Y2 publication Critical patent/JPH0713216Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP3265088U 1988-03-14 1988-03-14 プラズマ処理装置 Expired - Lifetime JPH0713216Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3265088U JPH0713216Y2 (ja) 1988-03-14 1988-03-14 プラズマ処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3265088U JPH0713216Y2 (ja) 1988-03-14 1988-03-14 プラズマ処理装置

Publications (2)

Publication Number Publication Date
JPH01137528U JPH01137528U (enrdf_load_stackoverflow) 1989-09-20
JPH0713216Y2 true JPH0713216Y2 (ja) 1995-03-29

Family

ID=31259203

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3265088U Expired - Lifetime JPH0713216Y2 (ja) 1988-03-14 1988-03-14 プラズマ処理装置

Country Status (1)

Country Link
JP (1) JPH0713216Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH01137528U (enrdf_load_stackoverflow) 1989-09-20

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